LT4805B - A gas - discharge transducer - Google Patents
A gas - discharge transducer Download PDFInfo
- Publication number
- LT4805B LT4805B LT1999088A LT99088A LT4805B LT 4805 B LT4805 B LT 4805B LT 1999088 A LT1999088 A LT 1999088A LT 99088 A LT99088 A LT 99088A LT 4805 B LT4805 B LT 4805B
- Authority
- LT
- Lithuania
- Prior art keywords
- gas
- porous silicon
- contacts
- concentration
- electrically conductive
- Prior art date
Links
Abstract
Description
Siūlomo išradimo tikslas - pažeminti darbo temperatūrą iki kambario temperatūros ir supaprastinti matavimus kambario (aplinkos) temperatūroje, panaudojant akyto silicio padėklą su vario sulfido dangomis.The object of the present invention is to lower the operating temperature to room temperature and to simplify measurements at room (ambient) temperature using a porous silicon substrate with copper sulfide coatings.
Tikslas pasiekiamas tuo, kad rezistyvinis dujų jutiklis susideda iš izoliuojančio akyto silicio padėklo su izoliuojančiu SiO2 sluoksniu, dujoms jautraus sluoksnio ir planarinių metalo (pavyzdžiui, vario ) kontaktų. Dujoms jautrus elementas yra akyto silicio padėklas su elektrai laidžiomis dangomis. Kaip elektrai laidžios dangos ant akyto silicio padėklo yra suformuoti vario sulfido sluoksniai. Matuojamas dujoms jautraus elemento elektrinio laidumo pastoviai srovei pokytis, indukuotas tiriamų aplinkos dujų. Čia panaudojama iki šiol nežinoma vario sulfido dangų ant akyto silicio savybė - jautris dujoms kambario temperatūroje.The objective is achieved by the fact that the resistive gas sensor consists of an insulating porous silicon substrate with an insulating SiO 2 layer, a gas-sensitive layer and planar metal (e.g. copper) contacts. The gas-sensitive element is a porous silicon pad with electrically conductive coatings. Copper sulphide layers are formed as an electrically conductive coating on a porous silicon substrate. The change in the electrical conductivity of the gas-sensitive element to the constant current induced by the ambient gas under investigation is measured. The hitherto unknown feature of copper sulphide coatings on porous silicon is the gas sensitivity at room temperature.
Išradimas iliustruojamas brėžiniu: fig.1 - principinė rezistyvinio dujų jutiklio struktūrinė schema.The invention is illustrated in the drawing: FIG.
Dujų jutiklis sudarytas iš akyto silicio su izoliuojančiu S1O2 sluoksniu padėklo 1, ant kurio suformuotos dujoms jautrios CuxS dangos 2, ir ant jų užlydyti planariniai metalo kontaktai 3.The gas sensor is made of porous silicon with an insulating layer S1O2 1, on which gas sensitive Cu x S coatings 2 are formed, and planar metal contacts 3 are fused thereto.
Dujų koncentracija nustatoma prie kontaktų pritvirtinus elektrinius įvadus ir išmatavus varžos pokytį.The gas concentration is determined by attaching electrical inlets to the contacts and measuring the change in resistance.
Siūlomas išradimas, palyginus jį su žinomu, pasižymi šiais privalumais:The present invention has the following advantages over the prior art:
- leidžia žymiai sumažinti dujų jutiklių darbo temperatūrą (200500°C iki kambario temperatūros),- allows a significant reduction in the operating temperature of the gas sensors (200500 ° C to room temperature),
- paprastas (nesudėtingas) elektrai laidžių vario sulfidų dangų gavimo būdas,- simple (uncomplicated) method of obtaining electrically conductive copper sulphide coatings,
- naudojamos medžiagos yra nedeficitinės ir pigios.- the materials used are non-specific and cheap.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LT1999088A LT4805B (en) | 1999-07-20 | 1999-07-20 | A gas - discharge transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LT1999088A LT4805B (en) | 1999-07-20 | 1999-07-20 | A gas - discharge transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
LT99088A LT99088A (en) | 2001-01-25 |
LT4805B true LT4805B (en) | 2001-06-25 |
Family
ID=19722101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
LT1999088A LT4805B (en) | 1999-07-20 | 1999-07-20 | A gas - discharge transducer |
Country Status (1)
Country | Link |
---|---|
LT (1) | LT4805B (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2166247A (en) | 1984-10-25 | 1986-04-30 | Atomic Energy Authority Uk | Gas sensors |
US4887455A (en) | 1987-04-06 | 1989-12-19 | Cogent Limited | Gas sensor |
-
1999
- 1999-07-20 LT LT1999088A patent/LT4805B/en not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2166247A (en) | 1984-10-25 | 1986-04-30 | Atomic Energy Authority Uk | Gas sensors |
US4887455A (en) | 1987-04-06 | 1989-12-19 | Cogent Limited | Gas sensor |
Also Published As
Publication number | Publication date |
---|---|
LT99088A (en) | 2001-01-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1153284A1 (en) | Absolute humidity sensor | |
JPH0517650Y2 (en) | ||
WO2004095013A1 (en) | A thin semiconductor film gas sensor device | |
US7918123B2 (en) | Gas sensor | |
JPH04216452A (en) | Sensor for simultaneously detecting composition of mixed gas and speed of gas | |
US20090134026A1 (en) | Gas sensor and method for the production thereof | |
CA1286360C (en) | Heated solid electrolyte oxygen sensor having unique heater element | |
LT4805B (en) | A gas - discharge transducer | |
KR20190005607A (en) | Calibration method for micro gas sensor | |
US8324913B2 (en) | Moisture sensor and method for measuring moisture of a gas-phase medium | |
JP2004325142A (en) | Gas sensor | |
US3522732A (en) | Sensing element for hygrometers | |
JP2015507739A (en) | Infrared light sensor chip having high measurement accuracy, and method for manufacturing the infrared light sensor chip | |
US6796166B1 (en) | All polymer humidity sensor based on laser carbonized polyimide substrate | |
US6145371A (en) | Gas sensor | |
LT4584B (en) | A gas sensor | |
RU2242752C1 (en) | Moisture sensor | |
EP1160567A2 (en) | Sensor and method for measuring gas concentrations | |
RU1805367C (en) | Dew-point hygrometer | |
EP0936461A2 (en) | Gas sensor | |
JP2000131258A (en) | Fouling detecting sensor | |
RU22557U1 (en) | SENSOR FOR MEASURING CARBON OXIDE CONCENTRATION | |
EP0701123A1 (en) | Formaldehyde vapour detector | |
JPH04235338A (en) | Humidity sensor | |
Peres et al. | Evaluation of the Electrical Resistance Response of Insulating Glass Surface to Sense and Classify Humidity and VOCs Vapors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM9A | Lapsed patents |
Effective date: 20010720 |