NL147280B - ELECTROMAGNETIC ELECTRONIC LENS, PARTICULARLY FOR AN ELECTRON MICROSCOPE. - Google Patents

ELECTROMAGNETIC ELECTRONIC LENS, PARTICULARLY FOR AN ELECTRON MICROSCOPE.

Info

Publication number
NL147280B
NL147280B NL707008534A NL7008534A NL147280B NL 147280 B NL147280 B NL 147280B NL 707008534 A NL707008534 A NL 707008534A NL 7008534 A NL7008534 A NL 7008534A NL 147280 B NL147280 B NL 147280B
Authority
NL
Netherlands
Prior art keywords
electron microscope
electronic lens
electromagnetic electronic
electromagnetic
lens
Prior art date
Application number
NL707008534A
Other languages
Dutch (nl)
Other versions
NL7008534A (en
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7008534A publication Critical patent/NL7008534A/xx
Publication of NL147280B publication Critical patent/NL147280B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
NL707008534A 1969-06-13 1970-06-11 ELECTROMAGNETIC ELECTRONIC LENS, PARTICULARLY FOR AN ELECTRON MICROSCOPE. NL147280B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5507769 1969-06-13

Publications (2)

Publication Number Publication Date
NL7008534A NL7008534A (en) 1970-12-15
NL147280B true NL147280B (en) 1975-09-15

Family

ID=12988624

Family Applications (1)

Application Number Title Priority Date Filing Date
NL707008534A NL147280B (en) 1969-06-13 1970-06-11 ELECTROMAGNETIC ELECTRONIC LENS, PARTICULARLY FOR AN ELECTRON MICROSCOPE.

Country Status (3)

Country Link
US (1) US3643191A (en)
GB (1) GB1290240A (en)
NL (1) NL147280B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4178094A (en) * 1978-09-01 1979-12-11 Xerox Corporation Belt support and steering module
FR2491258A1 (en) * 1980-09-29 1982-04-02 Le N Proizv Opto-electronic system for electron microscope - has lenses formed around single magnetic core with annular grooves
US4698611A (en) * 1986-12-03 1987-10-06 General Electric Company Passive shimming assembly for MR magnet

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB680300A (en) * 1950-02-23 1952-10-01 Vickers Electrical Co Ltd Improvements relating to magnetic electron lenses
US2637000A (en) * 1951-02-15 1953-04-28 Magnetic electron -lens

Also Published As

Publication number Publication date
NL7008534A (en) 1970-12-15
US3643191A (en) 1972-02-15
GB1290240A (en) 1972-09-20

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