MD3135C2 - Instalaţie pentru obţinerea straturilor conductoare - Google Patents

Instalaţie pentru obţinerea straturilor conductoare Download PDF

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Publication number
MD3135C2
MD3135C2 MDA20030063A MD20030063A MD3135C2 MD 3135 C2 MD3135 C2 MD 3135C2 MD A20030063 A MDA20030063 A MD A20030063A MD 20030063 A MD20030063 A MD 20030063A MD 3135 C2 MD3135 C2 MD 3135C2
Authority
MD
Moldova
Prior art keywords
conducting layer
installation
layer obtaining
anode
cathode
Prior art date
Application number
MDA20030063A
Other languages
English (en)
Russian (ru)
Other versions
MD3135B2 (ro
Inventor
Анатолие СИДОРЕНКО
Владимир ЗДРАВКОВ
Original Assignee
Международная Лаборатория Сверхпроводимости И Электроники Твёрдого Тела Академии Наук Республики Молдова
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Международная Лаборатория Сверхпроводимости И Электроники Твёрдого Тела Академии Наук Республики Молдова filed Critical Международная Лаборатория Сверхпроводимости И Электроники Твёрдого Тела Академии Наук Республики Молдова
Priority to MDA20030063A priority Critical patent/MD3135C2/ro
Publication of MD3135B2 publication Critical patent/MD3135B2/ro
Publication of MD3135C2 publication Critical patent/MD3135C2/ro

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Abstract

Invenţia se referă la electrotehnică, în particular la instalaţii pentru obţinerea straturilor conductoare.Instalaţia pentru obţinerea straturilor conductoare include o sursă de înaltă tensiune, o cameră, umplută cu gaz inert, în care sunt amplasate de-a lungul aceleiaşi axe, vizavi, o masă-anod şi un catod, de asemenea un substrat, fixat pe masa-anod. Noutatea invenţiei constă în aceea că substratul este fixat pe masă asimetric faţă de axa comună. Catodul este montat cu posibilitatea schimbării distanţei dintre el şi masa-anod.
MDA20030063A 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare MD3135C2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

Publications (2)

Publication Number Publication Date
MD3135B2 MD3135B2 (ro) 2006-08-31
MD3135C2 true MD3135C2 (ro) 2007-09-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

Country Status (1)

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MD (1) MD3135C2 (ro)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067577A2 (en) * 1999-07-06 2001-01-10 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067577A2 (en) * 1999-07-06 2001-01-10 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
B. Y. Jin, J.B. Ketterson. Artificial metallic superlattices. Advances in Physics, v. 38, nr. 3, 1989, p.197 *

Also Published As

Publication number Publication date
MD3135B2 (ro) 2006-08-31

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Legal Events

Date Code Title Description
TC4A Change of name of proprietor (patent for invention)

Owner name: INSTITUTUL DE INGINERIE ELECTRONICA SI TEHNOLOGI..

Free format text: FORMER NAME: LABORATORUL INTERNATIONAL DE SUPRACONDUCTIBILITATE SI ELECTRONICA SOLIDULUI AL ACADEMIEI DE STIINTE A REPUBLICII MOLDOVA, MD

FG4A Patent for invention issued
KA4A Patent for invention lapsed due to non-payment of fees (with right of restoration)
MM4A Patent for invention definitely lapsed due to non-payment of fees