LT4380903T - Būdas ir įrenginys ruošinio lazeriniam apdorojimui - Google Patents

Būdas ir įrenginys ruošinio lazeriniam apdorojimui

Info

Publication number
LT4380903T
LT4380903T LTEPPCT/EP2022/071799T LTEP2022071799T LT4380903T LT 4380903 T LT4380903 T LT 4380903T LT EP2022071799 T LTEP2022071799 T LT EP2022071799T LT 4380903 T LT4380903 T LT 4380903T
Authority
LT
Lithuania
Prior art keywords
workpiece
laser processing
laser
processing
Prior art date
Application number
LTEPPCT/EP2022/071799T
Other languages
English (en)
Inventor
Daniel FLAMM
Myriam Kaiser
Jonas Kleiner
Original Assignee
TRUMPF Laser- und Systemtechnik SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRUMPF Laser- und Systemtechnik SE filed Critical TRUMPF Laser- und Systemtechnik SE
Publication of LT4380903T publication Critical patent/LT4380903T/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B23K26/0617—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis and with spots spaced along the common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
LTEPPCT/EP2022/071799T 2021-08-04 2022-08-03 Būdas ir įrenginys ruošinio lazeriniam apdorojimui LT4380903T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021120286.8A DE102021120286A1 (de) 2021-08-04 2021-08-04 Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
PCT/EP2022/071799 WO2023012210A1 (de) 2021-08-04 2022-08-03 Verfahren und vorrichtung zur laserbearbeitung eines werkstücks

Publications (1)

Publication Number Publication Date
LT4380903T true LT4380903T (lt) 2025-09-10

Family

ID=83149156

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEPPCT/EP2022/071799T LT4380903T (lt) 2021-08-04 2022-08-03 Būdas ir įrenginys ruošinio lazeriniam apdorojimui

Country Status (8)

Country Link
US (1) US12251776B2 (lt)
EP (1) EP4380903B1 (lt)
KR (1) KR102881195B1 (lt)
CN (1) CN117794874A (lt)
DE (1) DE102021120286A1 (lt)
LT (1) LT4380903T (lt)
PL (1) PL4380903T3 (lt)
WO (1) WO2023012210A1 (lt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021120286A1 (de) 2021-08-04 2023-02-09 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
JP2024041253A (ja) * 2022-09-14 2024-03-27 株式会社ディスコ ウエーハの加工方法及び加工装置
JP2024051279A (ja) * 2022-09-30 2024-04-11 株式会社ディスコ ウエーハの加工方法及び加工装置
JP2024067757A (ja) * 2022-11-07 2024-05-17 株式会社ディスコ ウエーハの加工方法
DE102022130022A1 (de) * 2022-11-14 2024-05-16 Trumpf Laser Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
KR20240085168A (ko) * 2022-12-07 2024-06-14 가부시기가이샤 디스코 가공 장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4201506B2 (ja) * 2002-01-24 2008-12-24 オムロンレーザーフロント株式会社 レーザ加工方法並びに加工機
KR100858983B1 (ko) * 2005-11-16 2008-09-17 가부시키가이샤 덴소 반도체 장치 및 반도체 기판 다이싱 방법
KR101582632B1 (ko) * 2012-08-07 2016-01-05 한국기계연구원 프레넬 영역 소자를 이용한 기판 절단 방법
US9919380B2 (en) 2013-02-23 2018-03-20 Coherent, Inc. Shaping of brittle materials with controlled surface and bulk properties
CN104646834A (zh) * 2013-11-18 2015-05-27 北京科涵龙顺激光设备有限公司 激光划片的方法及系统
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
WO2016077171A2 (en) * 2014-11-10 2016-05-19 Corning Incorporated Laser processing of transparent article using multiple foci
DE102014116958B9 (de) 2014-11-19 2017-10-05 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung eines Laserstrahls, Laserbearbeitungsanlage, Verfahren zur Materialbearbeitung und Verwenden einer gemeinsamen langgezogenen Fokuszone zur Lasermaterialbearbeitung
DE102014116957A1 (de) * 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung
LT6428B (lt) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
JP2020004889A (ja) 2018-06-29 2020-01-09 三星ダイヤモンド工業株式会社 基板の分断方法及び分断装置
CN114364484A (zh) * 2019-07-01 2022-04-15 康宁股份有限公司 使用弯曲准非衍射激光射束来激光加工透明工件的方法
DE102019121827A1 (de) 2019-08-13 2021-02-18 Trumpf Laser- Und Systemtechnik Gmbh Laserätzen mit variierender Ätzselektivität
DE102019217577A1 (de) 2019-11-14 2021-05-20 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zur Laserbearbeitung eines Werkstücks, Bearbeitungsoptik und Laserbearbeitungsvorrichtung
DE102020207715A1 (de) 2020-06-22 2021-12-23 Trumpf Laser- Und Systemtechnik Gmbh Bearbeitungsoptik, Laserbearbeitungsvorrichtung und Verfahren zur Laserbearbeitung
WO2023009331A1 (en) * 2021-07-28 2023-02-02 Corning Incorporated Phase modified quasi-non-diffracting laser beams for simultaneous high angle laser processing of transparent workpieces
DE102021120286A1 (de) 2021-08-04 2023-02-09 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks

Also Published As

Publication number Publication date
US12251776B2 (en) 2025-03-18
EP4380903B1 (de) 2025-07-16
EP4380903A1 (de) 2024-06-12
DE102021120286A1 (de) 2023-02-09
WO2023012210A1 (de) 2023-02-09
PL4380903T3 (pl) 2025-11-12
KR102881195B1 (ko) 2025-11-04
KR20240033303A (ko) 2024-03-12
CN117794874A (zh) 2024-03-29
US20240165737A1 (en) 2024-05-23

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