NL1040702B1 - Cryo hexapod positioning system. - Google Patents

Cryo hexapod positioning system. Download PDF

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Publication number
NL1040702B1
NL1040702B1 NL1040702A NL1040702A NL1040702B1 NL 1040702 B1 NL1040702 B1 NL 1040702B1 NL 1040702 A NL1040702 A NL 1040702A NL 1040702 A NL1040702 A NL 1040702A NL 1040702 B1 NL1040702 B1 NL 1040702B1
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Netherlands
Prior art keywords
module
base
realized
actuator
relative
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NL1040702A
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Dutch (nl)
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NL1040702A (en
Inventor
Hubertus Leonardus Mathias Marie Janssen Ir
Bartholomeus Catharina Thomas Van Bree Ir
Maurice Anton Jacques Teuwen Ir
Original Assignee
Janssen Prec Eng
Hubertus Leonardus Mathias Marie Janssen Ir
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Application filed by Janssen Prec Eng, Hubertus Leonardus Mathias Marie Janssen Ir filed Critical Janssen Prec Eng
Priority to NL1040702A priority Critical patent/NL1040702B1/en
Publication of NL1040702A publication Critical patent/NL1040702A/en
Application granted granted Critical
Publication of NL1040702B1 publication Critical patent/NL1040702B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0015—Flexure members, i.e. parts of manipulators having a narrowed section allowing articulation by flexion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0033—Programme-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base
    • B25J9/0042—Programme-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base with kinematics chains of the type prismatic-universal-universal

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)

Description

Crvo hexapod positioning system
The invention concerns an actuated positioning devicefor positioning a sample in six degrees of freedom in acryogenic environment.
Especially in the field of scientific research forinstance with quantum physics, experiments are doneunder cryogenic environment close to the absolute zeropoint in temperature. In these experiments alignmentsand linear displacements need to be realized overmillimetre strokes and with nanometre accuracy.Especially high position stability is required.
Typically combined positioning in three linear axes andthree rotations is done by stacking multiple positioningdevices each being able to manipulate at least onedegree of freedom. Due to the fact that each positioningdevice has its own guiding with limited stiffness andcertain mass, the total stack of devices that is used forthe manipulation of the sample is relatively heavy andthe connection to the base is relatively weak, resultingin poor modal behaviour and hysteresis in the motion.Moreover a feature of typical devices that are used inthis kind of applications is that they are based onstandard stages, with modified rollers and guidings forcryo compatibility. Disadvantages lie in theuncontrollable preload due to different thermalshrinkage of the various materials. The effect of thisuncontrollable preload is the unpredictable translationforce or, even worse, the unwanted play both leading toinaccurate positioning or even malfunction of thedevice.
07 0 2
The invention concerns the use of a hexapodconfiguration in which all manipulation actions aredone in parallel in order to overcome these issues.
The positioning table is supported by 6 parallel acting,f r i c t i ο η 1 e s s , hysteresis free and play free guidingelements based on elastic deformation of flexures whichare each individually driven by an actuator.
The actuators to be used in a hexapod configuration canbe based on numerous different principles like:hydraulic actuators, spindle drives, piezoelectricactuators, used as direct drive but also in combinationwith stroke enhancement methods like flexures orstepping, and electromagnetic principles but forcryogenic high stiffness, high resolution and highstability demands a piezo driven spindle actuator is anobvious choice.
The exact nature of this invention, as well as itsobjectives becomes clear in the accompanying drawingswherein:
Fig.l Is a schematic drawing of the invention
Fig.2 Is a schematic drawing of a single guiding element with spring and sensor
In figure 1, the system is depicted. On top of the rigidbase 1, six identical guiding elements 4 are placed. Thetopside of each element is coupled to the rigid table 6.Each element has the capacity to output a linear motion,exemplary shown by the arrow 5. Controlling the intotal six output motions of the elements allows position control of table 6 with respect to base 1 in six degreesof freedom.
Each guiding element 4 is a monolithic machined blockwith integrated flexures to allow relative motionbetween the stationary frame 1 and the table 6. Thecombined frictionless, hysteresis free and play freeflexures 10, 11, 12, 13 and 14 allow the exemplarymotion 5 to be transferred with high stiffness to therigid table 6 of the system while the other degrees offreedom remain unconstrained and have a relative lowsti ffness .
Each of the controllable output motions 5 has its ownactuator 2. Between the actuator 2 and the guidingelement 4 a piezo stack is placed which can generatedisplacements with high force, high stiffness, highresolution and high frequency in the direction of motionof the guiding element. A pretension spring 9 ensures aproper contact between the actuator, the piezo stack andthe guiding element to ensure a stiff and play freecontact.
Each of the controllable output motions 5 has a positionmeasurement system 7.
Each guiding element has a defined internal mechanicalend-stop 8 which can be used to define a referenceposition of the table 6.

Claims (7)

1. De uitvinding betreft een inrichting met het kenmerkdat: Een hexapod gelijkend systeem is gerealiseerd omeen tafel ten opzichte van een basis in zesvrijheidsgraden met hoge nauwkeurigheid,stabiliteit en stijfheid te positioneren over eenbereik van enkele millimeters, door toepassing vanzes identieke modules tussen de basis en tafel,waarbij de module in staat is om intern éénrelatieve beweging ten opzichte van zijn stationairedeel door te leiden en deze beweging aan de tafelover te dragen; iedere module uit een enkel deel, zgnmonolitisch deel, gefabriceerd is, met daarin ondermeer alle benodigde, op elastische vervorminggebaseerde, geleidingen om, spelingsvrij en zonderwrijving, met hoge stijfheid uitsluitend éénrelative beweging ten opzichte van de basis door teleiden; de verbinding tussen de basis en iedere modulewordt gerealiseerd door een lineaire actuator die instaat is om positieveranderingen te realiseren in deaandrij frichting van de module ten opzichte van debasis; iedere lineaire actuator is gebaseerd op eenroterende schroefspindel in een aan de basisverbonden moer waardoor deze in onbekrachtigdetoestand door zelfremmendheid zijn positie behoudtmet hoge positiestabiliteit, houdkracht en stijfheid; iedere module is voorzien van een piezo stackdie in staat is een verplaatsing in aandrij frichting te realiseren ten opzichte van de reeds door deactuator opgedrongen positie, waardoor er binneneen beperkt a a n d r i j f g e b i e d verplaatsingen met zeerhoge resolutie en hoge frequentie kunnen wordengerealiseerd; de positie van iedere module, in dea a n dr i j f r i c h t i n g, ten opzichte van de basis wordtgemeten met een positie- of verplaatsingssensor; er een voorspanning over het contact tussenmodule en actuator wordt gerealiseerd doortoepassing van veren welke niet verbonden zijn metde tafel maar zijn geïntegreerd in de module,danwel zijn verbonden met de basis; het systeem van een een of meerdere referentieposities wordt voorzien door de module ina a n d r i j f r i c h t i n g op een of meerdere plaatsen tebegrenzen door gedefinieerde reproducerendemechanische einda ans1agen .1. The invention relates to a device characterized in that: A hexapod-like system is realized to position a table in six-degree degrees of freedom with high accuracy, stability and rigidity over a range of a few millimeters, by using six identical modules between the base and table, the module being capable of internally passing on a relative movement relative to its stationary part and transferring this movement to the table over; each module is manufactured from a single part, the so-called monolithic part, which includes, among other things, all necessary, deformation-based guides for play-free and non-friction, with high rigidity, only one relative movement with respect to the base by teleids; the connection between the base and each module is realized by a linear actuator capable of realizing positional changes in the drive direction of the module relative to the base; each linear actuator is based on a rotating screw spindle in a nut connected to the base, so that it retains its position in self-braking condition with high positional stability, holding force and rigidity; each module is provided with a piezo stack that is capable of realizing a displacement in the drive direction relative to the position already forced by the deactivator, whereby limited displacements of very high resolution and high frequency can be realized within a limited range; the position of each module, in this case relative to the base, is measured with a position or displacement sensor; a bias over the contact between module and actuator is realized by applying springs which are not connected to the table but are integrated in the module or are connected to the base; the system is provided with one or more reference positions by limiting the module in one or more places by defined reproduction mechanical end positions. 2. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat de modules nietvoorzien zijn van een piezo stack.A device according to any one of the preceding claims, characterized in that the modules are not provided with a piezo stack. 3. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat de lineair actuatorniet is uitgevoerd als een s c h r o e f s p i n d e 1 en een aande basis verbonden moer, maar op een andere manieronbekrachtigd zijn eenmaal ingestelde positie kanbehouden3. A device as claimed in any one of the preceding claims, characterized in that the linear actuator is designed as a nut 1 and a nut connected to the base, but can retain its once adjusted position in a different way. 4. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat de actuator in o n b e k r a c h t i gd e toestand niet zijn positie behoudt, t maar dat deze gebruik makend van een posititie- ofverplaatsingssensor en een servo controller wordtbehouden.A device as claimed in any one of the preceding claims, characterized in that the actuator does not retain its position in its condition, but that it is maintained using a position or displacement sensor and a servo controller. 5. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat de p o s i t i e s e n s o r instaat is absolute p o s i t i e - i n f o r m a t i e te gevenwaardoor er geen mechanische einda ans1agen nodigzijn voor referentie.5. A device as claimed in any one of the preceding claims, characterized in that the p o s i t i e s s o r is capable of giving absolute p o s i t i e - i n f o r m a t i e as a result of which no mechanical end views are required for reference. 6. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat er geen positie ofverplaatsingssensor in elke afzonderlijke module istoegepast, maar dat de positie informatie wordtverkregen door één of meerdere sensoren dierechtstreeks de positie van de tafel, of een hieraanverbonden object, meten.A device as claimed in any one of the preceding claims, characterized in that no position or displacement sensor is applied in each individual module, but that the position information is obtained by one or more sensors directly measuring the position of the table, or an associated object. 7. Een inrichting volgens een der voorgaandeconclusies, met het kenmerk dat de voorspanningover het contact tussen actuator en module op eenandere manier wordt gerealiseerd dan doortoepassing van veren welke niet verbonden zijn metde tafel maar zijn geïntegreerd in de module, danwelzijn verbonden met de basis.A device according to any one of the preceding claims, characterized in that the bias over the contact between actuator and module is realized in a different way than by applying springs which are not connected to the table but are integrated in the module or are connected to the base.
NL1040702A 2014-03-04 2014-03-04 Cryo hexapod positioning system. NL1040702B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL1040702A NL1040702B1 (en) 2014-03-04 2014-03-04 Cryo hexapod positioning system.

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Application Number Priority Date Filing Date Title
NL1040702A NL1040702B1 (en) 2014-03-04 2014-03-04 Cryo hexapod positioning system.

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NL1040702B1 true NL1040702B1 (en) 2015-10-27

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1402992A1 (en) * 2002-09-27 2004-03-31 Sysmelec SA High precision apparatus for imposing or for measuring a position or a force
JP5041810B2 (en) * 2003-09-12 2012-10-03 カール・ツァイス・エスエムティー・ゲーエムベーハー Optical element operation device
KR100568206B1 (en) * 2004-02-13 2006-04-05 삼성전자주식회사 Stage apparatus
EP1637277A1 (en) * 2004-09-17 2006-03-22 CSEM Centre Suisse d'Electronique et de Microtechnique SA Parallel kinematics machine with elastic joints
US7239107B1 (en) * 2006-02-24 2007-07-03 The Board Of Trustees Of The University Of Illinois Flexure stage
US20070284502A1 (en) * 2006-06-13 2007-12-13 Nikon Corporation Hexapod kinematic mountings for optical elements, and optical systems comprising same
JP5043468B2 (en) * 2007-02-23 2012-10-10 キヤノン株式会社 Holding device

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Effective date: 20190401