NL6714765A - - Google Patents
Info
- Publication number
- NL6714765A NL6714765A NL6714765A NL6714765A NL6714765A NL 6714765 A NL6714765 A NL 6714765A NL 6714765 A NL6714765 A NL 6714765A NL 6714765 A NL6714765 A NL 6714765A NL 6714765 A NL6714765 A NL 6714765A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US59073666A | 1966-10-31 | 1966-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL6714765A true NL6714765A (de) | 1968-05-01 |
Family
ID=24363478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6714765A NL6714765A (de) | 1966-10-31 | 1967-10-31 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3609378A (de) |
AT (1) | AT296657B (de) |
BE (1) | BE705816A (de) |
CH (1) | CH487264A (de) |
DE (1) | DE1648808C3 (de) |
GB (1) | GB1189680A (de) |
LU (1) | LU54739A1 (de) |
NL (1) | NL6714765A (de) |
SE (1) | SE348620B (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4988871A (en) * | 1989-05-08 | 1991-01-29 | Leybold Inficon, Inc. | Gas partial pressure sensor for vacuum chamber |
DE3921040C2 (de) * | 1989-06-27 | 1994-03-10 | Balzers Hochvakuum | Verfahren und Anordnung zum Steuern der Verdampfung von Material von einem Zielobjekt durch einen Strahl geladener Teilchen und Verwendung, sowie Verfahren und Meßanordnung zum selektiven Messen einer verdampften Partikelmenge zur Durchführung des Verfahrens |
DE3929475A1 (de) * | 1989-09-05 | 1991-03-14 | Balzers Hochvakuum | Verfahren und vorrichtung zur umlenkung eines strahls |
DE4304612C2 (de) * | 1993-02-16 | 1995-03-16 | Fraunhofer Ges Forschung | Verfahren zur kontinuierlichen Messung der stofflichen Zusammensetzung des Dampfes einer Schmelze oder eines zu verdampfenden Materials im Vakuum |
US6542831B1 (en) | 2001-04-18 | 2003-04-01 | Desert Research Institute | Vehicle particulate sensor system |
US7320733B2 (en) * | 2003-05-09 | 2008-01-22 | Sukegawa Electric Co., Ltd. | Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof |
US7719681B2 (en) * | 2007-10-12 | 2010-05-18 | Inficon | Apparatus and method for measuring vapor flux density |
DE102013106788B4 (de) * | 2013-06-28 | 2019-07-11 | VON ARDENNE Asset GmbH & Co. KG | Vakuumbehandlungsanlage mit Vakuumkammerdurchführung |
-
1966
- 1966-10-31 US US590736A patent/US3609378A/en not_active Expired - Lifetime
-
1967
- 1967-10-17 GB GB47167/67A patent/GB1189680A/en not_active Expired
- 1967-10-25 LU LU54739D patent/LU54739A1/xx unknown
- 1967-10-26 SE SE14662/67A patent/SE348620B/xx unknown
- 1967-10-30 CH CH1521767A patent/CH487264A/de not_active IP Right Cessation
- 1967-10-30 BE BE705816D patent/BE705816A/xx unknown
- 1967-10-31 NL NL6714765A patent/NL6714765A/xx unknown
- 1967-10-31 DE DE1648808A patent/DE1648808C3/de not_active Expired
- 1967-10-31 AT AT985867A patent/AT296657B/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
LU54739A1 (de) | 1968-01-26 |
AT296657B (de) | 1972-02-25 |
CH487264A (de) | 1970-03-15 |
DE1648808B2 (de) | 1973-08-30 |
DE1648808A1 (de) | 1972-04-06 |
DE1648808C3 (de) | 1974-04-04 |
US3609378A (en) | 1971-09-28 |
BE705816A (de) | 1968-03-01 |
GB1189680A (en) | 1970-04-29 |
SE348620B (de) | 1972-09-04 |