MX2008002639A - Tool with sintered body polishing surface and method of manufacturing the same. - Google Patents
Tool with sintered body polishing surface and method of manufacturing the same.Info
- Publication number
- MX2008002639A MX2008002639A MX2008002639A MX2008002639A MX2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A MX 2008002639 A MX2008002639 A MX 2008002639A
- Authority
- MX
- Mexico
- Prior art keywords
- polishing
- tool
- sintered body
- manufacturing
- same
- Prior art date
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
An efficiently processible polishing tool, particularly used for a CMP pad conditioner, capable solving problems in a fixing strength for fixing abrasive grains to a base plate and problems in nonuniform polished surface and a method of effectively manufacturing the polishing tool. The polishing tool (1) comprises a polishing part formed of a super abrasive grain sintered body sintered integrally with the lining material of a cemented carbide. The polishing part comprises a plurality of polishing units (2) with top parts. The top parts are positioned on an approximately same plane. The polishing units (2) are formed by forming a linear groove (3) group in the polishing part.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005243529 | 2005-08-25 | ||
JP2006209236 | 2006-07-31 | ||
JP2006016737 | 2006-08-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2008002639A true MX2008002639A (en) | 2008-04-22 |
Family
ID=40328149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2008002639A MX2008002639A (en) | 2005-08-25 | 2006-08-25 | Tool with sintered body polishing surface and method of manufacturing the same. |
Country Status (2)
Country | Link |
---|---|
AT (1) | ATE542637T1 (en) |
MX (1) | MX2008002639A (en) |
-
2006
- 2006-08-25 MX MX2008002639A patent/MX2008002639A/en active IP Right Grant
- 2006-08-25 AT AT06796810T patent/ATE542637T1/en active
Also Published As
Publication number | Publication date |
---|---|
ATE542637T1 (en) | 2012-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant or registration |