NL1036266A1 - Pre-filter for a servo control loop, and applications thereof. - Google Patents

Pre-filter for a servo control loop, and applications thereof. Download PDF

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Publication number
NL1036266A1
NL1036266A1 NL1036266A NL1036266A NL1036266A1 NL 1036266 A1 NL1036266 A1 NL 1036266A1 NL 1036266 A NL1036266 A NL 1036266A NL 1036266 A NL1036266 A NL 1036266A NL 1036266 A1 NL1036266 A1 NL 1036266A1
Authority
NL
Netherlands
Prior art keywords
applications
filter
control loop
servo control
servo
Prior art date
Application number
NL1036266A
Other languages
English (en)
Inventor
Roberto B Wiener
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of NL1036266A1 publication Critical patent/NL1036266A1/nl

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Feedback Control In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
NL1036266A 2007-12-17 2008-12-02 Pre-filter for a servo control loop, and applications thereof. NL1036266A1 (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1435407P 2007-12-17 2007-12-17

Publications (1)

Publication Number Publication Date
NL1036266A1 true NL1036266A1 (nl) 2009-06-18

Family

ID=40753067

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1036266A NL1036266A1 (nl) 2007-12-17 2008-12-02 Pre-filter for a servo control loop, and applications thereof.

Country Status (3)

Country Link
US (1) US8392003B2 (nl)
JP (1) JP5118008B2 (nl)
NL (1) NL1036266A1 (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8853988B2 (en) * 2009-03-18 2014-10-07 Nikon Corporation Control systems and methods for compensating for effects of a stage motor
US8812166B2 (en) * 2009-10-20 2014-08-19 Hewlett-Packard Development Company, L.P. Supplying a resource to an entity from a resource actuator
US8587320B2 (en) * 2010-11-09 2013-11-19 Honeywell International Inc. System and method for testing a secondary servo control circuit in a redundant control configuration
US20120274646A1 (en) * 2011-04-29 2012-11-01 Randy Johnson Laser particle projection system
CN102768468B (zh) * 2011-05-03 2015-07-22 上海微电子装备有限公司 用于光刻设备的粗动台的质心测校的方法
NL2016797A (en) * 2015-06-19 2016-12-22 Asml Netherlands Bv Control system, positioning system, lithographic apparatus and device manufacturing method.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61196302A (ja) 1985-02-27 1986-08-30 Toshiba Corp 調節装置
JPH07152406A (ja) 1993-11-29 1995-06-16 Toshiba Corp ２自由度コントローラ装置
JPH10125594A (ja) 1996-10-22 1998-05-15 Nikon Corp ステージ制御装置及び露光装置
JP4228389B2 (ja) 2003-06-30 2009-02-25 株式会社安川電機 位置決め制御装置
US7181296B2 (en) * 2003-08-06 2007-02-20 Asml Netherlands B.V. Method of adaptive interactive learning control and a lithographic manufacturing process and apparatus employing such a method
US20060170382A1 (en) * 2005-01-28 2006-08-03 Nikon Corporation Linear motor force ripple identification and compensation with iterative learning control
US7352436B2 (en) * 2005-06-20 2008-04-01 Asml Netherlands, B.V. Lithographic apparatus, projection apparatus and device manufacturing method

Also Published As

Publication number Publication date
JP2009146426A (ja) 2009-07-02
US20090154311A1 (en) 2009-06-18
US8392003B2 (en) 2013-03-05
JP5118008B2 (ja) 2013-01-16

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