MX2017010824A - Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada. - Google Patents

Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada.

Info

Publication number
MX2017010824A
MX2017010824A MX2017010824A MX2017010824A MX2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A
Authority
MX
Mexico
Prior art keywords
membrane
localizing
laser illumination
illumination during
during controlled
Prior art date
Application number
MX2017010824A
Other languages
English (en)
Inventor
Vincent Tabard-Cossa
Bustamante Jose
briggs Kyle
Original Assignee
Univ Ottawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Ottawa filed Critical Univ Ottawa
Publication of MX2017010824A publication Critical patent/MX2017010824A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002—Organic membrane manufacture
    • B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/021—Carbon
    • B01D71/0211—Graphene or derivates thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B81B1/002—Holes characterised by their shape, in either longitudinal or sectional plane
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22—Electrical effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/34—Use of radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/35—Use of magnetic or electrical fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B01D2325/02832—1-10 nm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/26—Electrical properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Laser Beam Processing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Un método para fabricar un nanoporo en una localización particular en una membrana incluye controlar una rigidez dieléctrica de la membrana en una localización particular en la membrana mientras se aplica uno de un potencial eléctrico o una corriente eléctrica a la membrana, monitorear una propiedad eléctrica a través de la membrana mientras se aplica uno del potencial eléctrico o la corriente eléctrica a través de la membrana, detectar un cambio brusco en la propiedad eléctrica a través de la membrana mientras se aplica uno del potencial eléctrico o la corriente eléctrica a través de la membrana; y retirar el potencial eléctrico o la corriente eléctrica de la membrana en respuesta a la detección del cambio brusco en la propiedad eléctrica.
MX2017010824A 2015-02-24 2016-02-24 Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada. MX2017010824A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562120054P 2015-02-24 2015-02-24
PCT/IB2016/051017 WO2016135656A1 (en) 2015-02-24 2016-02-24 Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown

Publications (1)

Publication Number Publication Date
MX2017010824A true MX2017010824A (es) 2018-05-28

Family

ID=56788090

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017010824A MX2017010824A (es) 2015-02-24 2016-02-24 Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada.

Country Status (12)

Country Link
US (1) US10753009B2 (es)
EP (1) EP3261753B1 (es)
JP (1) JP7071825B2 (es)
KR (1) KR102444998B1 (es)
CN (1) CN107530638B (es)
AU (1) AU2016224950B2 (es)
BR (1) BR112017018197A2 (es)
CA (1) CA2976313C (es)
ES (1) ES2804175T3 (es)
MX (1) MX2017010824A (es)
SG (1) SG11201706587TA (es)
WO (1) WO2016135656A1 (es)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110800089B (zh) * 2017-03-31 2024-03-08 尼尔森科学有限公司 三维半导体制造
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US11073764B2 (en) * 2018-03-29 2021-07-27 Northeastern University Nanoscale etching of light absorbing materials using light and an electron donor solvent
US11313857B2 (en) 2018-04-06 2022-04-26 Northeastern University System and method for identifying and quantifying species with nanopores, using complexes of nanoparticles with carrier particles
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
CN109632899B (zh) * 2018-11-02 2021-03-30 广东工业大学 一种精确可控的纳米孔制造方法
WO2020194303A1 (en) * 2019-03-25 2020-10-01 Technion Research & Development Foundation Limited Nanopore fabrication
CN110120248B (zh) * 2019-04-08 2020-12-25 中国科学院合肥物质科学研究院 模拟纳米晶金属累积离位损伤的方法
US11703476B2 (en) 2019-10-28 2023-07-18 Northeastern University Method and apparatus for sensing a molecule
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
JP7440375B2 (ja) 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP2022134179A (ja) * 2021-03-03 2022-09-15 株式会社日立製作所 ポア形成方法、およびポア形成装置

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JPS6392025A (ja) 1986-10-06 1988-04-22 Mitsubishi Electric Corp 導電性材料加工装置
JPH0674899A (ja) 1992-08-31 1994-03-18 Matsushita Electric Ind Co Ltd 試料表面の測定方法と装置及び試料表面の微細加工方法と装置
JP2004148458A (ja) 2002-10-31 2004-05-27 Sony Corp 微細加工装置および微細加工方法
WO2005017025A2 (en) * 2003-08-15 2005-02-24 The President And Fellows Of Harvard College Study of polymer molecules and conformations with a nanopore
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
US8110410B2 (en) * 2009-06-29 2012-02-07 International Business Machines Corporation Nanofludic field effect transistor based on surface charge modulated nanochannel
EP3196645B1 (en) * 2009-09-18 2019-06-19 President and Fellows of Harvard College Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis
EP2529394A4 (en) * 2010-01-27 2017-11-15 Yale University Conductivity based selective etch for gan devices and applications thereof
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices
EP2564999A1 (en) * 2011-08-31 2013-03-06 Asahi Glass Company, Limited A method of generating a high quality hole or recess or well in a substrate
ES2629952T3 (es) 2012-05-07 2017-08-16 The University Of Ottawa Procedimiento para controlar el tamaño de nanoporos de estado sólido
WO2014153047A1 (en) 2013-03-14 2014-09-25 The Trustees Of Boston University Optoelectronic control of solid-state nanopores
US9815082B2 (en) * 2013-03-15 2017-11-14 President And Fellows Of Harvard College Surface wetting method
US9046511B2 (en) 2013-04-18 2015-06-02 International Business Machines Corporation Fabrication of tunneling junction for nanopore DNA sequencing
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置

Also Published As

Publication number Publication date
CN107530638B (zh) 2021-03-09
CN107530638A (zh) 2018-01-02
ES2804175T3 (es) 2021-02-04
SG11201706587TA (en) 2017-09-28
KR102444998B1 (ko) 2022-09-19
EP3261753A4 (en) 2018-10-10
JP2018513774A (ja) 2018-05-31
US10753009B2 (en) 2020-08-25
EP3261753B1 (en) 2020-04-08
CA2976313C (en) 2024-01-16
CA2976313A1 (en) 2016-09-01
AU2016224950B2 (en) 2021-01-28
JP7071825B2 (ja) 2022-05-19
BR112017018197A2 (pt) 2018-04-10
US20180043310A1 (en) 2018-02-15
AU2016224950A1 (en) 2017-09-14
EP3261753A1 (en) 2018-01-03
KR20170119704A (ko) 2017-10-27
WO2016135656A1 (en) 2016-09-01

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