NL6600952A - - Google Patents

Info

Publication number
NL6600952A
NL6600952A NL6600952A NL6600952A NL6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A NL 6600952 A NL6600952 A NL 6600952A
Authority
NL
Netherlands
Application number
NL6600952A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6600952A publication Critical patent/NL6600952A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL6600952A 1965-12-18 1966-01-25 NL6600952A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1750165A CH452313A (de) 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum

Publications (1)

Publication Number Publication Date
NL6600952A true NL6600952A (enrdf_load_html_response) 1967-06-19

Family

ID=4425902

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6600952A NL6600952A (enrdf_load_html_response) 1965-12-18 1966-01-25

Country Status (6)

Country Link
US (1) US3544763A (enrdf_load_html_response)
CH (1) CH452313A (enrdf_load_html_response)
DE (1) DE1521175B2 (enrdf_load_html_response)
FR (1) FR1505169A (enrdf_load_html_response)
GB (1) GB1105989A (enrdf_load_html_response)
NL (1) NL6600952A (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4094269A (en) * 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
BG20711A1 (enrdf_load_html_response) * 1974-06-14 1975-12-20
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
DE2628765C3 (de) * 1976-06-26 1979-01-11 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide
DE4016225C2 (de) * 1990-05-19 1997-08-14 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE4100541C1 (enrdf_load_html_response) * 1991-01-10 1992-01-16 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De

Also Published As

Publication number Publication date
DE1521175B2 (de) 1973-04-26
US3544763A (en) 1970-12-01
FR1505169A (fr) 1967-12-08
DE1521175A1 (de) 1969-07-31
CH452313A (de) 1968-05-31
GB1105989A (en) 1968-03-13

Similar Documents

Publication Publication Date Title
BE673125A (enrdf_load_html_response)
JPS4413417Y1 (enrdf_load_html_response)
JPS4220249Y1 (enrdf_load_html_response)
JPS4314560Y1 (enrdf_load_html_response)
BE670715A (enrdf_load_html_response)
BE622068A (enrdf_load_html_response)
BE658159A (enrdf_load_html_response)
BE661858A (enrdf_load_html_response)
BE665466A (enrdf_load_html_response)
BE666305A (enrdf_load_html_response)
BE666424A (enrdf_load_html_response)
BE666639A (enrdf_load_html_response)
BE667330A (enrdf_load_html_response)
BE667394A (enrdf_load_html_response)
BE668917A (enrdf_load_html_response)
BE669577A (enrdf_load_html_response)
BE669659A (enrdf_load_html_response)
BE669769A (enrdf_load_html_response)
BE672914A (enrdf_load_html_response)
BE672918A (enrdf_load_html_response)
BE673201A (enrdf_load_html_response)
BE673453A (enrdf_load_html_response)
BE673635A (enrdf_load_html_response)
BE673710A (enrdf_load_html_response)
BE673719A (enrdf_load_html_response)