MD20080027A - Set de procedee de înlăturare a impurităţilor dintr-o instalaţie de producere a siliciului - Google Patents

Set de procedee de înlăturare a impurităţilor dintr-o instalaţie de producere a siliciului

Info

Publication number
MD20080027A
MD20080027A MDA20080027A MD20080027A MD20080027A MD 20080027 A MD20080027 A MD 20080027A MD A20080027 A MDA20080027 A MD A20080027A MD 20080027 A MD20080027 A MD 20080027A MD 20080027 A MD20080027 A MD 20080027A
Authority
MD
Moldova
Prior art keywords
stream
processes
preferably greater
phosphine
methane
Prior art date
Application number
MDA20080027A
Other languages
English (en)
Russian (ru)
Inventor
Стефен М. ЛОРД
Original Assignee
Стефен М. ЛОРД
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Стефен М. ЛОРД filed Critical Стефен М. ЛОРД
Publication of MD20080027A publication Critical patent/MD20080027A/ro

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/033—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by reduction of silicon halides or halosilanes with a metal or a metallic alloy as the only reducing agents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C01B33/039—Purification by conversion of the silicon into a compound, optional purification of the compound, and reconversion into silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency
    • Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Silicon Compounds (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

Invenţia se referă la un set de procedee cu costuri reduse de înlăturare a impurităţilor de bor, fosfor, carbon şi alte metale şi nemetale în cadrul procesului de convertire a siliciului de grad metalurgic în siliciu de grad electronic. Un procedeu înlătură borul prin utilizarea unui sau mai multor dispozitive de înlăturare a substanţelor solide la temperatură înaltă, pentru a înlătura diborura de titan dintr-un curent de reactor efluent cu halosilan, la o temperatură de preferinţă mai înaltă de 200°C, mai preferabil mai înaltă de 300°C şi cel mai preferabil mai înaltă de 400°C. Cel de-al doilea procedeu înlătură carbonul sub formă de metan şi fosforul sub formă de fosfină prin intermediul unui separator cu membrană, care prelucrează tot sau o parte a curentului de reciclare a hidrogenului, pentru a recupera hidrogenul cu respingerea metanului şi a fosfinei. Al treilea procedeu separă curentul de halosilan cu punct de fierbere înalt într-un curent mare cu un nivel mic de impurităţi şi în unul sau mai mulţi curenţi mici cu un nivel înalt de impurităţi, unele dintre care putând fi îndreptate pentru recuperarea halogenului.
MDA20080027A 2005-07-29 2006-06-08 Set de procedee de înlăturare a impurităţilor dintr-o instalaţie de producere a siliciului MD20080027A (ro)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/193,734 US7790129B2 (en) 2005-07-29 2005-07-29 Set of processes for removing impurities from a silcon production facility
PCT/US2006/022310 WO2007015721A2 (en) 2005-07-29 2006-06-08 A set of processes for removing impurities from a silicon production facility

Publications (1)

Publication Number Publication Date
MD20080027A true MD20080027A (ro) 2008-10-31

Family

ID=37996548

Family Applications (1)

Application Number Title Priority Date Filing Date
MDA20080027A MD20080027A (ro) 2005-07-29 2006-06-08 Set de procedee de înlăturare a impurităţilor dintr-o instalaţie de producere a siliciului

Country Status (8)

Country Link
US (1) US7790129B2 (ro)
EP (1) EP1912720B1 (ro)
ES (1) ES2490596T3 (ro)
MD (1) MD20080027A (ro)
NO (1) NO20080549L (ro)
SM (1) SMAP200800014A (ro)
UA (1) UA96268C2 (ro)
WO (1) WO2007015721A2 (ro)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7736614B2 (en) * 2008-04-07 2010-06-15 Lord Ltd., Lp Process for removing aluminum and other metal chlorides from chlorosilanes
CN103787336B (zh) 2008-09-16 2016-09-14 储晞 生产高纯颗粒硅的方法
WO2010075467A1 (en) * 2008-12-23 2010-07-01 Mks Instruments, Inc. Reactive chemical containment system
US8603242B2 (en) * 2009-02-26 2013-12-10 Uri Cohen Floating semiconductor foils
US8501139B2 (en) * 2009-02-26 2013-08-06 Uri Cohen Floating Si and/or Ge foils
WO2010108065A1 (en) * 2009-03-19 2010-09-23 Ae Polysilicon Corporation Silicide - coated metal surfaces and methods of utilizing same
WO2010123873A1 (en) 2009-04-20 2010-10-28 Ae Polysilicon Corporation A reactor with silicide-coated metal surfaces
KR20120023678A (ko) * 2009-04-20 2012-03-13 에이이 폴리실리콘 코포레이션 고순도 폴리실리콘의 제조를 위한 방법 및 장치
WO2010123869A1 (en) * 2009-04-20 2010-10-28 Ae Polysilicon Corporation Methods and system for cooling a reaction effluent gas
KR20100117025A (ko) * 2009-04-23 2010-11-02 스미또모 가가꾸 가부시키가이샤 포토레지스트 패턴 형성 방법
US8029756B1 (en) 2010-03-30 2011-10-04 Peak Sun Sillcon Corporation Closed-loop silicon production
US20120148728A1 (en) * 2010-12-09 2012-06-14 Siliken Sa Methods and apparatus for the production of high purity silicon
JP6371738B2 (ja) * 2015-05-28 2018-08-08 株式会社東芝 成膜装置
CN108153821A (zh) * 2017-12-04 2018-06-12 北京小米移动软件有限公司 饰品推荐方法及装置
CN110787573A (zh) * 2019-10-24 2020-02-14 上海黔宝环保新材料有限公司 一种活性硅粉的生产方法
CN112892097B (zh) * 2021-01-30 2022-05-13 成都易态科技有限公司 混合气体的处理方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE632835A (ro) * 1962-06-04
US4213937A (en) 1976-09-22 1980-07-22 Texas Instruments Incorporated Silicon refinery
US4676967A (en) 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US4340574A (en) 1980-08-28 1982-07-20 Union Carbide Corporation Process for the production of ultrahigh purity silane with recycle from separation columns
US4526769A (en) 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
US4941893B1 (en) * 1989-09-19 1996-07-30 Advanced Silicon Materials Inc Gas separation by semi-permeable membranes
KR100263220B1 (ko) * 1996-10-14 2000-09-01 에모토 간지 다결정실리콘의 제조방법과 장치 및 태양전지용실리콘기판의 제조방법
US6368568B1 (en) * 2000-02-18 2002-04-09 Stephen M Lord Method for improving the efficiency of a silicon purification process
DE10057482A1 (de) 2000-11-20 2002-05-23 Solarworld Ag Verfahren zur Reinigung von Trichlorsilan
US6827786B2 (en) * 2000-12-26 2004-12-07 Stephen M Lord Machine for production of granular silicon
NO20033207D0 (no) * 2002-07-31 2003-07-15 Per Kristian Egeberg Fremgangsmåte og reaktor for fremstilling av höyrent silisium, samt anvendelse av fremgangsmåten og reaktoren ved fremstilling av höyrentsilisium fra uraffinert silisium

Also Published As

Publication number Publication date
SMAP200800014A (it) 2008-03-05
ES2490596T3 (es) 2014-09-04
WO2007015721A2 (en) 2007-02-08
WO2007015721A8 (en) 2008-02-21
WO2007015721A3 (en) 2009-02-26
NO20080549L (no) 2008-04-08
EP1912720A4 (en) 2010-12-08
US7790129B2 (en) 2010-09-07
EP1912720A2 (en) 2008-04-23
UA96268C2 (ru) 2011-10-25
EP1912720B1 (en) 2014-05-14
US20070098612A1 (en) 2007-05-03

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Legal Events

Date Code Title Description
FA9A Abandonment or withdrawal of application (patent for invention)