NL1042458B1 - Cryogenic Bearing Stage - Google Patents

Abstract

T h e i n v e s t i o n c o n c e r n s t h e i n t r o d u c t i o n o f a m o d u l e w h i c h c o m p r i s e s a n a c t i v e d i s p l a c e n t c o m p o n e n t 5 b a s e d o n p i e z o m a t e r i a l a n d a c e r a m i c g u i d i n g i n o r d e r t o c r e a t e d r i v i n g f o r c e a n d p r o p e r g u i d i n g. T h e p i e z o e l e c t r i c a c t u a t o r i s a b l e t o i n i t i a t e s m a l l d i s p 1 a c e n t s o f a n i n n e r b o d y w h i c h i s c o n n e c t e d b y f r i c t i o n t o t h e m o v i n g s l i d e r o f t h e s t a g e. B y a p p l y i n g s h o r t 1 0 d i s p l a c e m e n t p u l s e s t h e m o f i n g s l i d e r r a n e l i t e d i r e c t i o n s.

Description

Netherlands Patent Office © 1042458 (2?) Application number: 1042458 © Application filed: July 10, 2017 © B1 OCTROOI

Int. Cl .:

H02N 2/02 (2018.01) H01L 41/09 (2018.01)

0 Application registered: © Patent holder (s): January 16, 2019 Janssen Precision Engineering at Maastricht Airport. 0 Request published: ir. Hubertus Leonardus Mathias Marie - Janssen in Bunde. © Patent granted: January 16, 2019 © Inventor (s): ir. Hubertus Leonardus Mathias Marie © Patent issued: Janssen in Bunde. May 9, 2019 ir. Bartholomeus Catharina Thomas van Bree in Meijel. © Authorized representative: No.

© Cryogenic Bearing Stage © The invention concerns the introduction of a module which comprises an active displacement component based on piezo material and a ceramic guiding order to create driving force and proper guiding. The piezo electric actuator is able to initiate small displacements or an inner body which is connected, by friction, to the moving slider or the stage. By applying short displacement pulses the moving slider can be translated in both directions.

NL B1 1042458

This patent has been granted regardless of the attached result of the research into the state of the art and written opinion. The patent corresponds to the documents originally submitted.

Cryogenic Bearing Stage

The invention concerns a linear traveling stage specially designed for use in a cryogenic environment. For several physics experiments in cryogenic environment samples need to be positioned with high resolution down to the nanometer. Electromagnetic drives are not suitable for these low temperature environments since their material properties and guiding concepts are not compatible with cryogenic temperatures. Also their generated magnetic fields are not desirable.

The invention concerns the introduction of a module which comprises an active displacement component based on piezo material and a ceramic guiding in order to create driving electric actuator or an inner body moving slider or displacement pul in both directions.

force and proper guiding. The piezo is able to initiate small displacements which is connected, by friction, to the stage. The moving slider can be translated by applying short

The exact nature of objectives becomes:

this invention, as well as clear in the accompanying drawings

Fig. 1 Is a top view of the invention.

Figure 1 shows a view of the system, where the base frame 1 holds the piezo 2 which is preloaded with the intermediate body 3. The linear guiding 4 connects the base frame 1 with the moving table 5 in such a way that only one translation movement is possible. The intermediate body 3 incorporates elastic elements which realize a friction force in drive direction between the intermediate body 3 and the moving part of the linear guiding 4 which is connected to the moving table 5. The intermediate body 3 also incorporates a spring in order to preload the piezo 2 in drive direction. By applying the correct electrical signal to the piezo 1, slippage between the intermediate body 3 and the moving part of the linear guiding 4 will occur which results in a net displacement between the intermediate body 3 and the moving table 5, therefore also in a net displacement between base frame 1 and the moving table 5.

Claims (5)

CONCLUSIONS The invention relates to a device characterized in that: A piezo-actuator is used to realize a displacement between two bodies in one direction in a cryogenic or v a c u m m m m e such a way that all other directions are recorded by means of a rolling body; the part of the r e c h e c t i n c e connected to the moving table is made of ceramic material; the p i e z o - a c t u a t o r is connected to a t u s s e η 1 i c h a m m capable of transferring the displacement of the p i e z o - a t o r o directly to the ceramic straight line connected to the moving table; the piezo-actuator is electrically controlled so that the intermediate body experiences such a low acceleration that the movement between the intermediate body and the ceramic rectifier connected to the moving table will follow the p i e z o - a c t u a t o r; the piezo actuator is electrically controlled in such a way that the intermediate η 1 body experiences such high accelerations that the frictional force between the intermediate body and the ceramic recess is exceeded, as a result of which the moving table is unable to move the piezo actuator due to its mass inertia and therefore remains practically in place; by applying an alternating electrical signal, the friction between the t u s s e η 1 i c h a a m and the ceramic r e c h t g e 1 e i d i n n g can alternately be exceeded, whereby a cumulative displacement in the desired direction occurs between the base and the moving table; the t u s s e η 1 i c h a m m is designed in such a way that the at least two elastic elements, which exert a constant force perpendicular to the direction of movement of the ceramic r e c h t a n e d but at the same time have a high rigidity, the p i e z o - a c t u a t o r is maintained at compressive pressure by means of an elastic element integrated in the t u s s e η 1 i c h a a m; A device according to the preceding claim, characterized in that the r e c h e n e s is not made of ceramic but of a different material. A device according to any one of the preceding claims, characterized in that the mechanism is realized by a mechanism based on elastic elements. A device according to any one of the preceding claims, characterized in that the piezo actuator is kept under pressure tension in another way. A device as claimed in any one of the preceding claims, characterized in that the p i e z o - a c t u a l o by, for example, an adhesive or other connection, is inextricably connected to the t u s s e η 1 i c h a am. I