NL7110896A - - Google Patents

Info

Publication number
NL7110896A
NL7110896A NL7110896A NL7110896A NL7110896A NL 7110896 A NL7110896 A NL 7110896A NL 7110896 A NL7110896 A NL 7110896A NL 7110896 A NL7110896 A NL 7110896A NL 7110896 A NL7110896 A NL 7110896A
Authority
NL
Netherlands
Application number
NL7110896A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19702039382 external-priority patent/DE2039382C3/de
Application filed filed Critical
Publication of NL7110896A publication Critical patent/NL7110896A/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
NL7110896A 1970-08-07 1971-08-06 NL7110896A (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19702039382 DE2039382C3 (de) 1970-08-07 Verwendung eines CO2 Lasers
DE2045386A DE2045386C3 (de) 1970-08-07 1970-09-14 Gerät zur Bestimmung des CO2 -Gehaltes einer biologischen Substanz
DE2058064A DE2058064C3 (de) 1970-08-07 1970-11-25 Interferometrisches Gerät zur Bestimmung der Zusammensetzung einer Substanz

Publications (1)

Publication Number Publication Date
NL7110896A true NL7110896A (de) 1972-02-09

Family

ID=27182800

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7110896A NL7110896A (de) 1970-08-07 1971-08-06

Country Status (7)

Country Link
US (1) US3825347A (de)
BE (1) BE771030A (de)
DE (2) DE2045386C3 (de)
FR (1) FR2104115A5 (de)
GB (1) GB1365121A (de)
LU (1) LU63678A1 (de)
NL (1) NL7110896A (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2751365B2 (de) * 1977-11-17 1979-12-06 Diamant Test Gesellschaft Fuer Edelsteinpruefungen Mbh, 5000 Koeln Vorrichtung zur Messung der Absorption einer Probe
US4183670A (en) * 1977-11-30 1980-01-15 Russell Robert B Interferometer
US4509522A (en) * 1981-12-15 1985-04-09 The United States Of America As Represented By The Secretary Of The Navy Infrared optical measurement of blood gas concentrations and fiber optic catheter
FR2531535B1 (fr) * 1982-08-03 1985-08-30 Onera (Off Nat Aerospatiale) Procede et dispositif de dosage de faible teneur de composants gazeux
JPH0789083B2 (ja) * 1984-04-27 1995-09-27 名古屋大学長 山形ミラーを用いた新ホモダイン法による非対称スペクトル分布測定装置
US5168325A (en) * 1990-02-28 1992-12-01 Board Of Control Of Michigan Technological University Interferometric measurement of glucose by refractive index determination
DE4320036C2 (de) * 1993-06-17 1997-02-13 Fraunhofer Ges Forschung Verfahren und Anordnung zur Driftkorrektur zeitdiskreter Meßsignale bezogen auf ein Referenzsignal, insbesondere in der absorptionsspektroskopischen Spurengasanalytik
US20080246951A1 (en) * 2007-04-09 2008-10-09 Phillip Walsh Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
US7026626B2 (en) * 2003-01-16 2006-04-11 Metrosol, Inc. Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer
US8564780B2 (en) * 2003-01-16 2013-10-22 Jordan Valley Semiconductors Ltd. Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces
US7067818B2 (en) * 2003-01-16 2006-06-27 Metrosol, Inc. Vacuum ultraviolet reflectometer system and method
US7126131B2 (en) * 2003-01-16 2006-10-24 Metrosol, Inc. Broad band referencing reflectometer
US7394551B2 (en) * 2003-01-16 2008-07-01 Metrosol, Inc. Vacuum ultraviolet referencing reflectometer
CN101799326A (zh) * 2003-09-23 2010-08-11 乔丹谷半导体有限公司 真空紫外参考反射计
US7511265B2 (en) * 2004-08-11 2009-03-31 Metrosol, Inc. Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
US7399975B2 (en) * 2004-08-11 2008-07-15 Metrosol, Inc. Method and apparatus for performing highly accurate thin film measurements
US7804059B2 (en) * 2004-08-11 2010-09-28 Jordan Valley Semiconductors Ltd. Method and apparatus for accurate calibration of VUV reflectometer
US7282703B2 (en) * 2004-08-11 2007-10-16 Metrosol, Inc. Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
US7663097B2 (en) * 2004-08-11 2010-02-16 Metrosol, Inc. Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
US20080129986A1 (en) * 2006-11-30 2008-06-05 Phillip Walsh Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations
US20090219537A1 (en) 2008-02-28 2009-09-03 Phillip Walsh Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
US8153987B2 (en) * 2009-05-22 2012-04-10 Jordan Valley Semiconductors Ltd. Automated calibration methodology for VUV metrology system
US8867041B2 (en) 2011-01-18 2014-10-21 Jordan Valley Semiconductor Ltd Optical vacuum ultra-violet wavelength nanoimprint metrology
US8565379B2 (en) 2011-03-14 2013-10-22 Jordan Valley Semiconductors Ltd. Combining X-ray and VUV analysis of thin film layers
US9091523B2 (en) * 2013-07-19 2015-07-28 Quality Vision International, Inc. Profilometer with partial coherence interferometer adapted for avoiding measurements straddling a null position
GB201603051D0 (en) 2016-02-23 2016-04-06 Ge Healthcare Bio Sciences Ab A method and a measuring device for measuring the absorbance of a substance in at least one solution
AT520258B1 (de) * 2017-07-26 2022-02-15 Univ Wien Tech Verfahren zur spektroskopischen bzw. spektrometrischen Untersuchung einer Probe
US10794819B2 (en) * 2018-10-05 2020-10-06 Massachusetts Institute Of Technology Wide field of view narrowband imaging filter technology
CN109975233B (zh) * 2019-03-13 2020-06-19 浙江大学 一种基于激光衰减的不凝气层测量装置及方法
EP3889580A1 (de) * 2020-04-05 2021-10-06 TGTW Group B.V. System und verfahren zur messung von verunreinigungen in einem im wesentlichen lichtdurchlässigen material, wie etwa wasser

Also Published As

Publication number Publication date
DE2058064C3 (de) 1979-10-31
BE771030A (fr) 1971-12-16
DE2058064B2 (de) 1979-03-08
DE2045386A1 (de) 1972-03-23
DE2058064A1 (de) 1972-05-31
DE2039382B2 (de) 1977-02-03
GB1365121A (en) 1974-08-29
DE2039382A1 (de) 1972-02-10
DE2045386C3 (de) 1980-04-03
FR2104115A5 (de) 1972-04-14
DE2045386B2 (de) 1979-07-26
LU63678A1 (de) 1971-12-14
US3825347A (en) 1974-07-23

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