NL6715376A - - Google Patents

Info

Publication number
NL6715376A
NL6715376A NL6715376A NL6715376A NL6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A
Authority
NL
Netherlands
Application number
NL6715376A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6715376A publication Critical patent/NL6715376A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/20Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
    • C01B13/22Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
    • C01B13/28Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides using a plasma or an electric discharge
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
NL6715376A 1966-12-01 1967-11-13 NL6715376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEF0050816 1966-12-01

Publications (1)

Publication Number Publication Date
NL6715376A true NL6715376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1968-06-04

Family

ID=7104096

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6715376A NL6715376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1966-12-01 1967-11-13

Country Status (10)

Country Link
US (1) US3553527A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5220689B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) AT283533B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE (1) BE707343A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH507629A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1533253C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR1552284A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1212848A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6715376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NO (1) NO121150B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9116930U1 (de) * 1990-06-29 1995-02-02 Balzers-Pfeiffer GmbH, 35614 Aßlar Einrichtung zum Schutz elektrisch beheizter Vakuumöfen
US6602561B1 (en) * 1998-05-13 2003-08-05 Mitsubishi Denki Kabushiki Kaisha Electrode for discharge surface treatment and manufacturing method therefor and discharge surface treatment method and device
CH710862B1 (de) * 1999-11-26 2016-09-15 Imerys Graphite & Carbon Switzerland Sa Verfahren zur Herstellung von Graphitpulvern mit erhöhter Schüttdichte.
NO334933B1 (no) * 2011-05-04 2014-07-14 N2 Applied As Energieffektiv prosess for å produsere nitrogenoksid
KR20130024635A (ko) * 2011-08-31 2013-03-08 엘지이노텍 주식회사 반응 용기 및 이를 포함하는 진공 열처리 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1312257A (en) * 1919-08-05 Jesse c
US2468173A (en) * 1949-04-26 cotton
US3360682A (en) * 1965-10-15 1967-12-26 Giannini Scient Corp Apparatus and method for generating high-enthalpy plasma under high-pressure conditions

Also Published As

Publication number Publication date
NO121150B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-01-25
US3553527A (en) 1971-01-05
FR1552284A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1969-01-03
DE1533253A1 (de) 1969-12-11
GB1212848A (en) 1970-11-18
DE1533253C3 (de) 1975-02-13
CH507629A (de) 1971-05-15
DE1533253B2 (de) 1974-06-12
BE707343A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1968-05-30
AT283533B (de) 1970-08-10
JPS5220689B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-06-06

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