GB1005341A - Improvements in and relating to methods and devices for applying coatings by vaporisation - Google Patents
Improvements in and relating to methods and devices for applying coatings by vaporisationInfo
- Publication number
- GB1005341A GB1005341A GB1326/63A GB132663A GB1005341A GB 1005341 A GB1005341 A GB 1005341A GB 1326/63 A GB1326/63 A GB 1326/63A GB 132663 A GB132663 A GB 132663A GB 1005341 A GB1005341 A GB 1005341A
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour
- rays
- cylinder
- collector
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/935—Gas flow control
Abstract
<PICT:1005341/C6-C7/1> In vapour depositing coatings, e.g. of metals, semi-conductors or other materials, on a collector, e.g. heat sensitive microscope specimens, heat rays from the vapour source are prevented from reaching the collector. As shown, heat and vapour rays from a furnace 3 are split into impulses by a rotating cylinder 1 having apertures 2. Because of the geometry of the apertures 2, heat rays entering the cylinder are intercepted by the cylinder's opposite side, whereas the slower moving vapour rays can pass through to a collector 6 via an aperture in a diaphragm 7. Instead of a single hollow cylinder, two can be used which rotate in the same direction or counter to one another and are arranged one above the other or one inside the other. The same end is achieved by two discs rigidly connected by a common shaft and provided with apertures staggered with respect to one another. A further embodiment comprises apertured spaced screens which can be set in motion in phase displacement to one another.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT30362A AT231530B (en) | 1962-01-16 | 1962-01-16 | Method and device for applying thin layers by thermal evaporation |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1005341A true GB1005341A (en) | 1965-09-22 |
Family
ID=3486966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1326/63A Expired GB1005341A (en) | 1962-01-16 | 1963-01-11 | Improvements in and relating to methods and devices for applying coatings by vaporisation |
Country Status (5)
Country | Link |
---|---|
US (1) | US3333982A (en) |
AT (1) | AT231530B (en) |
CH (1) | CH418770A (en) |
GB (1) | GB1005341A (en) |
NL (1) | NL287577A (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3569706A (en) * | 1965-10-22 | 1971-03-09 | Physics Technology Lab Inc | Method and apparatus for generating a continuous beam of neutral atoms |
FR2455634A1 (en) * | 1979-05-04 | 1980-11-28 | Bois Daniel | METHOD AND DEVICE FOR VACUUM EVAPORATION DEPOSITION USING A MOLDED ELECTRON BEAM AND A SCREEN |
CA1197088A (en) * | 1983-10-17 | 1985-11-26 | Jerzy A. Dobrowolski | Vapour deposition regulating apparatus |
US5133286A (en) * | 1989-04-14 | 1992-07-28 | Samsung Electro-Mechanics Co., Ltd. | Substrate-heating device and boat structure for a vacuum-depositing apparatus |
DE4100643C1 (en) * | 1991-01-11 | 1991-10-31 | Leybold Ag, 6450 Hanau, De | |
DE10330401B3 (en) * | 2003-07-04 | 2005-02-24 | Applied Films Gmbh & Co. Kg | Method and device for the area-wise application of release agents |
DE102010021547A1 (en) * | 2010-05-20 | 2011-11-24 | Konstantinos Fostiropoulos | Depositing thin films on substrates by vacuum deposition method, comprises heating coating material in form of vapor cloud in evaporation source until it vaporizes, and spreading evaporated coating material on surface of substrate |
KR20130079489A (en) * | 2010-07-28 | 2013-07-10 | 시너스 테크놀리지, 인코포레이티드 | Rotating reactor assembly for depositing film on substrate |
US20150024538A1 (en) * | 2013-07-19 | 2015-01-22 | Tsmc Solar Ltd. | Vapor dispensing apparatus and method for solar panel |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2160981A (en) * | 1935-10-19 | 1939-06-06 | O'brien Brian | Method and apparatus for producing thin wedges |
US2614524A (en) * | 1946-08-22 | 1952-10-21 | Rca Corp | Capacitor manufacturing evaporation apparatus |
US3087838A (en) * | 1955-10-05 | 1963-04-30 | Hupp Corp | Methods of photoelectric cell manufacture |
US2948261A (en) * | 1956-12-07 | 1960-08-09 | Western Electric Co | Apparatus for producing printed wiring by metal vaporization |
US3108560A (en) * | 1959-07-15 | 1963-10-29 | Gen Motors Corp | Means for assembling printed circuits with components |
-
0
- NL NL287577D patent/NL287577A/xx unknown
-
1962
- 1962-01-16 AT AT30362A patent/AT231530B/en active
-
1963
- 1963-01-08 CH CH16963A patent/CH418770A/en unknown
- 1963-01-11 GB GB1326/63A patent/GB1005341A/en not_active Expired
- 1963-01-14 US US251325A patent/US3333982A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AT231530B (en) | 1964-02-10 |
NL287577A (en) | |
US3333982A (en) | 1967-08-01 |
CH418770A (en) | 1966-08-15 |
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