MD2449G2 - Способ получения сверхтонких перфорированных мембран - Google Patents

Способ получения сверхтонких перфорированных мембран Download PDF

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Publication number
MD2449G2
MD2449G2 MDA20030082A MD20030082A MD2449G2 MD 2449 G2 MD2449 G2 MD 2449G2 MD A20030082 A MDA20030082 A MD A20030082A MD 20030082 A MD20030082 A MD 20030082A MD 2449 G2 MD2449 G2 MD 2449G2
Authority
MD
Moldova
Prior art keywords
perforated membranes
ultrathin
obtaining
obtaining ultrathin
mask
Prior art date
Application number
MDA20030082A
Other languages
English (en)
Romanian (ro)
Other versions
MD2449F1 (en
Inventor
Вячеслав УРСАКИ
Ион ТИГИНЯНУ
Original Assignee
Ион ТИГИНЯНУ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ион ТИГИНЯНУ filed Critical Ион ТИГИНЯНУ
Priority to MDA20030082A priority Critical patent/MD2449G2/ru
Publication of MD2449F1 publication Critical patent/MD2449F1/xx
Publication of MD2449G2 publication Critical patent/MD2449G2/ru

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Abstract

Изобретение относится к оптоэлектронике, в частности к способам получения сверхтонких перфорированных мембран.Способ получения сверхтонких перфорированных мембран состоит в том, что на одну из граней кристалла наносят маску, которая выполнена в виде решетки с отверстиями, расположеными в рядах с одинаковым шагом, имплантируют ионы высокой энергии в каждое отверстие маски в четырех направлениях и осуществляют электрохимическое травление до достижения предела перколяции кристалла.
MDA20030082A 2003-03-14 2003-03-14 Способ получения сверхтонких перфорированных мембран MD2449G2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20030082A MD2449G2 (ru) 2003-03-14 2003-03-14 Способ получения сверхтонких перфорированных мембран

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20030082A MD2449G2 (ru) 2003-03-14 2003-03-14 Способ получения сверхтонких перфорированных мембран

Publications (2)

Publication Number Publication Date
MD2449F1 MD2449F1 (en) 2004-05-31
MD2449G2 true MD2449G2 (ru) 2004-11-30

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Application Number Title Priority Date Filing Date
MDA20030082A MD2449G2 (ru) 2003-03-14 2003-03-14 Способ получения сверхтонких перфорированных мембран

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MD (1) MD2449G2 (ru)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05317662A (ja) * 1992-04-27 1993-12-03 Sumitomo Metal Ind Ltd 水素分離膜およびその製造方法
US5410925A (en) * 1992-09-22 1995-05-02 Huber+Auhner Ag Method of making an aerator membrane
US5988400A (en) * 1995-10-23 1999-11-23 Aktsionernoe Obschestvo "Polimersintez" Pourous fluorocarbon membrane, method for producing thereof and cartridge filter based on said membrane
US6051117A (en) * 1996-12-12 2000-04-18 Eltech Systems, Corp. Reticulated metal article combining small pores with large apertures
EP1084285A1 (de) * 1998-05-08 2001-03-21 Infineon Technologies AG Perforierte silizium-membran, hergestellt mittels eines elektrochemischen ätzverfahrens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05317662A (ja) * 1992-04-27 1993-12-03 Sumitomo Metal Ind Ltd 水素分離膜およびその製造方法
US5410925A (en) * 1992-09-22 1995-05-02 Huber+Auhner Ag Method of making an aerator membrane
US5988400A (en) * 1995-10-23 1999-11-23 Aktsionernoe Obschestvo "Polimersintez" Pourous fluorocarbon membrane, method for producing thereof and cartridge filter based on said membrane
US6051117A (en) * 1996-12-12 2000-04-18 Eltech Systems, Corp. Reticulated metal article combining small pores with large apertures
EP1084285A1 (de) * 1998-05-08 2001-03-21 Infineon Technologies AG Perforierte silizium-membran, hergestellt mittels eines elektrochemischen ätzverfahrens

Also Published As

Publication number Publication date
MD2449F1 (en) 2004-05-31

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MM4A Patent for invention definitely lapsed due to non-payment of fees