NL6405174A - - Google Patents

Info

Publication number
NL6405174A
NL6405174A NL6405174A NL6405174A NL6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A NL 6405174 A NL6405174 A NL 6405174A
Authority
NL
Netherlands
Application number
NL6405174A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6405174A publication Critical patent/NL6405174A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
NL6405174A 1963-05-08 1964-05-08 NL6405174A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR934112A FR1364093A (fr) 1963-05-08 1963-05-08 Dispositif pour l'obtention par évaporation sous vide de couches mixtes minces

Publications (1)

Publication Number Publication Date
NL6405174A true NL6405174A (enrdf_load_stackoverflow) 1964-11-09

Family

ID=8803369

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6405174A NL6405174A (enrdf_load_stackoverflow) 1963-05-08 1964-05-08

Country Status (5)

Country Link
BE (1) BE646776A (enrdf_load_stackoverflow)
DE (1) DE1282410B (enrdf_load_stackoverflow)
FR (1) FR1364093A (enrdf_load_stackoverflow)
GB (1) GB1051402A (enrdf_load_stackoverflow)
NL (1) NL6405174A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3636916A (en) * 1966-03-14 1972-01-25 Optical Coating Laboratory Inc Coating apparatus and system
US3570449A (en) * 1969-03-13 1971-03-16 United Aircraft Corp Sensor system for a vacuum deposition apparatus
DE2412729C3 (de) * 1974-03-16 1982-04-29 Leybold-Heraeus GmbH, 5000 Köln Verfahren und Anordnung zur Regelung der Verdampfungsrate und des Schichtaufbaus bei der Erzeugung optisch wirksamer Dünnschichten
US4837044A (en) * 1987-01-23 1989-06-06 Itt Research Institute Rugate optical filter systems

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1301197A (fr) * 1960-10-04 1962-08-10 Rca Corp Chambre d'évaporation à trou

Also Published As

Publication number Publication date
DE1282410B (de) 1968-11-07
FR1364093A (fr) 1964-06-19
BE646776A (enrdf_load_stackoverflow) 1964-10-20
GB1051402A (enrdf_load_stackoverflow)

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