FR1599162A - - Google Patents

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Publication number
FR1599162A
FR1599162A FR1599162DA FR1599162A FR 1599162 A FR1599162 A FR 1599162A FR 1599162D A FR1599162D A FR 1599162DA FR 1599162 A FR1599162 A FR 1599162A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1599162A publication Critical patent/FR1599162A/fr
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR1599162D 1967-12-18 1968-12-05 Expired FR1599162A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69116467A 1967-12-18 1967-12-18

Publications (1)

Publication Number Publication Date
FR1599162A true FR1599162A (fr) 1970-07-15

Family

ID=24775414

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1599162D Expired FR1599162A (fr) 1967-12-18 1968-12-05

Country Status (9)

Country Link
AT (1) AT294136B (fr)
BE (1) BE725171A (fr)
CH (1) CH500514A (fr)
DE (1) DE1815457A1 (fr)
ES (1) ES361574A1 (fr)
FR (1) FR1599162A (fr)
GB (1) GB1217756A (fr)
IL (1) IL31102A (fr)
NL (1) NL6818139A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1488709A (en) * 1973-10-10 1977-10-12 Hercules Inc Photo-oxidizable compositions and elements
CA1079387A (fr) * 1977-04-18 1980-06-10 Norris E. Cott Appareil pour station d'essai
US4568734A (en) * 1983-02-15 1986-02-04 Eastman Kodak Company Electron-beam and X-ray sensitive polymers and resists
DE102004004865B4 (de) 2004-01-30 2008-01-10 Qimonda Ag Antireflexschicht, die mit einem Photoresist beschichtet ist, enthaltend Polymere auf der Basis von Zimtsäure für die 157 nm Photolithographie

Also Published As

Publication number Publication date
BE725171A (fr) 1969-05-16
GB1217756A (en) 1970-12-31
IL31102A (en) 1972-05-30
DE1815457A1 (de) 1969-07-24
ES361574A1 (es) 1970-11-01
AT294136B (de) 1971-11-10
IL31102A0 (en) 1969-01-29
CH500514A (de) 1970-12-15
NL6818139A (fr) 1969-06-20

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Legal Events

Date Code Title Description
ST Notification of lapse