NL6405174A - - Google Patents
Info
- Publication number
- NL6405174A NL6405174A NL6405174A NL6405174A NL6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR934112A FR1364093A (fr) | 1963-05-08 | 1963-05-08 | Dispositif pour l'obtention par évaporation sous vide de couches mixtes minces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6405174A true NL6405174A (https=) | 1964-11-09 |
Family
ID=8803369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6405174A NL6405174A (https=) | 1963-05-08 | 1964-05-08 |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE646776A (https=) |
| DE (1) | DE1282410B (https=) |
| FR (1) | FR1364093A (https=) |
| GB (1) | GB1051402A (https=) |
| NL (1) | NL6405174A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3636916A (en) * | 1966-03-14 | 1972-01-25 | Optical Coating Laboratory Inc | Coating apparatus and system |
| US3570449A (en) * | 1969-03-13 | 1971-03-16 | United Aircraft Corp | Sensor system for a vacuum deposition apparatus |
| DE2412729C3 (de) * | 1974-03-16 | 1982-04-29 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und Anordnung zur Regelung der Verdampfungsrate und des Schichtaufbaus bei der Erzeugung optisch wirksamer Dünnschichten |
| US4837044A (en) * | 1987-01-23 | 1989-06-06 | Itt Research Institute | Rugate optical filter systems |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1301197A (fr) * | 1960-10-04 | 1962-08-10 | Rca Corp | Chambre d'évaporation à trou |
-
0
- GB GB1051402D patent/GB1051402A/en active Active
-
1963
- 1963-05-08 FR FR934112A patent/FR1364093A/fr not_active Expired
-
1964
- 1964-04-20 BE BE646776A patent/BE646776A/xx unknown
- 1964-05-06 DE DEC32818A patent/DE1282410B/de active Pending
- 1964-05-08 NL NL6405174A patent/NL6405174A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR1364093A (fr) | 1964-06-19 |
| DE1282410B (de) | 1968-11-07 |
| GB1051402A (https=) | |
| BE646776A (https=) | 1964-10-20 |