MX2008002639A - Tool with sintered body polishing surface and method of manufacturing the same. - Google Patents

Tool with sintered body polishing surface and method of manufacturing the same.

Info

Publication number
MX2008002639A
MX2008002639A MX2008002639A MX2008002639A MX2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A
Authority
MX
Mexico
Prior art keywords
polishing
tool
sintered body
manufacturing
same
Prior art date
Application number
MX2008002639A
Other languages
Spanish (es)
Inventor
Hiroshi Ishizuka
Original Assignee
Hiroshi Ishizuka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hiroshi Ishizuka filed Critical Hiroshi Ishizuka
Publication of MX2008002639A publication Critical patent/MX2008002639A/en

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)

Abstract

An efficiently processible polishing tool, particularly used for a CMP pad conditioner, capable solving problems in a fixing strength for fixing abrasive grains to a base plate and problems in nonuniform polished surface and a method of effectively manufacturing the polishing tool. The polishing tool (1) comprises a polishing part formed of a super abrasive grain sintered body sintered integrally with the lining material of a cemented carbide. The polishing part comprises a plurality of polishing units (2) with top parts. The top parts are positioned on an approximately same plane. The polishing units (2) are formed by forming a linear groove (3) group in the polishing part.
MX2008002639A 2005-08-25 2006-08-25 Tool with sintered body polishing surface and method of manufacturing the same. MX2008002639A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005243529 2005-08-25
JP2006209236 2006-07-31
JP2006016737 2006-08-25

Publications (1)

Publication Number Publication Date
MX2008002639A true MX2008002639A (en) 2008-04-22

Family

ID=40328149

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2008002639A MX2008002639A (en) 2005-08-25 2006-08-25 Tool with sintered body polishing surface and method of manufacturing the same.

Country Status (2)

Country Link
AT (1) ATE542637T1 (en)
MX (1) MX2008002639A (en)

Also Published As

Publication number Publication date
ATE542637T1 (en) 2012-02-15

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Legal Events

Date Code Title Description
FG Grant or registration