MD278Z - Method for measuring the size of micro-objects - Google Patents

Method for measuring the size of micro-objects

Info

Publication number
MD278Z
MD278Z MDS20100024A MDS20100024A MD278Z MD 278 Z MD278 Z MD 278Z MD S20100024 A MDS20100024 A MD S20100024A MD S20100024 A MDS20100024 A MD S20100024A MD 278 Z MD278 Z MD 278Z
Authority
MD
Moldova
Prior art keywords
micro
interference
measuring
size
raster
Prior art date
Application number
MDS20100024A
Other languages
Romanian (ro)
Russian (ru)
Inventor
Аркадий КИРИЦА
Олег КОРШАК
Original Assignee
Государственный Университет Молд0
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Государственный Университет Молд0 filed Critical Государственный Университет Молд0
Priority to MDS20100024A priority Critical patent/MD278Z/en
Publication of MD278Y publication Critical patent/MD278Y/en
Publication of MD278Z publication Critical patent/MD278Z/en

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to the investigation of materials by optical means, in particular to methods for measuring the size of micro-objects.The method for measuring the size of micro-objects consists in that the micro-object is illuminated with an interference raster with a known period, formed by the interference of laser beams B1 and B2, then the pre-enlarged image of the interference pattern is projected onto a micro-object hologram recording carrier, the micro-object is placed in the focal plane of the microscope lens on the hologram registration carrier, it is projected the magnified image of the micro-object overlaying the reference interference raster, formed by the laser beams B1 and B2, then the reconstructed image of the micro-object is projected onto a computer screen. The sizes of the micro-object are determined proceeding from the values of the recorded hologram of the interference raster with a known period.
MDS20100024A 2010-02-10 2010-02-10 Method for measuring the size of micro-objects MD278Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20100024A MD278Z (en) 2010-02-10 2010-02-10 Method for measuring the size of micro-objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20100024A MD278Z (en) 2010-02-10 2010-02-10 Method for measuring the size of micro-objects

Publications (2)

Publication Number Publication Date
MD278Y MD278Y (en) 2010-09-30
MD278Z true MD278Z (en) 2011-04-30

Family

ID=45815167

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20100024A MD278Z (en) 2010-02-10 2010-02-10 Method for measuring the size of micro-objects

Country Status (1)

Country Link
MD (1) MD278Z (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD4220C1 (en) * 2012-02-16 2013-11-30 Государственный Университет Молд0 Method for measuring the dimensions of opaque micro-objects
MD4295C1 (en) * 2013-04-12 2015-02-28 Государственный Университет Молд0 Method for remote measuremnt of the size of petroleum product spots on water surface
CN105869491A (en) * 2016-05-17 2016-08-17 北京理工大学 Transmission electron microscope teaching model device
CN105894926A (en) * 2016-04-15 2016-08-24 北京理工大学 Visualization transmission electron microscope demonstration device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD1186Z (en) * 2016-01-29 2018-03-31 Государственный Университет Молд0 Method for identifying thin films of petroleum products according to their photoluminescence spectrum at a distance

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD294C2 (en) * 1991-04-19 1995-12-31 Государственный Медицинский И Фармацевтический Университет "Nicolae Testemitanu" Республики Молдова Instalation for demonstrating the polar method of microscopy
SU1304532A1 (en) * 1985-03-13 2000-06-10 Л.И. Слабкий INTERFEROMETRIC DEVICE FOR MEASUREMENT OF PARAMETERS OF MOVEMENT OF OBJECT
RU2181498C1 (en) * 2001-01-15 2002-04-20 Общество с ограниченной ответственностью "Лаборатория АМФОРА" Method for determination of object microrelief and optical properties of presurface layer, modulation interference microscope for realization of the method
RU2228516C2 (en) * 2002-03-21 2004-05-10 Сибирская государственная геодезическая академия Interference method measuring distance (length) and device for its realization
SU1132673A1 (en) * 1983-09-23 2004-08-10 Ю.Н. Власов FIBER OPTICAL INTERFERENTIAL CONVERTER
RU2375701C1 (en) * 2008-10-23 2009-12-10 Государственный научный центр Российской Федерации - Институт медико-биологических проблем Российской академии наук Precision two-channel spectral fluorimeter to record and measure dynamics of differential signal of nano- and micro-objects
RU2378976C2 (en) * 2005-05-11 2010-01-20 Олимпус Медикал Системз Корп. Method of signal processing for device intended for biological observation
  • 2010

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1132673A1 (en) * 1983-09-23 2004-08-10 Ю.Н. Власов FIBER OPTICAL INTERFERENTIAL CONVERTER
SU1304532A1 (en) * 1985-03-13 2000-06-10 Л.И. Слабкий INTERFEROMETRIC DEVICE FOR MEASUREMENT OF PARAMETERS OF MOVEMENT OF OBJECT
MD294C2 (en) * 1991-04-19 1995-12-31 Государственный Медицинский И Фармацевтический Университет "Nicolae Testemitanu" Республики Молдова Instalation for demonstrating the polar method of microscopy
RU2181498C1 (en) * 2001-01-15 2002-04-20 Общество с ограниченной ответственностью "Лаборатория АМФОРА" Method for determination of object microrelief and optical properties of presurface layer, modulation interference microscope for realization of the method
RU2228516C2 (en) * 2002-03-21 2004-05-10 Сибирская государственная геодезическая академия Interference method measuring distance (length) and device for its realization
RU2378976C2 (en) * 2005-05-11 2010-01-20 Олимпус Медикал Системз Корп. Method of signal processing for device intended for biological observation
RU2375701C1 (en) * 2008-10-23 2009-12-10 Государственный научный центр Российской Федерации - Институт медико-биологических проблем Российской академии наук Precision two-channel spectral fluorimeter to record and measure dynamics of differential signal of nano- and micro-objects

Non-Patent Citations (12)

* Cited by examiner, † Cited by third party
Title
Бабенко В.А., Константинов В.Б., Малый А.Ф. Возможность использования метода голографической интерференционной *
Бабенко В.А., Константинов В.Б., Малый А.Ф. Возможность использования метода голографической интерференционной микроскопии для исследования живых фазовых объектов, Письма в журнал технической физики, т. 33, в. 8, 2007, с. 77-80 *
Гинсбург В.Н., Степанов Б.М. Голографические измерения. Москва, Радио и связь, 1981, с. 296 *
Константинов В.Б., Бабенко В.А., Малый А.Ф. Голографический интерференционный микроскоп для исследования *
Константинов В.Б., Бабенко В.А., Малый А.Ф. Голографический интерференционный микроскоп для исследования микрообъектов, Журнал технической физики, т. 77, в. 12, 2007, с. 92-95 *
микрообъектов, Журнал технической физики, т. 77, в. 12, 2007, с. 92-95 *
микроскопии для исследования живых фазовых объектов, Письма в журнал технической физики, т. 33, в. 8, 2007, с. 77-80 *
Соколов М.Э. Современные методы визуализации фазовых объектов. Голографические методы и аппаратура, применяемые в *
Соколов М.Э. Современные методы визуализации фазовых объектов. Голографические методы и аппаратура, применяемые в физических исследованиях. Москва, Наука, 1987, с. 259 *
физических исследованиях. Москва, Наука, 1987, с. 259 *
Франсон М. Фазово-контрастный и интерференционный микроскоп. Москва, Гос. Издательство физ-мат. литературы, 1960, с. *
Франсон М. Фазово-контрастный и интерференционный микроскоп. Москва, Гос. Издательство физ-мат. литературы, 1960, с. 180 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD4220C1 (en) * 2012-02-16 2013-11-30 Государственный Университет Молд0 Method for measuring the dimensions of opaque micro-objects
MD4295C1 (en) * 2013-04-12 2015-02-28 Государственный Университет Молд0 Method for remote measuremnt of the size of petroleum product spots on water surface
CN105894926A (en) * 2016-04-15 2016-08-24 北京理工大学 Visualization transmission electron microscope demonstration device
CN105894926B (en) * 2016-04-15 2018-05-08 北京理工大学 One kind visualization transmission electron microscope apparatus for demonstrating
CN105869491A (en) * 2016-05-17 2016-08-17 北京理工大学 Transmission electron microscope teaching model device
CN105869491B (en) * 2016-05-17 2018-07-10 北京理工大学 A kind of device of transmission electron microscope teaching mode

Also Published As

Publication number Publication date
MD278Y (en) 2010-09-30

Similar Documents

Publication Publication Date Title
MD278Z (en) Method for measuring the size of micro-objects
WO2012118322A3 (en) Apparatus for projecting a grid pattern
IL230700B (en) Detecting defects on a wafer
WO2012112894A3 (en) Focusing a charged particle imaging system
WO2008123408A1 (en) Three-dimensional microscope and method for acquiring three-dimensional image
WO2009043472A3 (en) Method for the microscopic three-dimensional reproduction of a sample
IN2014DN03134A (en)
WO2012018800A3 (en) Method for acquiring simultaneous and overlapping optical and charged particle beam images
WO2013151421A8 (en) Integrated optical and charged particle inspection apparatus
BR112013023116A2 (en) method for capturing, classifying and subsequently viewing an orbital image recording of a vehicle, apparatus for performing a method and apparatus for capturing information
EP2523043A3 (en) Substrate inspection apparatus and mask inspection apparatus
MY156072A (en) Apparatus and method for inspecting an object with increased depth of field
EP2566150A3 (en) Image processing apparatus, image processing method, and program
MX345972B (en) Material analysis system, method and device.
EP3139213A3 (en) Defect inspecting method, sorting method and producing method for photomask blank
PH12018502032A1 (en) Image processing apparatus, imaging apparatus, and control methods thereof
TW200628758A (en) Method and system of inspecting mura-defect and method of fabricating photomask
WO2012156462A3 (en) Method for generating and evaluating an image
TW200725778A (en) An inspection system and a method for inspecting a diced wafer
BR112013022668A2 (en) apparatus and method for generating an image and recording media
WO2015044035A8 (en) Light microscope and method for examining a sample using a light microscope
MY152817A (en) Graphic image processing method and apparatus
EP2787734A3 (en) Apparatus and method for forming light field image
GB2516329A (en) Method of electron beam diffraction analysis
EP2706523A3 (en) Device and method for repairing display device

Legal Events

Date Code Title Description
KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)