NL6608065A - - Google Patents

Info

Publication number
NL6608065A
NL6608065A NL6608065A NL6608065A NL6608065A NL 6608065 A NL6608065 A NL 6608065A NL 6608065 A NL6608065 A NL 6608065A NL 6608065 A NL6608065 A NL 6608065A NL 6608065 A NL6608065 A NL 6608065A
Authority
NL
Netherlands
Application number
NL6608065A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6608065A publication Critical patent/NL6608065A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Detergent Compositions (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
NL6608065A 1965-06-11 1966-06-10 NL6608065A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US463190A US3394217A (en) 1965-06-11 1965-06-11 Method and apparatus for controlling plural electron beams

Publications (1)

Publication Number Publication Date
NL6608065A true NL6608065A (enrdf_load_html_response) 1966-12-12

Family

ID=23839207

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6608065A NL6608065A (enrdf_load_html_response) 1965-06-11 1966-06-10

Country Status (11)

Country Link
US (1) US3394217A (enrdf_load_html_response)
AT (1) AT278187B (enrdf_load_html_response)
BE (1) BE681839A (enrdf_load_html_response)
CH (1) CH452731A (enrdf_load_html_response)
DE (1) DE1565881B2 (enrdf_load_html_response)
DK (1) DK117649B (enrdf_load_html_response)
GB (1) GB1141594A (enrdf_load_html_response)
LU (1) LU51261A1 (enrdf_load_html_response)
NL (1) NL6608065A (enrdf_load_html_response)
NO (1) NO117547B (enrdf_load_html_response)
SE (1) SE346196B (enrdf_load_html_response)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475542A (en) * 1967-09-13 1969-10-28 Air Reduction Apparatus for heating a target in an electron beam furnace
US3535428A (en) * 1968-07-17 1970-10-20 Air Reduction Apparatus for producing and directing an electron beam
FR2244014B1 (enrdf_load_html_response) * 1973-09-17 1976-10-08 Bosch Gmbh Robert
IT1037702B (it) * 1975-04-29 1979-11-20 Varian Associates Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico
US3999097A (en) * 1975-06-30 1976-12-21 International Business Machines Corporation Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
SU782571A1 (ru) * 1976-05-12 1983-09-23 Институт ядерной физики СО АН СССР Способ радиационной обработки изделий круглого сечени
DD204947A1 (de) * 1982-04-20 1983-12-14 Manfred Neumann Einrichtung zum elektronenstrahlbedampfen breiter baender
WO1991013458A1 (en) * 1990-03-02 1991-09-05 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
JP3275166B2 (ja) * 1997-02-28 2002-04-15 住友重機械工業株式会社 プラズマビームの偏り修正機構を備えた真空成膜装置
US6476340B1 (en) 1999-04-14 2002-11-05 The Boc Group, Inc. Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3105275A (en) * 1960-05-27 1963-10-01 Stauffer Chemical Co Electron-beam furnace with double-coil magnetic beam guidance
FR1374335A (fr) * 1962-12-13 1964-10-09 Electronique & Physique Dispositif pour fabriquer une lame en matériau à grande pureté

Also Published As

Publication number Publication date
DE1565881A1 (de) 1970-03-19
GB1141594A (en) 1969-01-29
BE681839A (enrdf_load_html_response) 1966-10-31
DE1565881B2 (de) 1971-01-21
SE346196B (enrdf_load_html_response) 1972-06-26
US3394217A (en) 1968-07-23
NO117547B (enrdf_load_html_response) 1969-08-25
AT278187B (de) 1970-01-26
CH452731A (de) 1968-03-15
LU51261A1 (enrdf_load_html_response) 1966-08-16
DK117649B (da) 1970-05-19

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