MY179031A - Method and apparatus to compensate for deflection artifacts in an atomic force microscope - Google Patents

Method and apparatus to compensate for deflection artifacts in an atomic force microscope

Info

Publication number
MY179031A
MY179031A MYPI2016702997A MYPI2016702997A MY179031A MY 179031 A MY179031 A MY 179031A MY PI2016702997 A MYPI2016702997 A MY PI2016702997A MY PI2016702997 A MYPI2016702997 A MY PI2016702997A MY 179031 A MY179031 A MY 179031A
Authority
MY
Malaysia
Prior art keywords
deflection
artifact
probe
atomic force
force microscope
Prior art date
Application number
MYPI2016702997A
Other languages
English (en)
Inventor
Chanmin Su
Shuiqing Hu
Original Assignee
Bruker Nano Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker Nano Inc filed Critical Bruker Nano Inc
Publication of MY179031A publication Critical patent/MY179031A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
MYPI2016702997A 2014-02-28 2015-03-02 Method and apparatus to compensate for deflection artifacts in an atomic force microscope MY179031A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/193,138 US9739799B2 (en) 2014-02-28 2014-02-28 Method and apparatus to compensate for deflection artifacts in an atomic force microscope

Publications (1)

Publication Number Publication Date
MY179031A true MY179031A (en) 2020-10-26

Family

ID=54006665

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2016702997A MY179031A (en) 2014-02-28 2015-03-02 Method and apparatus to compensate for deflection artifacts in an atomic force microscope

Country Status (5)

Country Link
US (1) US9739799B2 (ko)
EP (1) EP3111239A4 (ko)
KR (1) KR102384301B1 (ko)
MY (1) MY179031A (ko)
WO (1) WO2015131188A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014212311A1 (de) * 2014-06-26 2015-12-31 Carl Zeiss Smt Gmbh Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis
US10679353B2 (en) 2017-11-07 2020-06-09 Seagate Technology Llc Automated detection of artifacts in scan image
US10281268B1 (en) 2018-04-20 2019-05-07 Seagate Technology Llc Automated and accurate high-throughput slider-level flatness inspection
US11143672B2 (en) * 2019-06-25 2021-10-12 The Board Of Trustees Of The University Of Illinois Method and apparatus for correcting responsivity variation in photothermal imaging
US11002759B2 (en) * 2019-09-10 2021-05-11 The United States Of America As Represented By The Secretary Of The Army High-sensitivity, low thermal deflection, stress-matched atomic force microscopy and scanning thermal microscopy probes
CN110763873B (zh) * 2019-11-18 2021-04-13 中国科学院沈阳自动化研究所 基于原子力显微镜技术的峰值力轻敲与扭转共振复合方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935634A (en) 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
US5266801A (en) 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
JPH05281276A (ja) * 1991-07-31 1993-10-29 Toshiba Corp 液中静電力検出装置
US5412980A (en) 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
JP2000241334A (ja) 1999-02-25 2000-09-08 Seiko Instruments Inc 走査型プローブ顕微鏡の制御装置及び方法
US6075613A (en) * 1999-02-26 2000-06-13 General Scanning, Inc. Optical scanner calibration device
JP2002041334A (ja) * 2000-07-27 2002-02-08 Yokogawa Electric Corp 測定装置
US6677697B2 (en) * 2001-12-06 2004-01-13 Veeco Instruments Inc. Force scanning probe microscope
US7055378B2 (en) * 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
DE102004063980A1 (de) * 2004-10-07 2006-08-10 Nambition Gmbh Vorrichtung und Verfahren zur Rastersondenmikroskopie
WO2006073068A1 (ja) 2005-01-06 2006-07-13 National University Corporation Hokkaido University 表面位置計測方法および表面位置計測装置
WO2008083694A1 (de) * 2006-12-28 2008-07-17 Nambition Gmbh Vorrichtung und verfahren zur untersuchung biologischer systeme sowie festkörpersysteme
US8166567B2 (en) 2007-03-16 2012-04-24 Bruker Nano, Inc. Fast-scanning SPM scanner and method of operating same
JP4930941B2 (ja) 2007-03-28 2012-05-16 国立大学法人群馬大学 カンチレバー型センサ
JP2010038856A (ja) * 2008-08-08 2010-02-18 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
US8484759B2 (en) * 2009-08-17 2013-07-09 Ut-Battelle, Llc Spatially resolved quantitative mapping of thermomechanical properties and phase transition temperatures using scanning probe microscopy
US8606426B2 (en) * 2009-10-23 2013-12-10 Academia Sinica Alignment and anti-drift mechanism
WO2012078415A2 (en) * 2010-11-29 2012-06-14 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US8533861B2 (en) * 2011-08-15 2013-09-10 The Board Of Trustees Of The University Of Illinois Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy

Also Published As

Publication number Publication date
EP3111239A4 (en) 2017-10-04
KR20160129073A (ko) 2016-11-08
US9739799B2 (en) 2017-08-22
WO2015131188A1 (en) 2015-09-03
KR102384301B1 (ko) 2022-04-07
EP3111239A1 (en) 2017-01-04
US20150247881A1 (en) 2015-09-03

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