LU63678A1 - - Google Patents
Info
- Publication number
- LU63678A1 LU63678A1 LU63678DA LU63678A1 LU 63678 A1 LU63678 A1 LU 63678A1 LU 63678D A LU63678D A LU 63678DA LU 63678 A1 LU63678 A1 LU 63678A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702039382 DE2039382C3 (de) | 1970-08-07 | Verwendung eines CO2 Lasers | |
| DE2045386A DE2045386C3 (de) | 1970-08-07 | 1970-09-14 | Gerät zur Bestimmung des CO2 -Gehaltes einer biologischen Substanz |
| DE2058064A DE2058064C3 (de) | 1970-08-07 | 1970-11-25 | Interferometrisches Gerät zur Bestimmung der Zusammensetzung einer Substanz |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU63678A1 true LU63678A1 (de) | 1971-12-14 |
Family
ID=27182800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU63678D LU63678A1 (de) | 1970-08-07 | 1971-08-06 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3825347A (de) |
| BE (1) | BE771030A (de) |
| DE (2) | DE2045386C3 (de) |
| FR (1) | FR2104115A5 (de) |
| GB (1) | GB1365121A (de) |
| LU (1) | LU63678A1 (de) |
| NL (1) | NL7110896A (de) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2751365B2 (de) * | 1977-11-17 | 1979-12-06 | Diamant Test Gesellschaft Fuer Edelsteinpruefungen Mbh, 5000 Koeln | Vorrichtung zur Messung der Absorption einer Probe |
| US4183670A (en) * | 1977-11-30 | 1980-01-15 | Russell Robert B | Interferometer |
| US4509522A (en) * | 1981-12-15 | 1985-04-09 | The United States Of America As Represented By The Secretary Of The Navy | Infrared optical measurement of blood gas concentrations and fiber optic catheter |
| FR2531535B1 (fr) * | 1982-08-03 | 1985-08-30 | Onera (Off Nat Aerospatiale) | Procede et dispositif de dosage de faible teneur de composants gazeux |
| JPH0789083B2 (ja) * | 1984-04-27 | 1995-09-27 | 名古屋大学長 | 山形ミラーを用いた新ホモダイン法による非対称スペクトル分布測定装置 |
| US5168325A (en) * | 1990-02-28 | 1992-12-01 | Board Of Control Of Michigan Technological University | Interferometric measurement of glucose by refractive index determination |
| DE4320036C2 (de) * | 1993-06-17 | 1997-02-13 | Fraunhofer Ges Forschung | Verfahren und Anordnung zur Driftkorrektur zeitdiskreter Meßsignale bezogen auf ein Referenzsignal, insbesondere in der absorptionsspektroskopischen Spurengasanalytik |
| US8564780B2 (en) * | 2003-01-16 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces |
| US20080246951A1 (en) * | 2007-04-09 | 2008-10-09 | Phillip Walsh | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces |
| US7067818B2 (en) * | 2003-01-16 | 2006-06-27 | Metrosol, Inc. | Vacuum ultraviolet reflectometer system and method |
| US7126131B2 (en) * | 2003-01-16 | 2006-10-24 | Metrosol, Inc. | Broad band referencing reflectometer |
| US7394551B2 (en) * | 2003-01-16 | 2008-07-01 | Metrosol, Inc. | Vacuum ultraviolet referencing reflectometer |
| US7026626B2 (en) * | 2003-01-16 | 2006-04-11 | Metrosol, Inc. | Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer |
| CN1856702B (zh) * | 2003-09-23 | 2010-05-26 | 迈特罗索尔公司 | 真空紫外参考反射计及其应用方法 |
| US7804059B2 (en) * | 2004-08-11 | 2010-09-28 | Jordan Valley Semiconductors Ltd. | Method and apparatus for accurate calibration of VUV reflectometer |
| US7282703B2 (en) * | 2004-08-11 | 2007-10-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US7663097B2 (en) * | 2004-08-11 | 2010-02-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US7399975B2 (en) * | 2004-08-11 | 2008-07-15 | Metrosol, Inc. | Method and apparatus for performing highly accurate thin film measurements |
| US7511265B2 (en) * | 2004-08-11 | 2009-03-31 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US20080129986A1 (en) * | 2006-11-30 | 2008-06-05 | Phillip Walsh | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations |
| US20090219537A1 (en) | 2008-02-28 | 2009-09-03 | Phillip Walsh | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths |
| US8153987B2 (en) * | 2009-05-22 | 2012-04-10 | Jordan Valley Semiconductors Ltd. | Automated calibration methodology for VUV metrology system |
| US8867041B2 (en) | 2011-01-18 | 2014-10-21 | Jordan Valley Semiconductor Ltd | Optical vacuum ultra-violet wavelength nanoimprint metrology |
| US8565379B2 (en) | 2011-03-14 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Combining X-ray and VUV analysis of thin film layers |
| US9091523B2 (en) * | 2013-07-19 | 2015-07-28 | Quality Vision International, Inc. | Profilometer with partial coherence interferometer adapted for avoiding measurements straddling a null position |
| GB201603051D0 (en) * | 2016-02-23 | 2016-04-06 | Ge Healthcare Bio Sciences Ab | A method and a measuring device for measuring the absorbance of a substance in at least one solution |
| AT520258B1 (de) * | 2017-07-26 | 2022-02-15 | Univ Wien Tech | Verfahren zur spektroskopischen bzw. spektrometrischen Untersuchung einer Probe |
| US10794819B2 (en) * | 2018-10-05 | 2020-10-06 | Massachusetts Institute Of Technology | Wide field of view narrowband imaging filter technology |
| CN109975233B (zh) * | 2019-03-13 | 2020-06-19 | 浙江大学 | 一种基于激光衰减的不凝气层测量装置及方法 |
| EP3889580A1 (de) * | 2020-04-05 | 2021-10-06 | TGTW Group B.V. | System und verfahren zur messung von verunreinigungen in einem im wesentlichen lichtdurchlässigen material, wie etwa wasser |
-
1970
- 1970-09-14 DE DE2045386A patent/DE2045386C3/de not_active Expired
- 1970-11-25 DE DE2058064A patent/DE2058064C3/de not_active Expired
-
1971
- 1971-08-06 LU LU63678D patent/LU63678A1/xx unknown
- 1971-08-06 BE BE771030A patent/BE771030A/xx unknown
- 1971-08-06 NL NL7110896A patent/NL7110896A/xx unknown
- 1971-08-09 US US00170207A patent/US3825347A/en not_active Expired - Lifetime
- 1971-08-09 GB GB3733871A patent/GB1365121A/en not_active Expired
- 1971-08-09 FR FR7129056A patent/FR2104115A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2045386C3 (de) | 1980-04-03 |
| NL7110896A (de) | 1972-02-09 |
| DE2058064A1 (de) | 1972-05-31 |
| US3825347A (en) | 1974-07-23 |
| DE2039382B2 (de) | 1977-02-03 |
| GB1365121A (en) | 1974-08-29 |
| DE2058064C3 (de) | 1979-10-31 |
| FR2104115A5 (de) | 1972-04-14 |
| DE2045386B2 (de) | 1979-07-26 |
| DE2058064B2 (de) | 1979-03-08 |
| DE2045386A1 (de) | 1972-03-23 |
| BE771030A (fr) | 1971-12-16 |
| DE2039382A1 (de) | 1972-02-10 |