NL6406449A - - Google Patents

Info

Publication number
NL6406449A
NL6406449A NL6406449A NL6406449A NL6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A
Authority
NL
Netherlands
Application number
NL6406449A
Other versions
NL145716B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL646406449A priority Critical patent/NL145716B/xx
Priority to DEN26822A priority patent/DE1260048B/de
Priority to US460981A priority patent/US3394254A/en
Priority to CH775565A priority patent/CH437562A/de
Priority to SE07302/65A priority patent/SE332466B/xx
Priority to AT505965A priority patent/AT256197B/de
Priority to GB23933/65A priority patent/GB1098865A/en
Priority to BE664970A priority patent/BE664970A/xx
Priority to FR19624A priority patent/FR1443476A/fr
Publication of NL6406449A publication Critical patent/NL6406449A/xx
Publication of NL145716B publication Critical patent/NL145716B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL646406449A 1964-06-06 1964-06-06 Elektronenstraalapparaat. NL145716B (nl)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.
DEN26822A DE1260048B (de) 1964-06-06 1965-06-02 Elektronenstrahlgeraet mit elektromagnetischer Linse
US460981A US3394254A (en) 1964-06-06 1965-06-03 Electron-optical system with a magnetic focussing lens having a cooling means
CH775565A CH437562A (de) 1964-06-06 1965-06-03 Elektronenstrahlgerät
SE07302/65A SE332466B (en:Method) 1964-06-06 1965-06-03
AT505965A AT256197B (de) 1964-06-06 1965-06-03 Elektronenstrahlgerät
GB23933/65A GB1098865A (en) 1964-06-06 1965-06-04 Improvements in or relating to electro-magnetic lenses and to apparatus including such lenses
BE664970A BE664970A (en:Method) 1964-06-06 1965-06-04
FR19624A FR1443476A (fr) 1964-06-06 1965-06-04 Appareil à faisceau électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.

Publications (2)

Publication Number Publication Date
NL6406449A true NL6406449A (en:Method) 1965-12-07
NL145716B NL145716B (nl) 1975-04-15

Family

ID=19790247

Family Applications (1)

Application Number Title Priority Date Filing Date
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.

Country Status (8)

Country Link
US (1) US3394254A (en:Method)
AT (1) AT256197B (en:Method)
BE (1) BE664970A (en:Method)
CH (1) CH437562A (en:Method)
DE (1) DE1260048B (en:Method)
GB (1) GB1098865A (en:Method)
NL (1) NL145716B (en:Method)
SE (1) SE332466B (en:Method)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234183A (en:Method) * 1967-08-18 1971-06-03
GB1238889A (en:Method) * 1968-11-26 1971-07-14
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
DE2752598C3 (de) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US5289009A (en) * 1990-08-02 1994-02-22 U.S. Philips Corporation Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
GB2397691B (en) 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam
KR101589306B1 (ko) * 2005-11-28 2016-01-27 칼 짜이스 에스엠테 게엠베하 입자 광학 구성요소
EP1970935B1 (en) * 2007-03-14 2011-01-12 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Lens coil cooling of a magnetic lens
DE102008062888B4 (de) * 2008-12-23 2010-12-16 Carl Zeiss Nts Gmbh Teilchenoptische Vorrichtung mit Magnetanordnung
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895350C (de) * 1938-11-06 1953-11-02 Siemens Ag Elektronenmikroskop
US2202505A (en) * 1939-01-13 1940-05-28 Baird Television Ltd Electromagnetic focusing coil
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
NL278366A (en:Method) * 1961-05-27

Also Published As

Publication number Publication date
BE664970A (en:Method) 1965-12-06
US3394254A (en) 1968-07-23
CH437562A (de) 1967-06-15
GB1098865A (en) 1968-01-10
DE1260048B (de) 1968-02-01
NL145716B (nl) 1975-04-15
AT256197B (de) 1967-08-10
SE332466B (en:Method) 1971-02-08

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Legal Events

Date Code Title Description
VJC Lapsed due to non-payment of the due maintenance fee for the patent or patent application
NL80 Abbreviated name of patent owner mentioned of already nullified patent

Owner name: PHILIPS