NL1007843A1 - Aangedreven spiegelreeks van het dunne filmtype in een optisch projectiestelsel en werkwijze voor het vervaardigen er van. - Google Patents

Aangedreven spiegelreeks van het dunne filmtype in een optisch projectiestelsel en werkwijze voor het vervaardigen er van.

Info

Publication number
NL1007843A1
NL1007843A1 NL1007843A NL1007843A NL1007843A1 NL 1007843 A1 NL1007843 A1 NL 1007843A1 NL 1007843 A NL1007843 A NL 1007843A NL 1007843 A NL1007843 A NL 1007843A NL 1007843 A1 NL1007843 A1 NL 1007843A1
Authority
NL
Netherlands
Prior art keywords
making
thin film
optical system
projection optical
mirror array
Prior art date
Application number
NL1007843A
Other languages
English (en)
Other versions
NL1007843C2 (nl
Inventor
Dong-Hoon Min
Sang-Wook Park
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019970011058A external-priority patent/KR100251105B1/ko
Priority claimed from KR1019970029533A external-priority patent/KR100252016B1/ko
Priority claimed from KR1019970042090A external-priority patent/KR100255750B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of NL1007843A1 publication Critical patent/NL1007843A1/nl
Application granted granted Critical
Publication of NL1007843C2 publication Critical patent/NL1007843C2/nl

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
NL1007843A 1997-03-28 1997-12-18 Aangedreven spiegelreeks van het dunne filmtype in een optisch projectiestelsel en werkwijze voor het vervaardigen er van. NL1007843C2 (nl)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR1019970011058A KR100251105B1 (ko) 1997-03-28 1997-03-28 박막형 광로 조절장치의 제조 방법
KR19970011058 1997-03-28
KR1019970029533A KR100252016B1 (ko) 1997-06-30 1997-06-30 박막형 광로 조절 장치와 그 제조 방법
KR19970029533 1997-06-30
KR1019970042090A KR100255750B1 (ko) 1997-08-28 1997-08-28 박막형 광로 조절 장치와 그 제조 방법
KR19970042090 1997-08-28

Publications (2)

Publication Number Publication Date
NL1007843A1 true NL1007843A1 (nl) 1998-09-29
NL1007843C2 NL1007843C2 (nl) 2002-07-16

Family

ID=27349499

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1007843A NL1007843C2 (nl) 1997-03-28 1997-12-18 Aangedreven spiegelreeks van het dunne filmtype in een optisch projectiestelsel en werkwijze voor het vervaardigen er van.

Country Status (7)

Country Link
US (1) US5917645A (nl)
JP (1) JPH10282437A (nl)
CN (1) CN1195115A (nl)
DE (1) DE19757559A1 (nl)
FR (1) FR2761487A1 (nl)
GB (1) GB2323678B (nl)
NL (1) NL1007843C2 (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6288821B1 (en) * 1999-10-01 2001-09-11 Lucent Technologies, Inc. Hybrid electro-optic device with combined mirror arrays
KR100349941B1 (ko) * 2000-09-29 2002-08-24 삼성전자 주식회사 광 스위칭을 위한 마이크로 액추에이터 및 그 제조방법
US8351107B2 (en) * 2003-11-01 2013-01-08 Olympus Corporation Spatial light modulator having capacitor
US8228594B2 (en) * 2003-11-01 2012-07-24 Silicon Quest Kabushiki-Kaisha Spatial light modulator with metal layers
US10131534B2 (en) * 2011-10-20 2018-11-20 Snaptrack, Inc. Stacked vias for vertical integration

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150871A (en) * 1980-04-24 1981-11-21 Toshiba Corp Semiconductor device
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5409851A (en) * 1992-05-04 1995-04-25 Goldstar Co., Ltd. Method of making a thin film transistor
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array
US5689380A (en) * 1994-02-23 1997-11-18 Aura Systems, Inc. Thin film actuated mirror array for providing double tilt angle
WO1995023552A1 (en) * 1994-03-02 1995-09-08 Mark Krakovitz Hybrid probes for characterizing diseases
TW305943B (nl) * 1995-04-21 1997-05-21 Daewoo Electronics Co Ltd
JPH1062614A (ja) * 1996-05-23 1998-03-06 Daewoo Electron Co Ltd Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイの製造方法
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
US5877889A (en) * 1996-08-30 1999-03-02 Daewoo Electronics Co., Ltd. Method for the manufacture of a thin film actuated mirror array

Also Published As

Publication number Publication date
US5917645A (en) 1999-06-29
GB2323678B (en) 1999-05-19
CN1195115A (zh) 1998-10-07
FR2761487A1 (fr) 1998-10-02
NL1007843C2 (nl) 2002-07-16
GB9727234D0 (en) 1998-02-25
DE19757559A1 (de) 1998-10-01
GB2323678A (en) 1998-09-30
JPH10282437A (ja) 1998-10-23

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Effective date: 20020515

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Effective date: 20030701