GB1145013A - Improvements in or relating to cold cathode, glow discharge devices - Google Patents

Improvements in or relating to cold cathode, glow discharge devices

Info

Publication number
GB1145013A
GB1145013A GB11897/65A GB1189765A GB1145013A GB 1145013 A GB1145013 A GB 1145013A GB 11897/65 A GB11897/65 A GB 11897/65A GB 1189765 A GB1189765 A GB 1189765A GB 1145013 A GB1145013 A GB 1145013A
Authority
GB
United Kingdom
Prior art keywords
electron beam
glow discharge
march
machining
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11897/65A
Other languages
English (en)
Inventor
Ronald Arthur Dugdale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB11897/65A priority Critical patent/GB1145013A/en
Priority to US535139A priority patent/US3383550A/en
Priority to DE19661539010 priority patent/DE1539010B1/de
Priority to NL6603599A priority patent/NL6603599A/xx
Priority to JP41016952A priority patent/JPS5020718B1/ja
Publication of GB1145013A publication Critical patent/GB1145013A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Recrystallisation Techniques (AREA)
GB11897/65A 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices Expired GB1145013A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB11897/65A GB1145013A (en) 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices
US535139A US3383550A (en) 1965-03-19 1966-03-17 Cold cathode, glow discharge devices
DE19661539010 DE1539010B1 (de) 1965-03-19 1966-03-18 Kaltkathoden-Glimmentladungseinrichtung zur Erzeugung eines Elektronenstrahlbuendels
NL6603599A NL6603599A (enrdf_load_stackoverflow) 1965-03-19 1966-03-18
JP41016952A JPS5020718B1 (enrdf_load_stackoverflow) 1965-03-19 1966-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB11897/65A GB1145013A (en) 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices

Publications (1)

Publication Number Publication Date
GB1145013A true GB1145013A (en) 1969-03-12

Family

ID=9994660

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11897/65A Expired GB1145013A (en) 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices

Country Status (5)

Country Link
US (1) US3383550A (enrdf_load_stackoverflow)
JP (1) JPS5020718B1 (enrdf_load_stackoverflow)
DE (1) DE1539010B1 (enrdf_load_stackoverflow)
GB (1) GB1145013A (enrdf_load_stackoverflow)
NL (1) NL6603599A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3038644A1 (de) * 1980-10-13 1982-05-19 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Steuerungsverfahren fuer eine gasentladungs-elektronenkanone
DE3038624A1 (de) * 1980-10-13 1982-06-03 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Gasentladungs-elektronenkanone mit einer kaltkathode

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2167466C1 (ru) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Плазменный источник ионов и способ его работы

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3038644A1 (de) * 1980-10-13 1982-05-19 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Steuerungsverfahren fuer eine gasentladungs-elektronenkanone
DE3038624A1 (de) * 1980-10-13 1982-06-03 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Gasentladungs-elektronenkanone mit einer kaltkathode

Also Published As

Publication number Publication date
JPS5020718B1 (enrdf_load_stackoverflow) 1975-07-17
US3383550A (en) 1968-05-14
NL6603599A (enrdf_load_stackoverflow) 1966-09-20
DE1539010B1 (de) 1970-10-29

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