NL2002159C - Apparatus and method for accurate positioning. - Google Patents

Apparatus and method for accurate positioning. Download PDF

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Publication number
NL2002159C
NL2002159C NL2002159A NL2002159A NL2002159C NL 2002159 C NL2002159 C NL 2002159C NL 2002159 A NL2002159 A NL 2002159A NL 2002159 A NL2002159 A NL 2002159A NL 2002159 C NL2002159 C NL 2002159C
Authority
NL
Netherlands
Prior art keywords
frame
subframe
main frame
sub
main
Prior art date
Application number
NL2002159A
Other languages
Dutch (nl)
Inventor
Maarten Heijden
Original Assignee
Vision Dynamics Holding B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vision Dynamics Holding B V filed Critical Vision Dynamics Holding B V
Priority to NL2002159A priority Critical patent/NL2002159C/en
Application granted granted Critical
Publication of NL2002159C publication Critical patent/NL2002159C/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Description

Apparatus and method for accurate positioning
The invention relates to an apparatus comprising a first main-frame and a second sub-frame, wherein the first mainframe and the second sub-frame are moveable with respect to each other and wherein the second sub-frame is positionable so as to 5 have it assume a predetermined end-position with respect to the first main-frame.
The invention further relates to a method for such accurate positioning.
An apparatus and method according to the preamble are 10 known from the prior art. For instance in an apparatus to be used in lithography it is an object to accurately position a first part of such apparatus with respect to a second part of such apparatus. High levels of accuracy and/or stability need to be accomplished in such an apparatus, for instance the accuracy 15 of the positioning may have to be better than 5 nanometer.
Also in other technological areas high accuracy positioning and/or stability may present a problem and the severity of this problem may be stressed when the apparatus has to operate in vacuum or near vacuum conditions.
20 Particularly in vacuum or near to vacuum conditions the surfaces of the first main-frame and the second sub-frame are very clean and consequently the coefficient of friction between these frame parts will be very high, thus making it hard to perform an accurate positioning of the first main-frame and the 25 second sub-frame with respect to each other. It is known to apply under these circumstances high positioning forces to operate on either the first main-frame or the second sub-frame in order to secure that the desired end-position will be assumed. This however may deform the frame parts which in turn deteriorates 30 the level of accuracy that may be attained with the positioning.
It is an object of the invention to provide an apparatus and a method in which high accuracy positioning is possible and wherein the pit-falls of the prior art are avoided as much as possible.
35 To this end the apparatus and method of the invention are characterized by one of more of the appended claims.
In a first aspect of the invention the apparatus is characterized in that the first main-frame and/or the second 2 sub-frame are provided with excitation means to induce a predetermined vibration to the first main-frame and/or the second sub-frame.
This allows that during positioning the first main-5 frame and/or the second sub-frame are subjected to a vibration with a predetermined frequency and amplitude. This vibration periodically alleviates the contact force between the first mainframe and the second sub-frame to a level of virtually zero, allowing that the first main-frame and the second sub-frame can be 10 positioned with respect to each other, without the need to apply high external forces. Particularly, when the first main-frame and the second sub-frame are given an appropriate orientation it is possible that the accurate positioning is performed under the influence of gravity only as the driving force for movement of 15 the first main-frame and the second sub-frame with respect to each other.
As mentioned above it is desirable that the vibration is selected to have a frequency and amplitude capable to at least temporarily varying a force at which the first main-frame 20 and the second sub-frame contact each other.
Preferably, the vibration is selected to have an amplitude which is less than a predetermined accuracy at the end-position of the second sub-frame with respect to the first mainframe. The selection of the amplitude does have a direct rela-25 tion and influence on the accuracy of the end-position that the second sub-frame eventually arrives at with respect to the first main-frame.
Beneficially the apparatus of the invention is provided with excitation means in the form of a piezo-ceramic vibrator.
30 An advantageous feature of the apparatus and method of the invention is that it can reduce inaccuracies due to thermal variations such as thermal expansion or contraction.
When the apparatus with the first main-frame and the second sub-frame heats up or cools down, the said first main-35 frame and second sub-frame may exhibit a different rate of expansion or contraction. Without further measures this may cause tension at the contact areas of the first main-frame and second sub-frame. This may rise up to a level that the existing friction at the contact area or contact areas is surpassed and a 40 sudden movement of either the first main-frame or second sub-frame will occur to release the tension. Evidently this is 3 detrimental to the stability of the apparatus. The invention can now advantageously improve the stability of the apparatus by periodically applying the said vibration so as to relieve the tension between the first main-frame and second sub-frame. Thus 5 also in situations that the temperature varies and different rates of expansion and/or contraction between the first mainframe and second sub-frame may occur, this will not result in deteriorated stability or accuracy of the apparatus.
The invention will hereinafter be further elucidated 10 with reference to a schematic example and with reference to the drawing of a single figure.
In the figure the end-stops 4, 4', 4''of a first mainframe are shown as well as the contours of a second sub-frame 2.
With reference numeral 3, 3', 3'' the contact areas of 15 the second sub-frame 2 with the end-stops 4, 4', 4'' of the first main-frame 1 are indicated. With arrow F a driving force is shown that acts on the second sub-frame 2 so as to cause that its contact areas 3, 3', 3'' will eventually contact the end-stops 4, 4', 4'' of the first main-frame 1.
20 Due to the construction that the first main-frame 1 and second sub-frame 2 may have, a difficulty may reside in accomplishing the purpose to have all contact areas 3, 3', 3'' come to lie against each of the end-stops 4, 4', 4'' of the first main-frame 1. According to the invention the first main-frame 1 25 and/or the second sub-frame 2 may be imparted with a predetermined vibration so as to release frictional forces as indicated with arrows F'and F'' relating to the contact between end-stops 4' and 4'' and contact areas 3'and 3".
With the said reduced frictional forces F' and F'' it is possible that the second sub-frame 2 under the influence of force F moves further until also contact area 3 comes to rest against end-stop 4 of the first main-frame 1. Thus an accurate positioning of the second sub-frame 2 with respect to the first main-frame 1 having the said end-stops 4, 4', 4'' is realised.

Claims (7)

1. Inrichting omvattende een eerste hoofdframe (1) en een tweede subframe (2) waarin het eerste hoofdframe (1) en het 5 tweede subframe (2) ten opzichte van elkaar verplaatsbaar zijn en waarin het tweede subframe (2) positioneerbaar is teneinde deze een vooraf bepaalde eindpositie ten opzichte van het eerste hoofdframe (1) te laten innemen, met het kenmerk, dat het eerste hoofdframe (1) en/of het tweede subframe (2) voorzien zijn van 10 excitatiemiddelen voor het in een vooraf bepaalde trilling brengen van het eerste hoofdframe (1) en/of het tweede subframe (2).1. Device comprising a first main frame (1) and a second subframe (2) in which the first main frame (1) and the second subframe (2) are movable relative to each other and in which the second subframe (2) is positionable in order to having a predetermined end position relative to the first main frame (1), characterized in that the first main frame (1) and / or the second subframe (2) are provided with excitation means for bringing into a predetermined vibration of the first main frame (1) and / or the second subframe (2). 2. Inrichting volgens conclusie 1, met het kenmerk, dat de trilling geselecteerd is met een freguentie en amplitude die is ingericht voor het tenminste tijdelijk variëren van een 15 kracht met. welke het eerste hoofdframe (1) en het tweede subframe (2) met elkaar in contact staan.2. Device as claimed in claim 1, characterized in that the vibration is selected with a frequency and amplitude which is arranged for at least temporarily varying a force with. which the first main frame (1) and the second subframe (2) are in contact with each other. 3. Inrichting volgens conclusie 2, met het kenmerk, dat de trilling geselecteerd is met een amplitude welke minder bedraagt dan een vooraf bepaalde nauwkeurigheid ter plaatse van de 20 eindpositie van het tweede subframe (2) met betrekking tot het eerste hoofdframe (1).3. Device as claimed in claim 2, characterized in that the vibration is selected with an amplitude which is less than a predetermined accuracy at the end position of the second subframe (2) with respect to the first main frame (1). 4. Inrichting volgens conclusie 3, met het kenmerk, dat genoemde amplitude, welke minder bedraagt dan genoemde vooraf bepaalde nauwkeurigheid de trillingsamplitude is in een contact- 25 gebied of contactgebieden (3, 3', 3'') van het eerste hoofdframe (1) en het tweede subframe (2).4. Device as claimed in claim 3, characterized in that said amplitude, which is less than said predetermined accuracy, is the vibration amplitude in a contact area or areas (3, 3 ', 3' ') of the first main frame (1) ) and the second subframe (2). 5. Inrichting volgens een der conclusies 1-4, met het kenmerk, dat de excitatiemiddelen een piëzo-keramische vibrator omvatten.Device as claimed in any of the claims 1-4, characterized in that the excitation means comprise a piezo-ceramic vibrator. 6. Werkwijze voor het nauwkeurig positioneren van een eerste hoofdframe (1) en een tweede subframe (2) met betrekking tot elkaar totdat het tweede subframe (2) rust op ten minste één stop (4) van het eerste hoofdframe (1), met het kenmerk, dat gedurende het positioneren van het eerste hoofdframe (1) en/of het 35 tweede subframe (2) deze onderworpen zijn aan een trilling met een vooraf bepaalde frequentie en amplitude.Method for accurately positioning a first main frame (1) and a second subframe (2) relative to each other until the second subframe (2) rests on at least one stop (4) of the first main frame (1), with characterized in that during the positioning of the first main frame (1) and / or the second subframe (2) they are subjected to a vibration with a predetermined frequency and amplitude. 7. Werkwijze volgens conclusie 6, met het kenmerk, dat het positioneren van het eerste hoofdframe (1) en het tweede subframe (2) ten opzichte van elkaar in vacuüm of onder nagenoeg 40 vacuümcondities geschiedt.Method according to claim 6, characterized in that the positioning of the first main frame (1) and the second subframe (2) relative to each other takes place in vacuum or under substantially 40 vacuum conditions.
NL2002159A 2008-10-31 2008-10-31 Apparatus and method for accurate positioning. NL2002159C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2002159A NL2002159C (en) 2008-10-31 2008-10-31 Apparatus and method for accurate positioning.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2002159A NL2002159C (en) 2008-10-31 2008-10-31 Apparatus and method for accurate positioning.
NL2002159 2008-10-31

Publications (1)

Publication Number Publication Date
NL2002159C true NL2002159C (en) 2010-05-04

Family

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Application Number Title Priority Date Filing Date
NL2002159A NL2002159C (en) 2008-10-31 2008-10-31 Apparatus and method for accurate positioning.

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NL (1) NL2002159C (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3438807A1 (en) * 1983-10-24 1985-05-02 Canon K.K., Tokio/Tokyo Slide
US20020048416A1 (en) * 2000-10-20 2002-04-25 International Business Machines Corporation Air bearing between a first and second object

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3438807A1 (en) * 1983-10-24 1985-05-02 Canon K.K., Tokio/Tokyo Slide
US20020048416A1 (en) * 2000-10-20 2002-04-25 International Business Machines Corporation Air bearing between a first and second object

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
STORCK H ET AL: "The effect of friction reduction in presence of ultrasonic vibrations and its relevance to travelling wave ultrasonic motors", ULTRASONICS, IPC SCIENCE AND TECHNOLOGY PRESS LTD. GUILDFORD, GB, vol. 40, no. 1-8, 1 May 2002 (2002-05-01), pages 379 - 383, XP004357229, ISSN: 0041-624X *

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee

Effective date: 20120501