MD3135B2 - Instalatie pentru obtinerea straturilor conductoare - Google Patents

Instalatie pentru obtinerea straturilor conductoare Download PDF

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Publication number
MD3135B2
MD3135B2 MDA20030063A MD20030063A MD3135B2 MD 3135 B2 MD3135 B2 MD 3135B2 MD A20030063 A MDA20030063 A MD A20030063A MD 20030063 A MD20030063 A MD 20030063A MD 3135 B2 MD3135 B2 MD 3135B2
Authority
MD
Moldova
Prior art keywords
installation
anode
conducting layer
obtaining
layer obtaining
Prior art date
Application number
MDA20030063A
Other languages
English (en)
Other versions
MD3135C2 (ro
Inventor
Anatolii SIDORENKO
Vladimir ZDRAVKOV
Original Assignee
Laboratorul International De Supraconductibilitate Si Electronica Solidului Al Academiei De Stiintea Republicii Moldova
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratorul International De Supraconductibilitate Si Electronica Solidului Al Academiei De Stiintea Republicii Moldova filed Critical Laboratorul International De Supraconductibilitate Si Electronica Solidului Al Academiei De Stiintea Republicii Moldova
Priority to MDA20030063A priority Critical patent/MD3135C2/ro
Publication of MD3135B2 publication Critical patent/MD3135B2/ro
Publication of MD3135C2 publication Critical patent/MD3135C2/ro

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Abstract

Inventia se refera la electrotehnica, in particular la instalatii pentru obtinerea straturilor conductoare. Instalatia pentru obtinerea straturilor conductoare include o sursa de inalta tensiune, o camera, umpluta cu gaz inert, in care sunt amplasate de-a lungul aceleiasi axe, vizavi, o masa-anod si un catod, de asemenea un substrat, fixat pe masa-anod. Noutatea inventiei consta in aceea ca substratul este fixat pe masa asimetric fata de axa comuna. Catodul este montat cu posibilitatea schimbarii distantei dintre el si masa-anod.
MDA20030063A 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare MD3135C2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

Publications (2)

Publication Number Publication Date
MD3135B2 true MD3135B2 (ro) 2006-08-31
MD3135C2 MD3135C2 (ro) 2007-09-30

Family

ID=36992837

Family Applications (1)

Application Number Title Priority Date Filing Date
MDA20030063A MD3135C2 (ro) 2003-02-27 2003-02-27 Instalaţie pentru obţinerea straturilor conductoare

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MD (1) MD3135C2 (ro)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6440282B1 (en) * 1999-07-06 2002-08-27 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron

Also Published As

Publication number Publication date
MD3135C2 (ro) 2007-09-30

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Legal Events

Date Code Title Description
TC4A Change of name of proprietor (patent for invention)

Owner name: INSTITUTUL DE INGINERIE ELECTRONICA SI TEHNOLOGI..

Free format text: FORMER NAME: LABORATORUL INTERNATIONAL DE SUPRACONDUCTIBILITATE SI ELECTRONICA SOLIDULUI AL ACADEMIEI DE STIINTE A REPUBLICII MOLDOVA, MD

FG4A Patent for invention issued
KA4A Patent for invention lapsed due to non-payment of fees (with right of restoration)
MM4A Patent for invention definitely lapsed due to non-payment of fees