NL6918283A - - Google Patents

Info

Publication number
NL6918283A
NL6918283A NL6918283A NL6918283A NL6918283A NL 6918283 A NL6918283 A NL 6918283A NL 6918283 A NL6918283 A NL 6918283A NL 6918283 A NL6918283 A NL 6918283A NL 6918283 A NL6918283 A NL 6918283A
Authority
NL
Netherlands
Application number
NL6918283A
Other versions
NL164702C (nl
NL164702B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6918283A publication Critical patent/NL6918283A/xx
Publication of NL164702B publication Critical patent/NL164702B/xx
Application granted granted Critical
Publication of NL164702C publication Critical patent/NL164702C/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/611Combinations of BJTs and one or more of diodes, resistors or capacitors
    • H10D84/613Combinations of vertical BJTs and one or more of diodes, resistors or capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/041Manufacture or treatment of isolation regions comprising polycrystalline semiconductor materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/40Isolation regions comprising polycrystalline semiconductor materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/049Equivalence and options
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/051Etching
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/085Isolated-integrated
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/122Polycrystalline
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/135Removal of substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/151Simultaneous diffusion
NL6918283.A 1968-12-05 1969-12-04 Geintegreerde halfgeleiderschakeling, voorzien van een door een reactie in de dampfase gevormde halfgeleidende laag, die bestaat uit monokristallijne gebieden en uit een polykristallijn gebied dat de monokristallijne gebieden van elkaar scheidt. NL164702C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP43089227A JPS4912795B1 (https=) 1968-12-05 1968-12-05

Publications (3)

Publication Number Publication Date
NL6918283A true NL6918283A (https=) 1970-06-09
NL164702B NL164702B (nl) 1980-08-15
NL164702C NL164702C (nl) 1981-01-15

Family

ID=13964838

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6918283.A NL164702C (nl) 1968-12-05 1969-12-04 Geintegreerde halfgeleiderschakeling, voorzien van een door een reactie in de dampfase gevormde halfgeleidende laag, die bestaat uit monokristallijne gebieden en uit een polykristallijn gebied dat de monokristallijne gebieden van elkaar scheidt.

Country Status (5)

Country Link
US (1) US3871007A (https=)
JP (1) JPS4912795B1 (https=)
DE (1) DE1961225A1 (https=)
GB (1) GB1288940A (https=)
NL (1) NL164702C (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2151346C3 (de) * 1971-10-15 1981-04-09 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zum Herstellung einer aus Einkristallschichtteilen und Polykristallschichtteilen bestehenden Halbleiterschicht auf einem Einkristallkörper
US4053335A (en) * 1976-04-02 1977-10-11 International Business Machines Corporation Method of gettering using backside polycrystalline silicon
JPS5951743B2 (ja) * 1978-11-08 1984-12-15 株式会社日立製作所 半導体集積装置
US4242697A (en) * 1979-03-14 1980-12-30 Bell Telephone Laboratories, Incorporated Dielectrically isolated high voltage semiconductor devices
US4231819A (en) * 1979-07-27 1980-11-04 Massachusetts Institute Of Technology Dielectric isolation method using shallow oxide and polycrystalline silicon utilizing a preliminary etching step
US4283235A (en) * 1979-07-27 1981-08-11 Massachusetts Institute Of Technology Dielectric isolation using shallow oxide and polycrystalline silicon utilizing selective oxidation
GB2104722B (en) * 1981-06-25 1985-04-24 Suwa Seikosha Kk Mos semiconductor device and method of manufacturing the same
EP0109996B1 (fr) * 1982-11-26 1987-06-03 International Business Machines Corporation Structure de résistance autopolarisée et application à la réalisation de circuits d'interface
US4879585A (en) * 1984-03-31 1989-11-07 Kabushiki Kaisha Toshiba Semiconductor device
US4860081A (en) * 1984-06-28 1989-08-22 Gte Laboratories Incorporated Semiconductor integrated circuit structure with insulative partitions
US4649630A (en) * 1985-04-01 1987-03-17 Motorola, Inc. Process for dielectrically isolated semiconductor structure
JPS6281745A (ja) * 1985-10-05 1987-04-15 Fujitsu Ltd ウエハ−規模のlsi半導体装置とその製造方法
US5212109A (en) * 1989-05-24 1993-05-18 Nissan Motor Co., Ltd. Method for forming PN junction isolation regions by forming buried regions of doped polycrystalline or amorphous semiconductor
JP2567472B2 (ja) * 1989-05-24 1996-12-25 日産自動車株式会社 半導体装置
JP2890601B2 (ja) * 1990-02-08 1999-05-17 株式会社デンソー 半導体センサ
US7112867B2 (en) * 2003-12-05 2006-09-26 Intel Corporation Resistive isolation between a body and a body contact
US20070042563A1 (en) * 2005-08-19 2007-02-22 Honeywell International Inc. Single crystal based through the wafer connections technical field

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3320485A (en) * 1964-03-30 1967-05-16 Trw Inc Dielectric isolation for monolithic circuit
US3335038A (en) * 1964-03-30 1967-08-08 Ibm Methods of producing single crystals on polycrystalline substrates and devices using same

Also Published As

Publication number Publication date
GB1288940A (https=) 1972-09-13
NL164702C (nl) 1981-01-15
JPS4912795B1 (https=) 1974-03-27
US3871007A (en) 1975-03-11
NL164702B (nl) 1980-08-15
DE1961225A1 (de) 1970-08-27

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee