NL6818139A - - Google Patents

Info

Publication number
NL6818139A
NL6818139A NL6818139A NL6818139A NL6818139A NL 6818139 A NL6818139 A NL 6818139A NL 6818139 A NL6818139 A NL 6818139A NL 6818139 A NL6818139 A NL 6818139A NL 6818139 A NL6818139 A NL 6818139A
Authority
NL
Netherlands
Application number
NL6818139A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6818139A publication Critical patent/NL6818139A/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
NL6818139A 1967-12-18 1968-12-17 NL6818139A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69116467A 1967-12-18 1967-12-18

Publications (1)

Publication Number Publication Date
NL6818139A true NL6818139A (de) 1969-06-20

Family

ID=24775414

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6818139A NL6818139A (de) 1967-12-18 1968-12-17

Country Status (9)

Country Link
AT (1) AT294136B (de)
BE (1) BE725171A (de)
CH (1) CH500514A (de)
DE (1) DE1815457A1 (de)
ES (1) ES361574A1 (de)
FR (1) FR1599162A (de)
GB (1) GB1217756A (de)
IL (1) IL31102A (de)
NL (1) NL6818139A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1488709A (en) * 1973-10-10 1977-10-12 Hercules Inc Photo-oxidizable compositions and elements
CA1079387A (en) * 1977-04-18 1980-06-10 Norris E. Cott Test station apparatus
US4568734A (en) * 1983-02-15 1986-02-04 Eastman Kodak Company Electron-beam and X-ray sensitive polymers and resists
DE102004004865B4 (de) * 2004-01-30 2008-01-10 Qimonda Ag Antireflexschicht, die mit einem Photoresist beschichtet ist, enthaltend Polymere auf der Basis von Zimtsäure für die 157 nm Photolithographie

Also Published As

Publication number Publication date
GB1217756A (en) 1970-12-31
IL31102A (en) 1972-05-30
DE1815457A1 (de) 1969-07-24
IL31102A0 (en) 1969-01-29
AT294136B (de) 1971-11-10
FR1599162A (de) 1970-07-15
CH500514A (de) 1970-12-15
BE725171A (de) 1969-05-16
ES361574A1 (es) 1970-11-01

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