NL287577A - - Google Patents
Info
- Publication number
- NL287577A NL287577A NL287577DA NL287577A NL 287577 A NL287577 A NL 287577A NL 287577D A NL287577D A NL 287577DA NL 287577 A NL287577 A NL 287577A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/935—Gas flow control
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT30362A AT231530B (de) | 1962-01-16 | 1962-01-16 | Verfahren und Einrichtung zum Aufbringen dünner Schichten durch thermisches Verdampfen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL287577A true NL287577A (en:Method) |
Family
ID=3486966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL287577D NL287577A (en:Method) | 1962-01-16 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3333982A (en:Method) |
| AT (1) | AT231530B (en:Method) |
| CH (1) | CH418770A (en:Method) |
| GB (1) | GB1005341A (en:Method) |
| NL (1) | NL287577A (en:Method) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3569706A (en) * | 1965-10-22 | 1971-03-09 | Physics Technology Lab Inc | Method and apparatus for generating a continuous beam of neutral atoms |
| FR2455634A1 (fr) * | 1979-05-04 | 1980-11-28 | Bois Daniel | Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran |
| CA1197088A (en) * | 1983-10-17 | 1985-11-26 | Jerzy A. Dobrowolski | Vapour deposition regulating apparatus |
| US5133286A (en) * | 1989-04-14 | 1992-07-28 | Samsung Electro-Mechanics Co., Ltd. | Substrate-heating device and boat structure for a vacuum-depositing apparatus |
| DE4100643C1 (en:Method) * | 1991-01-11 | 1991-10-31 | Leybold Ag, 6450 Hanau, De | |
| DE10330401B3 (de) * | 2003-07-04 | 2005-02-24 | Applied Films Gmbh & Co. Kg | Verfahren und Vorrichtung zum bereichsweisen Auftragen von Trennmitteln |
| DE102010021547A1 (de) * | 2010-05-20 | 2011-11-24 | Konstantinos Fostiropoulos | Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren |
| KR20130079489A (ko) * | 2010-07-28 | 2013-07-10 | 시너스 테크놀리지, 인코포레이티드 | 기판상에 막을 증착하기 위한 회전 반응기 조립체 |
| US20150024538A1 (en) * | 2013-07-19 | 2015-01-22 | Tsmc Solar Ltd. | Vapor dispensing apparatus and method for solar panel |
| CN115852316B (zh) * | 2022-12-06 | 2024-11-26 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | 一种高真空多源热蒸发镀膜设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2160981A (en) * | 1935-10-19 | 1939-06-06 | O'brien Brian | Method and apparatus for producing thin wedges |
| US2614524A (en) * | 1946-08-22 | 1952-10-21 | Rca Corp | Capacitor manufacturing evaporation apparatus |
| US3087838A (en) * | 1955-10-05 | 1963-04-30 | Hupp Corp | Methods of photoelectric cell manufacture |
| US2948261A (en) * | 1956-12-07 | 1960-08-09 | Western Electric Co | Apparatus for producing printed wiring by metal vaporization |
| US3108560A (en) * | 1959-07-15 | 1963-10-29 | Gen Motors Corp | Means for assembling printed circuits with components |
-
0
- NL NL287577D patent/NL287577A/xx unknown
-
1962
- 1962-01-16 AT AT30362A patent/AT231530B/de active
-
1963
- 1963-01-08 CH CH16963A patent/CH418770A/de unknown
- 1963-01-11 GB GB1326/63A patent/GB1005341A/en not_active Expired
- 1963-01-14 US US251325A patent/US3333982A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1005341A (en) | 1965-09-22 |
| AT231530B (de) | 1964-02-10 |
| US3333982A (en) | 1967-08-01 |
| CH418770A (de) | 1966-08-15 |