NL275889A - - Google Patents

Info

Publication number
NL275889A
NL275889A NL275889DA NL275889A NL 275889 A NL275889 A NL 275889A NL 275889D A NL275889D A NL 275889DA NL 275889 A NL275889 A NL 275889A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL275889A publication Critical patent/NL275889A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/002Controlling or regulating
    • C30B23/005Controlling or regulating flux or flow of depositing species or vapour
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
NL275889D 1961-03-14 NL275889A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES72962A DE1262979B (de) 1961-03-14 1961-03-14 Verfahren und Vorrichtung zum Herstellen einkristalliner Schichten durch Aufdampfen

Publications (1)

Publication Number Publication Date
NL275889A true NL275889A (https=)

Family

ID=7503587

Family Applications (1)

Application Number Title Priority Date Filing Date
NL275889D NL275889A (https=) 1961-03-14

Country Status (5)

Country Link
CH (1) CH395680A (https=)
DE (1) DE1262979B (https=)
FR (1) FR1317607A (https=)
GB (1) GB948997A (https=)
NL (1) NL275889A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1298512B (de) * 1964-03-13 1969-07-03 Telefunken Patent Einrichtung zum Aufdampfen einkristalliner Schichten auf Unterlagen
US3514320A (en) * 1969-02-10 1970-05-26 William H Vaughan Method of forming single crystal films by nonepitaxial growth

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE514927A (https=) * 1952-01-22
DE1057845B (de) * 1954-03-10 1959-05-21 Licentia Gmbh Verfahren zur Herstellung von einkristallinen halbleitenden Verbindungen
NL105256C (https=) * 1956-03-05
DE1054802B (de) * 1956-03-05 1959-04-09 Westinghouse Electric Corp Verfahren zur Verdampfung von Stoffen, insbesondere zur Erzeugung der UEbergangszonen (junctions) von Transistoren

Also Published As

Publication number Publication date
DE1262979B (de) 1968-03-14
FR1317607A (https=) 1963-05-08
GB948997A (en) 1964-02-05
CH395680A (de) 1965-07-15

Similar Documents

Publication Publication Date Title
FR1317607A (https=)
BE601415A (https=)
BE601532A (https=)
BE732847A (https=)
BE651791A (https=)
BE633493A (https=)
BE630344A (https=)
BE628506A (https=)
BE626705A (https=)
BE626697A (https=)
BE626141A (https=)
BE625959A (https=)
BE625894A (https=)
BE624191A (https=)
BE624116A (https=)
BE623776A (https=)
BE622743A (https=)
BE620195A (https=)
BE619871A (https=)
BE619818A (https=)
BE617405A (https=)
BE602558A (https=)
BE602469A (https=)
BE602240A (https=)
BE602153A (https=)