NL6715376A - - Google Patents

Info

Publication number
NL6715376A
NL6715376A NL6715376A NL6715376A NL6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A NL 6715376 A NL6715376 A NL 6715376A
Authority
NL
Netherlands
Application number
NL6715376A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6715376A publication Critical patent/NL6715376A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/20Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
    • C01B13/22Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
    • C01B13/28Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides using a plasma or an electric discharge
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
NL6715376A 1966-12-01 1967-11-13 NL6715376A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEF0050816 1966-12-01

Publications (1)

Publication Number Publication Date
NL6715376A true NL6715376A (xx) 1968-06-04

Family

ID=7104096

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6715376A NL6715376A (xx) 1966-12-01 1967-11-13

Country Status (10)

Country Link
US (1) US3553527A (xx)
JP (1) JPS5220689B1 (xx)
AT (1) AT283533B (xx)
BE (1) BE707343A (xx)
CH (1) CH507629A (xx)
DE (1) DE1533253C3 (xx)
FR (1) FR1552284A (xx)
GB (1) GB1212848A (xx)
NL (1) NL6715376A (xx)
NO (1) NO121150B (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4107096A1 (de) * 1990-06-29 1992-01-02 Pfeiffer Vakuumtechnik Einrichtung zum schutz elektrisch beheizter vakuumoefen
CN1185366C (zh) * 1998-05-13 2005-01-19 三菱电机株式会社 放电表面处理用电极及制造方法、放电表面处理方法及设备
CH710862B1 (de) * 1999-11-26 2016-09-15 Imerys Graphite & Carbon Switzerland Sa Verfahren zur Herstellung von Graphitpulvern mit erhöhter Schüttdichte.
NO334933B1 (no) * 2011-05-04 2014-07-14 N2 Applied As Energieffektiv prosess for å produsere nitrogenoksid
KR20130024635A (ko) * 2011-08-31 2013-03-08 엘지이노텍 주식회사 반응 용기 및 이를 포함하는 진공 열처리 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1312257A (en) * 1919-08-05 Jesse c
US2468173A (en) * 1949-04-26 cotton
US3360682A (en) * 1965-10-15 1967-12-26 Giannini Scient Corp Apparatus and method for generating high-enthalpy plasma under high-pressure conditions

Also Published As

Publication number Publication date
DE1533253B2 (de) 1974-06-12
DE1533253A1 (de) 1969-12-11
AT283533B (de) 1970-08-10
NO121150B (xx) 1971-01-25
FR1552284A (xx) 1969-01-03
JPS5220689B1 (xx) 1977-06-06
US3553527A (en) 1971-01-05
GB1212848A (en) 1970-11-18
DE1533253C3 (de) 1975-02-13
BE707343A (xx) 1968-05-30
CH507629A (de) 1971-05-15

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