MY149756A - Method and apparatus for controllable sodium delivery for thin film photovoltaic materials - Google Patents

Method and apparatus for controllable sodium delivery for thin film photovoltaic materials

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Publication number
MY149756A
MY149756A MYPI2011005424A MYPI2011005424A MY149756A MY 149756 A MY149756 A MY 149756A MY PI2011005424 A MYPI2011005424 A MY PI2011005424A MY PI2011005424 A MYPI2011005424 A MY PI2011005424A MY 149756 A MY149756 A MY 149756A
Authority
MY
Malaysia
Prior art keywords
type semiconductor
electrode
thin film
located over
layer
Prior art date
Application number
MYPI2011005424A
Inventor
Neil M Mackie
Original Assignee
Miasole
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Miasole filed Critical Miasole
Publication of MY149756A publication Critical patent/MY149756A/en

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    • HELECTRICITY
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02367Substrates
    • H01L21/0237Materials
    • H01L21/02425Conductive materials, e.g. metallic silicides
    • HELECTRICITY
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02491Conductive materials
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02568Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/0257Doping during depositing
    • H01L21/02573Conductivity type
    • H01L21/02579P-type
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02631Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03923Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
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    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03926Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
    • H01L31/03928Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

A SOLAR CELL INCLUDES A SUBSTRATE (100), A FIRST ELECTRODE (200) LOCATED OVER THE SUBSTRATE (100), WHERE THE FIRST ELECTRODE (200) COMPRISES A FIRST TRANSITION METAL LAYER (202), AT LEAST ONE P-TYPE SEMICONDUCTOR ABSORBER LAYER (301) LOCATED OVER THE FIRST ELECTRODE, AN N-TYPE SEMICONDUCTOR LAYER (302) LOCATED OVER THE P-TYPE SEMICONDUCTOR ABSORBER LAYER, AND A SECOND ELECTRODE (400) LOCATED OVER THE N-TYPE SEMICONDUCTOR LAYER (302). THE FIRST TRANSITION METAL LAYER (202) CONTAINS (i) AN ALKALI ELEMENT OR AN ALKALI COMPOUND AND (ii) A LATTICE DISTORTION ELEMENT OR A LATTICE DISTORTION COMPOUND. THE P-TYPE SEMICONDUCTOR ABSORBER LAYER (301) INCLUDES A COPPER INDIUM SELENIDE (CIS) BASED ALLOY MATERIAL.
MYPI2011005424A 2009-04-13 2010-04-09 Method and apparatus for controllable sodium delivery for thin film photovoltaic materials MY149756A (en)

Applications Claiming Priority (1)

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US12/385,572 US8134069B2 (en) 2009-04-13 2009-04-13 Method and apparatus for controllable sodium delivery for thin film photovoltaic materials

Publications (1)

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MY149756A true MY149756A (en) 2013-10-14

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MYPI2011005424A MY149756A (en) 2009-04-13 2010-04-09 Method and apparatus for controllable sodium delivery for thin film photovoltaic materials

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US (2) US8134069B2 (en)
EP (1) EP2419940B1 (en)
JP (1) JP5785931B2 (en)
KR (1) KR101670708B1 (en)
MY (1) MY149756A (en)
SG (1) SG175978A1 (en)
WO (1) WO2010120631A2 (en)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8110738B2 (en) * 2009-02-20 2012-02-07 Miasole Protective layer for large-scale production of thin-film solar cells
KR101245371B1 (en) * 2009-06-19 2013-03-19 한국전자통신연구원 Solar cell and method of fabricating the same
JP2011159796A (en) * 2010-02-01 2011-08-18 Fujifilm Corp Substrate with insulating layer, and thin-film solar cell
US9178105B2 (en) * 2010-09-21 2015-11-03 Amberwave Inc. Flexible monocrystalline thin silicon cell
US7935558B1 (en) 2010-10-19 2011-05-03 Miasole Sodium salt containing CIG targets, methods of making and methods of use thereof
US9169548B1 (en) 2010-10-19 2015-10-27 Apollo Precision Fujian Limited Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof
US8048707B1 (en) 2010-10-19 2011-11-01 Miasole Sulfur salt containing CIG targets, methods of making and methods of use thereof
FR2969389A1 (en) * 2010-12-21 2012-06-22 Saint Gobain CONDUCTIVE SUBSTRATE BASED ON MOLYBDENUM
DE102011008269B4 (en) * 2011-01-11 2015-01-08 Interpane Entwicklungs-Und Beratungsgesellschaft Mbh Thin-film solar cells with diffusion-inhibiting coating
KR101219948B1 (en) * 2011-01-27 2013-01-21 엘지이노텍 주식회사 Solar cell apparatus and method of fabricating the same
TW201246560A (en) * 2011-03-16 2012-11-16 Stion Corp A method for forming a bifacial thin film photovoltaic cell and a thin film solar device
JP2012195461A (en) * 2011-03-16 2012-10-11 Nitto Denko Corp Method and device for manufacturing solar battery cell and method of manufacturing solar battery module
TWI538235B (en) 2011-04-19 2016-06-11 弗里松股份有限公司 Thin-film photovoltaic device and fabrication method
WO2012169845A2 (en) * 2011-06-10 2012-12-13 주식회사 포스코 Solar cell substrate, method for manufacturing same, and solar cell using same
KR101242942B1 (en) * 2011-06-13 2013-03-12 주식회사 포스코 Solar cell substrate and method for manutacturing the same
KR101228743B1 (en) * 2011-06-13 2013-01-31 주식회사 포스코 Solar cell substrate and method for manutacturing the same
KR101228685B1 (en) * 2011-06-13 2013-01-31 주식회사 포스코 Substrate for ci(g)s solar cell and ci(g)s solar cell using the same
KR101228666B1 (en) * 2011-06-13 2013-01-31 주식회사 포스코 Substrate with multi-layer bottom electrode for ci(g)s solar cell and ci(g)s solar cell using the same
EP2720279A4 (en) * 2011-06-13 2014-12-24 Posco Solar cell substrate and solar cell using same
FR2977078B1 (en) 2011-06-27 2013-06-28 Saint Gobain CONDUCTIVE SUBSTRATE FOR PHOTOVOLTAIC CELL
US9780242B2 (en) 2011-08-10 2017-10-03 Ascent Solar Technologies, Inc. Multilayer thin-film back contact system for flexible photovoltaic devices on polymer substrates
US9209322B2 (en) * 2011-08-10 2015-12-08 Ascent Solar Technologies, Inc. Multilayer thin-film back contact system for flexible photovoltaic devices on polymer substrates
WO2013023161A1 (en) 2011-08-10 2013-02-14 Ascent Solar Technologies, Inc. Multilayer thin-film back contact system for flexible photovoltaic devices on polymer substrates
FR2982422B1 (en) * 2011-11-09 2013-11-15 Saint Gobain CONDUCTIVE SUBSTRATE FOR PHOTOVOLTAIC CELL
FR2983642B1 (en) * 2011-12-05 2014-01-03 Nexcis IMPROVED INTERFACE BETWEEN A LAYER I-III-VI2 AND A REAR CONTACT LAYER IN A PHOTOVOLTAIC CELL.
US20130157407A1 (en) * 2011-12-20 2013-06-20 Intermolecular, Inc. APPARATUS FOR INLINE PROCESSING OF Cu(In,Ga)(Se,S)2 EMPLOYING A CHALCOGEN SOLUTION COATING MECHANISM
US10043921B1 (en) 2011-12-21 2018-08-07 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereof
US20130160831A1 (en) * 2011-12-22 2013-06-27 Miasole Reactive Sputtering of ZnS(O,H) and InS(O,H) for Use as a Buffer Layer
KR101322652B1 (en) * 2012-04-10 2013-10-29 한국과학기술원 Structure and Fabrication of ZnS/CIGS Thin Film Solar Cells
CN102867860B (en) * 2012-09-12 2015-08-12 厦门神科太阳能有限公司 A kind of transition zone for CIGS base film photovoltaic cell and preparation method thereof
EP2936551A1 (en) 2012-12-21 2015-10-28 Flisom AG Fabricating thin-film optoelectronic devices with added potassium
AT13564U1 (en) * 2013-01-31 2014-03-15 Plansee Se CU-GA-IN-NA Target
KR20140141791A (en) * 2013-05-30 2014-12-11 삼성에스디아이 주식회사 Solar cell and manufacturing method thereof
KR20150057807A (en) * 2013-11-20 2015-05-28 삼성에스디아이 주식회사 Solar cell and method for manufacturing the same
TWI677105B (en) 2014-05-23 2019-11-11 瑞士商弗里松股份有限公司 Method of fabricating thin-film optoelectronic device and thin-film optoelectronic device obtainable by said method
TWI661991B (en) 2014-09-18 2019-06-11 瑞士商弗里松股份有限公司 Self-assembly patterning for fabricating thin-film devices
EP3414780B1 (en) 2016-02-11 2020-12-02 Flisom AG Fabricating thin-film optoelectronic devices with added rubidium and/or cesium
HUE053775T2 (en) 2016-02-11 2021-07-28 Flisom Ag Self-assembly patterning for fabricating thin-film devices
CN107316916A (en) 2016-04-27 2017-11-03 北京铂阳顶荣光伏科技有限公司 The method for reducing na concn in the including transparent conducting oxide layer of semiconductor devices
US10128391B2 (en) 2016-06-22 2018-11-13 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Photovoltaic module with flexible wire interconnection
US10156009B2 (en) 2016-12-05 2018-12-18 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing same
CN107452818A (en) * 2017-08-16 2017-12-08 蚌埠兴科玻璃有限公司 A kind of copper-indium-galliun-selenium film solar cell back electrode and preparation method thereof
US11271126B2 (en) 2019-03-21 2022-03-08 Beijing Apollo Ding Rong Solar Technology Co., Ltd. Photovoltaic panels with folded panel edges and methods of forming the same
KR102497397B1 (en) * 2022-07-25 2023-02-07 목원대학교 산학협력단 Method for manufacturing self-assembled 3D molybdenum oxide nanostructures

Family Cites Families (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2890419A (en) * 1955-03-30 1959-06-09 Sylvania Electric Prod Switch tube device for waveguides
DE2757301A1 (en) 1977-12-22 1979-07-05 Leybold Heraeus Gmbh & Co Kg Multiple element solar cell - has semiconductor elements enclosed between conductive and insulating layers with ends folded over and interlocked
US4298444A (en) 1978-10-11 1981-11-03 Heat Mirror Associates Method for multilayer thin film deposition
US4318938A (en) 1979-05-29 1982-03-09 The University Of Delaware Method for the continuous manufacture of thin film solar cells
US4356073A (en) 1981-02-12 1982-10-26 Shatterproof Glass Corporation Magnetron cathode sputtering apparatus
US4465575A (en) 1981-09-21 1984-08-14 Atlantic Richfield Company Method for forming photovoltaic cells employing multinary semiconductor films
US4415427A (en) 1982-09-30 1983-11-15 Gte Products Corporation Thin film deposition by sputtering
US4818357A (en) 1987-05-06 1989-04-04 Brown University Research Foundation Method and apparatus for sputter deposition of a semiconductor homojunction and semiconductor homojunction products created by same
US5141564A (en) 1988-05-03 1992-08-25 The Boeing Company Mixed ternary heterojunction solar cell
US5744252A (en) * 1989-09-21 1998-04-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Flexible ceramic-metal insulation composite and method of making
JPH0539566A (en) 1991-02-19 1993-02-19 Mitsubishi Materials Corp Sputtering target and its production
US5273911A (en) 1991-03-07 1993-12-28 Mitsubishi Denki Kabushiki Kaisha Method of producing a thin-film solar cell
JPH0597478A (en) 1991-10-04 1993-04-20 Nippon Sheet Glass Co Ltd Water repellent glass article and its production
EP0662247B1 (en) 1992-09-22 1999-03-10 Siemens Aktiengesellschaft Process for rapidly generating a chalkopyrite semiconductor on a substrate
US5306646A (en) 1992-12-23 1994-04-26 Martin Marietta Energy Systems, Inc. Method for producing textured substrates for thin-film photovoltaic cells
BE1007535A3 (en) 1993-09-24 1995-07-25 Innovative Sputtering Tech Layered metal structure.
JP3571785B2 (en) 1993-12-28 2004-09-29 キヤノン株式会社 Method and apparatus for forming deposited film
US5480695A (en) * 1994-08-10 1996-01-02 Tenhover; Michael A. Ceramic substrates and magnetic data storage components prepared therefrom
JP3651932B2 (en) 1994-08-24 2005-05-25 キヤノン株式会社 Back surface reflective layer for photovoltaic device, method for forming the same, photovoltaic device and method for manufacturing the same
US5522535A (en) 1994-11-15 1996-06-04 Tosoh Smd, Inc. Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies
DE4442824C1 (en) * 1994-12-01 1996-01-25 Siemens Ag Solar cell having higher degree of activity
ES2202439T3 (en) 1995-04-25 2004-04-01 Von Ardenne Anlagentechnik Gmbh SPRAY SYSTEM THAT USES A ROTARY CYLINDER MAGNETRON ELECTRICALLY POWERED USING ALTERNATE CURRENT.
US5824566A (en) 1995-09-26 1998-10-20 Canon Kabushiki Kaisha Method of producing a photovoltaic device
US5986204A (en) 1996-03-21 1999-11-16 Canon Kabushiki Kaisha Photovoltaic cell
US6107564A (en) 1997-11-18 2000-08-22 Deposition Sciences, Inc. Solar cell cover and coating
JPH11274534A (en) 1998-03-25 1999-10-08 Yazaki Corp I-iii-vi compound semiconductor and thin film solar cell using the same
JPH11298016A (en) 1998-04-10 1999-10-29 Yazaki Corp Solar battery
JP2000091603A (en) 1998-09-07 2000-03-31 Honda Motor Co Ltd Solar battery
US6365010B1 (en) 1998-11-06 2002-04-02 Scivac Sputtering apparatus and process for high rate coatings
AU731869B2 (en) * 1998-11-12 2001-04-05 Kaneka Corporation Solar cell module
DE19921515A1 (en) 1999-05-10 2000-11-30 Ist Inst Fuer Solartechnologie Thin-film solar cell based on the Ia / IIIb / VIa compound semiconductors and process for their production
US7194197B1 (en) 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US6372538B1 (en) 2000-03-16 2002-04-16 University Of Delaware Fabrication of thin-film, flexible photovoltaic module
US6310281B1 (en) 2000-03-16 2001-10-30 Global Solar Energy, Inc. Thin-film, flexible photovoltaic module
KR100419756B1 (en) 2000-06-23 2004-02-21 아넬바 가부시기가이샤 Thin-film deposition apparatus
US6525264B2 (en) 2000-07-21 2003-02-25 Sharp Kabushiki Kaisha Thin-film solar cell module
US6787692B2 (en) 2000-10-31 2004-09-07 National Institute Of Advanced Industrial Science & Technology Solar cell substrate, thin-film solar cell, and multi-junction thin-film solar cell
US6750394B2 (en) 2001-01-12 2004-06-15 Sharp Kabushiki Kaisha Thin-film solar cell and its manufacturing method
FR2820241B1 (en) 2001-01-31 2003-09-19 Saint Gobain TRANSPARENT SUBSTRATE PROVIDED WITH AN ELECTRODE
AU2002363298A1 (en) 2001-07-20 2003-05-12 Itn Energy Systems, Inc. Apparatus and method of production of thin film photovoltaic modules
US6593213B2 (en) 2001-09-20 2003-07-15 Heliovolt Corporation Synthesis of layers, coatings or films using electrostatic fields
US6736986B2 (en) 2001-09-20 2004-05-18 Heliovolt Corporation Chemical synthesis of layers, coatings or films using surfactants
US6500733B1 (en) 2001-09-20 2002-12-31 Heliovolt Corporation Synthesis of layers, coatings or films using precursor layer exerted pressure containment
US6881647B2 (en) 2001-09-20 2005-04-19 Heliovolt Corporation Synthesis of layers, coatings or films using templates
US6559372B2 (en) 2001-09-20 2003-05-06 Heliovolt Corporation Photovoltaic devices and compositions for use therein
US6787012B2 (en) 2001-09-20 2004-09-07 Helio Volt Corp Apparatus for the synthesis of layers, coatings or films
US6822158B2 (en) 2002-03-11 2004-11-23 Sharp Kabushiki Kaisha Thin-film solar cell and manufacture method therefor
US6690041B2 (en) 2002-05-14 2004-02-10 Global Solar Energy, Inc. Monolithically integrated diodes in thin-film photovoltaic devices
JP4012957B2 (en) 2002-06-07 2007-11-28 本田技研工業株式会社 Method for producing compound thin film solar cell
US6852920B2 (en) 2002-06-22 2005-02-08 Nanosolar, Inc. Nano-architected/assembled solar electricity cell
US7291782B2 (en) 2002-06-22 2007-11-06 Nanosolar, Inc. Optoelectronic device and fabrication method
US7253017B1 (en) 2002-06-22 2007-08-07 Nanosolar, Inc. Molding technique for fabrication of optoelectronic devices
US7247346B1 (en) 2002-08-28 2007-07-24 Nanosolar, Inc. Combinatorial fabrication and high-throughput screening of optoelectronic devices
US6878612B2 (en) 2002-09-16 2005-04-12 Oki Electric Industry Co., Ltd. Self-aligned contact process for semiconductor device
US6974976B2 (en) 2002-09-30 2005-12-13 Miasole Thin-film solar cells
US6936761B2 (en) 2003-03-29 2005-08-30 Nanosolar, Inc. Transparent electrode, optoelectronic apparatus and devices
US7122392B2 (en) 2003-06-30 2006-10-17 Intel Corporation Methods of forming a high germanium concentration silicon germanium alloy by epitaxial lateral overgrowth and structures formed thereby
US6987071B1 (en) 2003-11-21 2006-01-17 Nanosolar, Inc. Solvent vapor infiltration of organic materials into nanostructures
US7115304B2 (en) 2004-02-19 2006-10-03 Nanosolar, Inc. High throughput surface treatment on coiled flexible substrates
US7045205B1 (en) 2004-02-19 2006-05-16 Nanosolar, Inc. Device based on coated nanoporous structure
US7306823B2 (en) 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
SE0400631D0 (en) * 2004-03-11 2004-03-11 Forskarpatent I Uppsala Ab Thin film solar cell and manufacturing method
WO2005089330A2 (en) 2004-03-15 2005-09-29 Solopower, Inc. Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricaton
US7122398B1 (en) 2004-03-25 2006-10-17 Nanosolar, Inc. Manufacturing of optoelectronic devices
US7227066B1 (en) 2004-04-21 2007-06-05 Nanosolar, Inc. Polycrystalline optoelectronic devices based on templating technique
WO2005109525A1 (en) 2004-05-11 2005-11-17 Honda Motor Co., Ltd. Method for manufacturing chalcopyrite thin-film solar cell
JP2006049768A (en) 2004-08-09 2006-02-16 Showa Shell Sekiyu Kk Cis compound semiconductor thin film solar battery and manufacturing method for light absorbing layer of solar battery
US8088232B2 (en) 2004-08-31 2012-01-03 H.C. Starck Inc. Molybdenum tubular sputtering targets with uniform grain size and texture
US7262392B1 (en) 2004-09-18 2007-08-28 Nanosolar, Inc. Uniform thermal processing by internal impedance heating of elongated substrates
CN101410547A (en) * 2004-11-10 2009-04-15 德斯塔尔科技公司 Pallet based system for forming thin-film solar cells
CA2586961A1 (en) 2004-11-10 2006-05-18 Daystar Technologies, Inc. Thermal process for creation of an in-situ junction layer in cigs
WO2006053127A2 (en) * 2004-11-10 2006-05-18 Daystar Technologies, Inc. Process and photovoltaic device using an akali-containing layer
JP2006165386A (en) 2004-12-09 2006-06-22 Showa Shell Sekiyu Kk Cis system thin film solar cell and method for manufacturing the same
US7196262B2 (en) 2005-06-20 2007-03-27 Solyndra, Inc. Bifacial elongated solar cell devices
US8123919B2 (en) 2005-09-20 2012-02-28 Guardian Industries Corp. Sputtering target with bonding layer of varying thickness under target material
US20070074969A1 (en) 2005-10-03 2007-04-05 Simpson Wayne R Very long cylindrical sputtering target and method for manufacturing
WO2007071663A1 (en) 2005-12-21 2007-06-28 Shell Erneuerbare Energien Gmbh Process of making a thin-film photovoltaic device and thin-film photovoltaic device
US7259322B2 (en) 2006-01-09 2007-08-21 Solyndra, Inc. Interconnects for solar cell devices
US7235736B1 (en) 2006-03-18 2007-06-26 Solyndra, Inc. Monolithic integration of cylindrical solar cells
CN101454899B (en) 2006-03-28 2012-05-02 索洛能源公司 Photovoltaic modules and technique for manufacturing photovoltaic modules
JP4933610B2 (en) * 2006-04-18 2012-05-16 ダウ・コーニング・コーポレイション Photovoltaic device based on copper indium diselenide and method for making the photovoltaic device
US7439110B2 (en) * 2006-05-19 2008-10-21 International Business Machines Corporation Strained HOT (hybrid orientation technology) MOSFETs
US20070283997A1 (en) 2006-06-13 2007-12-13 Miasole Photovoltaic module with integrated current collection and interconnection
US20070283996A1 (en) 2006-06-13 2007-12-13 Miasole Photovoltaic module with insulating interconnect carrier
US20080053519A1 (en) 2006-08-30 2008-03-06 Miasole Laminated photovoltaic cell
US20080142071A1 (en) 2006-12-15 2008-06-19 Miasole Protovoltaic module utilizing a flex circuit for reconfiguration
US7875945B2 (en) * 2007-06-12 2011-01-25 Guardian Industries Corp. Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same
US20080308147A1 (en) * 2007-06-12 2008-12-18 Yiwei Lu Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same
US8071872B2 (en) * 2007-06-15 2011-12-06 Translucent Inc. Thin film semi-conductor-on-glass solar cell devices
US8697980B2 (en) 2007-06-19 2014-04-15 Hanergy Holding Group Ltd. Photovoltaic module utilizing an integrated flex circuit and incorporating a bypass diode
US20090014058A1 (en) 2007-07-13 2009-01-15 Miasole Rooftop photovoltaic systems
US20090014057A1 (en) 2007-07-13 2009-01-15 Miasole Photovoltaic modules with integrated devices
US20090014049A1 (en) 2007-07-13 2009-01-15 Miasole Photovoltaic module with integrated energy storage
FR2922046B1 (en) 2007-10-05 2011-06-24 Saint Gobain IMPROVEMENTS ON ELEMENTS CAPABLE OF COLLECTING LIGHT
FR2922364B1 (en) * 2007-10-12 2014-08-22 Saint Gobain PROCESS FOR PRODUCING A MOLYBDENE OXIDE ELECTRODE
AT10578U1 (en) * 2007-12-18 2009-06-15 Plansee Metall Gmbh DUNGOUS SOLAR CELL WITH MOLYBDAN-CONTAINING ELECTRODE LAYER
US20100116341A1 (en) 2008-11-12 2010-05-13 Solar Applied Materials Technology Corp. Copper-gallium allay sputtering target, method for fabricating the same and related applications

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