MX363398B - Dispositivo fotoacustico y metodo para la medicion sin contacto de capas delgadas. - Google Patents
Dispositivo fotoacustico y metodo para la medicion sin contacto de capas delgadas.Info
- Publication number
- MX363398B MX363398B MX2016010701A MX2016010701A MX363398B MX 363398 B MX363398 B MX 363398B MX 2016010701 A MX2016010701 A MX 2016010701A MX 2016010701 A MX2016010701 A MX 2016010701A MX 363398 B MX363398 B MX 363398B
- Authority
- MX
- Mexico
- Prior art keywords
- layer
- contact measurement
- photo
- measuring device
- thin layers
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
- G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/024—Analysing fluids by measuring propagation velocity or propagation time of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0237—Thin materials, e.g. paper, membranes, thin films
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02854—Length, thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/102—Number of transducers one emitter, one receiver
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/103—Number of transducers one emitter, two or more receivers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Acoustics & Sound (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Abstract
Un dispositivo de medición para la medición sin contacto mecánico de una capa, donde el dispositivo de medición incluye una fuente de luz funcional para generar un pulso adaptado para interactuar con la capa para generar una onda térmica en un medio gaseoso presente adyacente a la capa. La onda térmica provoca que se genere una señal acústica. El dispositivo de medición incluye, además, un detector adaptado para detectar una primera señal sensible a la señal acústica, donde el detector no está en contacto mecánico con la capa. La primera señal es representativa de la capa medida.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461941404P | 2014-02-18 | 2014-02-18 | |
PCT/US2015/016033 WO2015126784A1 (en) | 2014-02-18 | 2015-02-16 | Photo-acoustic device and method for non-contact measurement of thin layers |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2016010701A MX2016010701A (es) | 2017-01-05 |
MX363398B true MX363398B (es) | 2019-03-22 |
Family
ID=52597280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2016010701A MX363398B (es) | 2014-02-18 | 2015-02-16 | Dispositivo fotoacustico y metodo para la medicion sin contacto de capas delgadas. |
Country Status (10)
Country | Link |
---|---|
US (2) | US9791419B2 (es) |
EP (1) | EP3108205B1 (es) |
KR (1) | KR101940891B1 (es) |
CN (1) | CN106030242B (es) |
CA (1) | CA2939534C (es) |
DK (1) | DK3108205T3 (es) |
ES (1) | ES2928703T3 (es) |
MX (1) | MX363398B (es) |
PL (1) | PL3108205T3 (es) |
WO (1) | WO2015126784A1 (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10352911B2 (en) | 2008-09-12 | 2019-07-16 | Balthasar Fischer | Airborne ultrasound testing system for a test object |
EP3173781B8 (en) * | 2015-11-25 | 2024-06-12 | Xarion Laser Acoustics GmbH | Airborne ultrasound testing system for a test object |
PL3108205T3 (pl) | 2014-02-18 | 2022-11-07 | Novelis, Inc. | Urządzenie fotoakustyczne i sposób bezdotykowego pomiaru cienkich warstw |
CA2972274C (en) * | 2015-01-14 | 2022-12-06 | Qi2 Elements, Llc | Automatic transducer operating parameter selection |
DE102016103646B4 (de) * | 2016-01-22 | 2023-03-02 | Infineon Technologies Ag | Integriertes photoakustisches gassensormodul |
US10955335B2 (en) | 2018-03-28 | 2021-03-23 | University Of Washington | Non-contact photoacoustic spectrophotometry insensitive to light scattering |
JP7099545B2 (ja) * | 2018-12-20 | 2022-07-12 | 株式会社島津製作所 | 欠陥検査装置および欠陥検査方法 |
EP3683539A1 (en) * | 2019-01-18 | 2020-07-22 | SABIC Global Technologies B.V. | Multi-layer thickness detection using correction factors for photoacoustic spectroscopy |
EP3734267A1 (en) * | 2019-05-01 | 2020-11-04 | Northrop Grumman Innovation Systems, Inc. | Inspection devices with laser emitters and optical microphones, and related systems and methods |
JP2021085836A (ja) * | 2019-11-29 | 2021-06-03 | 株式会社トヨコー | レーザ照射状態診断方法、レーザ照射状態診断プログラム、レーザ照射状態診断装置、及び、レーザ照射装置 |
DE102020102800B4 (de) | 2020-02-04 | 2021-10-07 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren und Vorrichtung zum Ermitteln einer Applikationseigenschaft und Verfahren zur Herstellung einer Faserpreform |
CN111610254B (zh) * | 2020-05-18 | 2021-08-17 | 武汉大学 | 一种基于高速振镜协同的激光超声全聚焦成像检测装置及方法 |
CN111595787B (zh) * | 2020-06-08 | 2023-01-06 | 河北大学 | 基于光声谐振探测的太赫兹气体检测系统及方法 |
CN113029968A (zh) * | 2021-04-08 | 2021-06-25 | 中南大学 | 一种基于光声成像的快速氧分压检测系统及方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3948345A (en) * | 1973-06-15 | 1976-04-06 | Allan Rosencwaig | Methods and means for analyzing substances |
US4255971A (en) * | 1978-11-01 | 1981-03-17 | Allan Rosencwaig | Thermoacoustic microscopy |
US4522510A (en) * | 1982-07-26 | 1985-06-11 | Therma-Wave, Inc. | Thin film thickness measurement with thermal waves |
US4683750A (en) * | 1984-11-07 | 1987-08-04 | The Board Of Trustees Of The Leland Stanford Junior University | Thermal acoustic probe |
US4632561A (en) * | 1985-04-30 | 1986-12-30 | Therma-Wave, Inc. | Evaluation of surface and subsurface characteristics of a sample |
US5194723A (en) * | 1991-12-24 | 1993-03-16 | Maxwell Laboratories, Inc. | Photoacoustic control of a pulsed light material removal process |
US5929337A (en) * | 1994-11-11 | 1999-07-27 | M & A Packaging Services Limited | Non-mechanical contact ultrasound system for monitoring contents of a moving container |
US5688049A (en) * | 1996-01-25 | 1997-11-18 | Inrad | Method and apparatus for measuring the thermal conductivity of thin films |
US6769307B1 (en) * | 1997-11-21 | 2004-08-03 | Perceptron, Inc. | Method and system for processing measurement signals to obtain a value for a physical parameter |
US6041020A (en) * | 1997-04-21 | 2000-03-21 | University Of Delaware | Gas-coupled laser acoustic detection |
US6552803B1 (en) * | 1998-02-24 | 2003-04-22 | Kla-Tencor Corporation | Detection of film thickness through induced acoustic pulse-echos |
US6837109B2 (en) | 2002-11-05 | 2005-01-04 | Kawasaki Steel Corporation | Material thickness measurement method and apparatus |
WO2007105691A1 (ja) * | 2006-03-13 | 2007-09-20 | R-Tech Ueno, Ltd. | 水性組成物 |
JP5552447B2 (ja) * | 2011-01-25 | 2014-07-16 | トヨタ自動車株式会社 | 超音波計測方法、及び超音波計測装置 |
PL3108205T3 (pl) | 2014-02-18 | 2022-11-07 | Novelis, Inc. | Urządzenie fotoakustyczne i sposób bezdotykowego pomiaru cienkich warstw |
CN103926253B (zh) * | 2014-04-22 | 2017-04-12 | 哈尔滨工业大学 | 线性调频超声波激励的红外热波无损检测方法与系统 |
CN103940915B (zh) * | 2014-05-09 | 2016-01-20 | 北京科技大学 | 一种自适应超声脉冲激励装置及其控制方法 |
-
2015
- 2015-02-16 PL PL15707477.4T patent/PL3108205T3/pl unknown
- 2015-02-16 US US14/623,181 patent/US9791419B2/en active Active
- 2015-02-16 WO PCT/US2015/016033 patent/WO2015126784A1/en active Application Filing
- 2015-02-16 DK DK15707477.4T patent/DK3108205T3/da active
- 2015-02-16 ES ES15707477T patent/ES2928703T3/es active Active
- 2015-02-16 EP EP15707477.4A patent/EP3108205B1/en active Active
- 2015-02-16 CN CN201580008962.4A patent/CN106030242B/zh active Active
- 2015-02-16 KR KR1020167025640A patent/KR101940891B1/ko active IP Right Grant
- 2015-02-16 MX MX2016010701A patent/MX363398B/es unknown
- 2015-02-16 CA CA2939534A patent/CA2939534C/en active Active
-
2017
- 2017-09-13 US US15/702,822 patent/US10436754B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20160124185A (ko) | 2016-10-26 |
US20180003679A1 (en) | 2018-01-04 |
DK3108205T3 (da) | 2022-09-12 |
US9791419B2 (en) | 2017-10-17 |
ES2928703T3 (es) | 2022-11-22 |
CN106030242B (zh) | 2020-06-19 |
CA2939534C (en) | 2019-01-15 |
WO2015126784A1 (en) | 2015-08-27 |
EP3108205B1 (en) | 2022-08-10 |
EP3108205A1 (en) | 2016-12-28 |
KR101940891B1 (ko) | 2019-01-21 |
CN106030242A (zh) | 2016-10-12 |
MX2016010701A (es) | 2017-01-05 |
CA2939534A1 (en) | 2015-08-27 |
PL3108205T3 (pl) | 2022-11-07 |
US20150233870A1 (en) | 2015-08-20 |
US10436754B2 (en) | 2019-10-08 |
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