MD2859B1 - Nanotehnologie de obtinere a materialelor nanostructurate si nanocompozite (variante) - Google Patents
Nanotehnologie de obtinere a materialelor nanostructurate si nanocompozite (variante) Download PDFInfo
- Publication number
- MD2859B1 MD2859B1 MDA20040198A MD20040198A MD2859B1 MD 2859 B1 MD2859 B1 MD 2859B1 MD A20040198 A MDA20040198 A MD A20040198A MD 20040198 A MD20040198 A MD 20040198A MD 2859 B1 MD2859 B1 MD 2859B1
- Authority
- MD
- Moldova
- Prior art keywords
- nanocomposites
- materials
- nanotechnology
- chemical components
- obtaining
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 7
- 239000002114 nanocomposite Substances 0.000 title abstract 6
- 238000000151 deposition Methods 0.000 abstract 5
- 239000002086 nanomaterial Substances 0.000 abstract 5
- 239000000126 substance Substances 0.000 abstract 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 4
- 239000012535 impurity Substances 0.000 abstract 4
- 239000001301 oxygen Substances 0.000 abstract 4
- 229910052760 oxygen Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 230000008021 deposition Effects 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
Inventia se refera la electronica, in particular la nanotehnologiile de obtinere a materialelor nanostructurate si nanocompozitelor. Nanotehnologia de obtinere a materialelor nanostructurate si nanocompozitelor, conform primei variante, include depunerea componentilor chimici pe un substrat in prezenta razelor ultraviolete. Apoi are loc procesarea fototermica rapida a materialelor obtinute in vid sau in aer, sau in camera cu gaze, de exemplu, cu oxigen. Nanotehnologia de obtinere a materialelor nanostructurate si nanocompozitelor, conform variantei a doua, include depunerea componentilor chimici pe un substrat in prezenta razelor ultraviolete, iar odata cu depunerea componentilor chimici are loc doparea materialelor obtinute cu cel putin o impuritate donoare sau acceptoare. Apoi se infaptuieste procesarea fototermica rapida a materialelor obtinute in vid sau in aer, sau in camera cu gaze, de exemplu, cu oxigen. Nanotehnologia de obtinere a materialelor nanostructurate si nanocompozitelor, conform variantei a treia, include depunerea componentilor chimici pe un substrat in prezenta razelor ultraviolete, apoi se efectuiaza doparea prin difuzie cu cel putin o impuritate donoare sau acceptoare odata cu procesarea fototermica rapida a materialelor obtinute in vid sau in aer, sau in camera cu gaze, de exemplu, cu oxigen. Nanotehnologia de obtinere a materialelor nanostructurate si nanocompozitelor, conform variantei patru, include depunerea componentilor chimici pe un substrat in prezenta razelor ultraviolete, apoi se efectuiaza doparea prin difuzie cu cel putin o impuritate. Concentratia impuritatilor fiind maxim posibila pentru materialul obtinut. Ulterior are loc procesarea fototermica rapida a materialelor obtinute in conditiile micsorarii de la temperatura doparii pana la temperatura mediului inconjurator in vid sau in aer, sau in camera cu gaze, de exemplu, cu oxigen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20040198A MD2859C2 (ro) | 2004-08-12 | 2004-08-12 | Nanotehnologie de obţinere a materialelor nanostructurate şi nanocompozite (variante) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20040198A MD2859C2 (ro) | 2004-08-12 | 2004-08-12 | Nanotehnologie de obţinere a materialelor nanostructurate şi nanocompozite (variante) |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD2859B1 true MD2859B1 (ro) | 2005-09-30 |
| MD2859C2 MD2859C2 (ro) | 2006-07-31 |
Family
ID=35057534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20040198A MD2859C2 (ro) | 2004-08-12 | 2004-08-12 | Nanotehnologie de obţinere a materialelor nanostructurate şi nanocompozite (variante) |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD2859C2 (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD4294C1 (ro) * | 2013-02-06 | 2015-02-28 | Государственный Университет Молд0 | Procedeu de obţinere a nanocompozitelor pe bază de nanotuburi din dioxid de titan şi instalaţie pentru realizarea acestuia |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6344271B1 (en) * | 1998-11-06 | 2002-02-05 | Nanoenergy Corporation | Materials and products using nanostructured non-stoichiometric substances |
| US6100149A (en) * | 1997-07-01 | 2000-08-08 | Steag Rtp Systems | Method for rapid thermal processing (RTP) of silicon substrates |
| US6471848B1 (en) * | 1998-02-17 | 2002-10-29 | Canon Kabushiki Kaisha | Electrodeposition method of forming an oxide film |
-
2004
- 2004-08-12 MD MDA20040198A patent/MD2859C2/ro not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD4294C1 (ro) * | 2013-02-06 | 2015-02-28 | Государственный Университет Молд0 | Procedeu de obţinere a nanocompozitelor pe bază de nanotuburi din dioxid de titan şi instalaţie pentru realizarea acestuia |
Also Published As
| Publication number | Publication date |
|---|---|
| MD2859C2 (ro) | 2006-07-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3080838B1 (en) | Recirculation purging system | |
| KR100478550B1 (ko) | 분자 오염 제어 시스템 | |
| US20240128079A1 (en) | A method for the manufacture of an improved graphene substrate and applications therefor | |
| KR19980080510A (ko) | 기판 처리장치 및 기판 처리방법 | |
| CN102149460B (zh) | 等离子体处理方法和设备 | |
| US9548229B2 (en) | Substrate processing apparatus, method of processing substrate, and method of manufacturing semiconductor device | |
| US8597732B2 (en) | Thin film depositing method | |
| MD2859B1 (ro) | Nanotehnologie de obtinere a materialelor nanostructurate si nanocompozite (variante) | |
| US20170233888A1 (en) | Reactor gas panel common exhaust | |
| WO2006104819A3 (en) | A method and system for removing an oxide from a substrate | |
| CN205473973U (zh) | 一种基于脉冲气流生长二硫化钼薄膜的化学气相沉积设备 | |
| TWI743664B (zh) | 用以清洗一真空腔室之方法、用以清洗一真空系統之方法、用於一基板之真空處理之方法、及用於一基板之真空處理的設備 | |
| JP5228857B2 (ja) | シリコンエピタキシャルウェーハの製造方法 | |
| RU2011107600A (ru) | Способ изготовления структуры фотоэлектрического элемента | |
| MD3029C2 (ro) | Procedeu de obţinere a senzorilor (variante) | |
| US20020168866A1 (en) | Method for fabricating a semiconductor device | |
| JP2006124784A (ja) | 真空装置および真空チャンバーの排気方法 | |
| CN106064807B (zh) | 电子级砷化氢、磷化氢及其混合气体钢瓶的钝化处理装置 | |
| KR100951353B1 (ko) | 액정 표시 장치용 처리 시스템 | |
| CN214845100U (zh) | 半导体结构制造设备 | |
| JP2011091323A (ja) | 半導体製造装置 | |
| Kondoh et al. | Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor | |
| JP2009200158A (ja) | 薄膜堆積方法 | |
| KR100682756B1 (ko) | 에피택시 장비 및 그를 이용한 에피택셜층 성장 방법 | |
| CN118326504A (zh) | 外延生长气体供应方法及装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG4A | Patent for invention issued | ||
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |