NL6703526A - - Google Patents
Info
- Publication number
- NL6703526A NL6703526A NL6703526A NL6703526A NL6703526A NL 6703526 A NL6703526 A NL 6703526A NL 6703526 A NL6703526 A NL 6703526A NL 6703526 A NL6703526 A NL 6703526A NL 6703526 A NL6703526 A NL 6703526A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H10P14/6334—
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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- H10P14/6682—
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- H10P14/69433—
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- H10P50/283—
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- H10W74/43—
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0103578 | 1966-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6703526A true NL6703526A (en:Method) | 1967-11-03 |
Family
ID=7525306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6703526A NL6703526A (en:Method) | 1966-05-02 | 1967-03-06 |
Country Status (4)
| Country | Link |
|---|---|
| AT (1) | AT266922B (en:Method) |
| CH (1) | CH488290A (en:Method) |
| GB (1) | GB1134352A (en:Method) |
| NL (1) | NL6703526A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4066037A (en) * | 1975-12-17 | 1978-01-03 | Lfe Corportion | Apparatus for depositing dielectric films using a glow discharge |
| DE2557079C2 (de) * | 1975-12-18 | 1984-05-24 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zum Herstellen einer Maskierungsschicht |
| FR2403646A1 (fr) | 1977-09-16 | 1979-04-13 | Anvar | Procede de realisation d'un depot de compose semi-conducteur d'elements iii et v |
-
1967
- 1967-03-06 NL NL6703526A patent/NL6703526A/xx unknown
- 1967-04-28 AT AT404767A patent/AT266922B/de active
- 1967-04-28 CH CH615267A patent/CH488290A/de not_active IP Right Cessation
- 1967-05-01 GB GB19916/67A patent/GB1134352A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH488290A (de) | 1970-03-31 |
| AT266922B (de) | 1968-12-10 |
| DE1544288A1 (de) | 1970-03-05 |
| DE1544288B2 (de) | 1975-06-12 |
| GB1134352A (en) | 1968-11-20 |