MY139091A - Substrate carrier - Google Patents
Substrate carrierInfo
- Publication number
- MY139091A MY139091A MYPI20044384A MY139091A MY 139091 A MY139091 A MY 139091A MY PI20044384 A MYPI20044384 A MY PI20044384A MY 139091 A MY139091 A MY 139091A
- Authority
- MY
- Malaysia
- Prior art keywords
- enclosure
- flange
- carrier
- machine
- substrate carrier
- Prior art date
Links
Abstract
A CARRIER FOR TRANSPORTING SILICON SEMICONDUCTOR WAFERS DURING SEMICONDUCTOR WAFER PROCESSING OPERATIONS INCLUDING AN ENCLOSURE, A DOOR AND A FLANGE STRUCTURED TO INTERFACE WITH A MACHINE SO THAT THE CARRIER CAN BE LIFTED BY THE MACHINE. A LIFT SADDLE CONNECTS THE FLANGE TO THE CONTAINER SO THAT THE LOAD ON THE FLANGE IS TRANSFERRED TO A PART OF THE ENCLOSURE OTHER THAN THE TOP OF THE ENCLOSURE TO PREVENT DISTORTION OF THE ENCLOSURE TO MAINTAINING SEAL INTEGRITY BETWEEN THE ENCLOSURE AND THE FLOOR.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US51404003P | 2003-10-24 | 2003-10-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY139091A true MY139091A (en) | 2009-08-28 |
Family
ID=37610150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20044384 MY139091A (en) | 2003-10-24 | 2004-10-23 | Substrate carrier |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN1898135A (en) |
MY (1) | MY139091A (en) |
TW (1) | TWI329604B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4800155B2 (en) * | 2006-09-04 | 2011-10-26 | 信越ポリマー株式会社 | Substrate storage container and check valve |
US10020213B1 (en) * | 2016-12-30 | 2018-07-10 | Sunpower Corporation | Semiconductor wafer carriers |
TWI750398B (en) * | 2018-07-18 | 2021-12-21 | 奇景光電股份有限公司 | Wafer cassette |
-
2004
- 2004-10-23 MY MYPI20044384 patent/MY139091A/en unknown
- 2004-10-25 CN CN 200480038895 patent/CN1898135A/en active Pending
- 2004-10-26 TW TW93132340A patent/TWI329604B/en active
Also Published As
Publication number | Publication date |
---|---|
CN1898135A (en) | 2007-01-17 |
TWI329604B (en) | 2010-09-01 |
TW200519006A (en) | 2005-06-16 |
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