NL6603599A - - Google Patents

Info

Publication number
NL6603599A
NL6603599A NL6603599A NL6603599A NL6603599A NL 6603599 A NL6603599 A NL 6603599A NL 6603599 A NL6603599 A NL 6603599A NL 6603599 A NL6603599 A NL 6603599A NL 6603599 A NL6603599 A NL 6603599A
Authority
NL
Netherlands
Application number
NL6603599A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6603599A publication Critical patent/NL6603599A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Recrystallisation Techniques (AREA)
NL6603599A 1965-03-19 1966-03-18 NL6603599A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB11897/65A GB1145013A (en) 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices

Publications (1)

Publication Number Publication Date
NL6603599A true NL6603599A (enrdf_load_stackoverflow) 1966-09-20

Family

ID=9994660

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6603599A NL6603599A (enrdf_load_stackoverflow) 1965-03-19 1966-03-18

Country Status (5)

Country Link
US (1) US3383550A (enrdf_load_stackoverflow)
JP (1) JPS5020718B1 (enrdf_load_stackoverflow)
DE (1) DE1539010B1 (enrdf_load_stackoverflow)
GB (1) GB1145013A (enrdf_load_stackoverflow)
NL (1) NL6603599A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3038624C2 (de) * 1980-10-13 1984-02-09 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Gasentladungs-Elektronenkanone mit einer Kaltkathode
DE3038644C2 (de) * 1980-10-13 1984-03-15 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Steuerungsverfahren für eine Gasentladungs-Elektronenkanone
RU2167466C1 (ru) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Плазменный источник ионов и способ его работы

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Also Published As

Publication number Publication date
JPS5020718B1 (enrdf_load_stackoverflow) 1975-07-17
US3383550A (en) 1968-05-14
GB1145013A (en) 1969-03-12
DE1539010B1 (de) 1970-10-29

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