LT4805B - A gas - discharge transducer - Google Patents

A gas - discharge transducer Download PDF

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Publication number
LT4805B
LT4805B LT1999088A LT99088A LT4805B LT 4805 B LT4805 B LT 4805B LT 1999088 A LT1999088 A LT 1999088A LT 99088 A LT99088 A LT 99088A LT 4805 B LT4805 B LT 4805B
Authority
LT
Lithuania
Prior art keywords
gas
porous silicon
contacts
concentration
electrically conductive
Prior art date
Application number
LT1999088A
Other languages
Lithuanian (lt)
Other versions
LT99088A (en
Inventor
Ingrida Ancutienė
Vitalijus Janickis
Algirdas Jonas Galdikas
Audružis Mironas
Arūnas Šetkus
Viktorija Strazdienė
Irena Šimkienė
Original Assignee
Kauno technologijos universitetas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kauno technologijos universitetas filed Critical Kauno technologijos universitetas
Priority to LT1999088A priority Critical patent/LT4805B/en
Publication of LT99088A publication Critical patent/LT99088A/en
Publication of LT4805B publication Critical patent/LT4805B/en

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Abstract

Invention belongs to the gas detectors and may be used for the determining of the concentration of certain gases in the environment. Gas sensor consists of porous silicon pallet (1) with the isolating layer of SiO2, upon which the gas-sensitive cover of CuXS (2) is formed with reverberated planar metal contacts (3). Gas concentration is determined by adjusting the electric inlets to contacts and measuring the changes of resistance.

Description

Siūlomo išradimo tikslas - pažeminti darbo temperatūrą iki kambario temperatūros ir supaprastinti matavimus kambario (aplinkos) temperatūroje, panaudojant akyto silicio padėklą su vario sulfido dangomis.The object of the present invention is to lower the operating temperature to room temperature and to simplify measurements at room (ambient) temperature using a porous silicon substrate with copper sulfide coatings.

Tikslas pasiekiamas tuo, kad rezistyvinis dujų jutiklis susideda iš izoliuojančio akyto silicio padėklo su izoliuojančiu SiO2 sluoksniu, dujoms jautraus sluoksnio ir planarinių metalo (pavyzdžiui, vario ) kontaktų. Dujoms jautrus elementas yra akyto silicio padėklas su elektrai laidžiomis dangomis. Kaip elektrai laidžios dangos ant akyto silicio padėklo yra suformuoti vario sulfido sluoksniai. Matuojamas dujoms jautraus elemento elektrinio laidumo pastoviai srovei pokytis, indukuotas tiriamų aplinkos dujų. Čia panaudojama iki šiol nežinoma vario sulfido dangų ant akyto silicio savybė - jautris dujoms kambario temperatūroje.The objective is achieved by the fact that the resistive gas sensor consists of an insulating porous silicon substrate with an insulating SiO 2 layer, a gas-sensitive layer and planar metal (e.g. copper) contacts. The gas-sensitive element is a porous silicon pad with electrically conductive coatings. Copper sulphide layers are formed as an electrically conductive coating on a porous silicon substrate. The change in the electrical conductivity of the gas-sensitive element to the constant current induced by the ambient gas under investigation is measured. The hitherto unknown feature of copper sulphide coatings on porous silicon is the gas sensitivity at room temperature.

Išradimas iliustruojamas brėžiniu: fig.1 - principinė rezistyvinio dujų jutiklio struktūrinė schema.The invention is illustrated in the drawing: FIG.

Dujų jutiklis sudarytas iš akyto silicio su izoliuojančiu S1O2 sluoksniu padėklo 1, ant kurio suformuotos dujoms jautrios CuxS dangos 2, ir ant jų užlydyti planariniai metalo kontaktai 3.The gas sensor is made of porous silicon with an insulating layer S1O2 1, on which gas sensitive Cu x S coatings 2 are formed, and planar metal contacts 3 are fused thereto.

Dujų koncentracija nustatoma prie kontaktų pritvirtinus elektrinius įvadus ir išmatavus varžos pokytį.The gas concentration is determined by attaching electrical inlets to the contacts and measuring the change in resistance.

Siūlomas išradimas, palyginus jį su žinomu, pasižymi šiais privalumais:The present invention has the following advantages over the prior art:

- leidžia žymiai sumažinti dujų jutiklių darbo temperatūrą (200500°C iki kambario temperatūros),- allows a significant reduction in the operating temperature of the gas sensors (200500 ° C to room temperature),

- paprastas (nesudėtingas) elektrai laidžių vario sulfidų dangų gavimo būdas,- simple (uncomplicated) method of obtaining electrically conductive copper sulphide coatings,

- naudojamos medžiagos yra nedeficitinės ir pigios.- the materials used are non-specific and cheap.

Claims (2)

IŠRADIMO APIBRĖŽTISDEFINITION OF INVENTION 1. Dujų jutiklis, susidedantis iš izoliuojančio padėklo, dujoms jautraus sluoksnio ir kontaktų, besiskiriantis tuo, kad dujoms jautrus elementas yra akyto silicio su izoliuojančiu S1O2 sluoksniu padėklas su elektrai laidžiomis dangomis.1. A gas sensor consisting of an insulating substrate, a gas-sensitive layer and a contact, characterized in that the gas-sensitive element is a porous silicon with an insulating layer S1O2 with an electrically conductive coating. 2. Dujų jutiklis pagal 1 punktą, besiskiriantis tuo, kad kaip elektrai laidžios dangos ant akyto silicio yra suformuoti vario sulfido sluoksniai.2. A gas sensor according to claim 1, characterized in that copper sulphide layers are formed on the porous silicon as an electrically conductive coating.
LT1999088A 1999-07-20 1999-07-20 A gas - discharge transducer LT4805B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
LT1999088A LT4805B (en) 1999-07-20 1999-07-20 A gas - discharge transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT1999088A LT4805B (en) 1999-07-20 1999-07-20 A gas - discharge transducer

Publications (2)

Publication Number Publication Date
LT99088A LT99088A (en) 2001-01-25
LT4805B true LT4805B (en) 2001-06-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
LT1999088A LT4805B (en) 1999-07-20 1999-07-20 A gas - discharge transducer

Country Status (1)

Country Link
LT (1) LT4805B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166247A (en) 1984-10-25 1986-04-30 Atomic Energy Authority Uk Gas sensors
US4887455A (en) 1987-04-06 1989-12-19 Cogent Limited Gas sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166247A (en) 1984-10-25 1986-04-30 Atomic Energy Authority Uk Gas sensors
US4887455A (en) 1987-04-06 1989-12-19 Cogent Limited Gas sensor

Also Published As

Publication number Publication date
LT99088A (en) 2001-01-25

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