NL6602350A - - Google Patents
Info
- Publication number
- NL6602350A NL6602350A NL6602350A NL6602350A NL6602350A NL 6602350 A NL6602350 A NL 6602350A NL 6602350 A NL6602350 A NL 6602350A NL 6602350 A NL6602350 A NL 6602350A NL 6602350 A NL6602350 A NL 6602350A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1636765A CH455959A (de) | 1965-11-25 | 1965-11-25 | Elektronenemissionsmikroskop |
| US60677567A | 1967-01-03 | 1967-01-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6602350A true NL6602350A (enExample) | 1967-05-26 |
Family
ID=25717842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6602350A NL6602350A (enExample) | 1965-11-25 | 1966-02-23 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3505521A (enExample) |
| CH (1) | CH455959A (enExample) |
| DE (1) | DE1539718C3 (enExample) |
| GB (1) | GB1137574A (enExample) |
| NL (1) | NL6602350A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3758778A (en) * | 1971-07-29 | 1973-09-11 | Bendix Corp | Surface imaging exoelectron microscope |
| DE2141387C3 (de) * | 1971-08-18 | 1975-12-11 | Ernst Dr. 8000 Muenchen Remy | Verfahren zur auf Mikrobereiche beschränkten Verdampfung, Zerstörung, Anregung und/oder Ionisierung von Probenmaterial sowie Anordnung zur Durchführung des Verfahrens |
| US3919553A (en) * | 1974-04-12 | 1975-11-11 | Research Corp | Integrated device for controlling charging artifacts in scanning electron microscopes |
| US6602428B2 (en) * | 2000-12-13 | 2003-08-05 | Denso Corporation | Method of manufacturing sensor having membrane structure |
| NL1021376C1 (nl) * | 2002-09-02 | 2004-03-03 | Fei Co | Werkwijze voor het verkrijgen van een deeltjes-optische afbeelding van een sample in een deeltjes-optisch toestel. |
| TW202534727A (zh) * | 2023-11-06 | 2025-09-01 | 德商卡爾蔡司Ｓｍｔ有限公司 | 用於可互換製程模組的模組化計量裝置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL60316C (enExample) * | 1939-07-13 | |||
| CH391912A (de) * | 1961-11-09 | 1965-05-15 | Trueb Taeuber & Co Ag | Verfahren zur Sichtbarmachung und Aufnahme von elektronenoptischen Bildern |
| CH409167A (de) * | 1963-09-18 | 1966-03-15 | Trueb Taeuber & Co Ag | Vorrichtung zur elektronenoptischen Untersuchung von Objektoberflächen |
-
1965
- 1965-11-25 CH CH1636765A patent/CH455959A/de unknown
-
1966
- 1966-02-23 NL NL6602350A patent/NL6602350A/xx unknown
- 1966-10-17 DE DE1539718A patent/DE1539718C3/de not_active Expired
- 1966-11-22 GB GB48617/66A patent/GB1137574A/en not_active Expired
-
1967
- 1967-01-03 US US606775A patent/US3505521A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3505521A (en) | 1970-04-07 |
| DE1539718B2 (de) | 1974-01-31 |
| DE1539718C3 (de) | 1974-09-12 |
| CH455959A (de) | 1968-05-15 |
| DE1539718A1 (de) | 1970-02-19 |
| GB1137574A (en) | 1968-12-27 |