NL6916003A - - Google Patents
Info
- Publication number
- NL6916003A NL6916003A NL6916003A NL6916003A NL6916003A NL 6916003 A NL6916003 A NL 6916003A NL 6916003 A NL6916003 A NL 6916003A NL 6916003 A NL6916003 A NL 6916003A NL 6916003 A NL6916003 A NL 6916003A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US77100168A | 1968-10-28 | 1968-10-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL6916003A true NL6916003A (xx) | 1970-05-01 |
Family
ID=25090382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6916003A NL6916003A (xx) | 1968-10-28 | 1969-10-23 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3558461A (xx) |
BE (1) | BE740888A (xx) |
CH (1) | CH500572A (xx) |
DE (1) | DE1953070C3 (xx) |
ES (1) | ES373338A1 (xx) |
FR (1) | FR2021727A1 (xx) |
GB (1) | GB1285984A (xx) |
NL (1) | NL6916003A (xx) |
SE (1) | SE353178B (xx) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE793097A (fr) * | 1971-12-30 | 1973-04-16 | Western Electric Co | Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium |
CA1014889A (en) * | 1974-12-06 | 1977-08-02 | Bell-Northern Research Ltd. | Sputtered dielectric thin films |
US3962062A (en) * | 1974-12-09 | 1976-06-08 | Northern Electric Company Limited | Sputtered dielectric thin films |
US4169032A (en) * | 1978-05-24 | 1979-09-25 | International Business Machines Corporation | Method of making a thin film thermal print head |
JPH0819516B2 (ja) * | 1990-10-26 | 1996-02-28 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 薄膜状のアルファTaを形成するための方法および構造 |
US5221449A (en) * | 1990-10-26 | 1993-06-22 | International Business Machines Corporation | Method of making Alpha-Ta thin films |
US5281554A (en) * | 1991-02-08 | 1994-01-25 | Sharp Kabushiki Kaisha | Method for producing a semiconductor device having a tantalum thin film |
JP2976924B2 (ja) * | 1997-05-19 | 1999-11-10 | 日本電気株式会社 | 薄膜感温抵抗材料およびその製造方法 |
KR100297628B1 (ko) * | 1998-10-09 | 2001-08-07 | 황 철 주 | 반도체소자제조방법 |
-
1968
- 1968-10-28 US US771001A patent/US3558461A/en not_active Expired - Lifetime
-
1969
- 1969-10-20 SE SE14354/69A patent/SE353178B/xx unknown
- 1969-10-22 DE DE1953070A patent/DE1953070C3/de not_active Expired
- 1969-10-23 NL NL6916003A patent/NL6916003A/xx unknown
- 1969-10-25 ES ES373338A patent/ES373338A1/es not_active Expired
- 1969-10-27 GB GB52466/69A patent/GB1285984A/en not_active Expired
- 1969-10-27 CH CH1597769A patent/CH500572A/de not_active IP Right Cessation
- 1969-10-27 FR FR6936820A patent/FR2021727A1/fr not_active Withdrawn
- 1969-10-28 BE BE740888D patent/BE740888A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE1953070B2 (de) | 1973-03-22 |
BE740888A (xx) | 1970-04-01 |
SE353178B (xx) | 1973-01-22 |
CH500572A (de) | 1970-12-15 |
DE1953070A1 (de) | 1970-09-10 |
DE1953070C3 (de) | 1973-10-11 |
ES373338A1 (es) | 1972-01-16 |
FR2021727A1 (xx) | 1970-07-24 |
GB1285984A (en) | 1972-08-16 |
US3558461A (en) | 1971-01-26 |