LT2013108A - Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus - Google Patents

Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus

Info

Publication number
LT2013108A
LT2013108A LT2013108A LT2013108A LT2013108A LT 2013108 A LT2013108 A LT 2013108A LT 2013108 A LT2013108 A LT 2013108A LT 2013108 A LT2013108 A LT 2013108A LT 2013108 A LT2013108 A LT 2013108A
Authority
LT
Lithuania
Prior art keywords
etching
sample
optical substrates
cleaning
soaking
Prior art date
Application number
LT2013108A
Other languages
English (en)
Inventor
Buzelis
Juškevičius
Kičas
Tolenis
Original Assignee
Uab "Optida"
Valstybinis mokslinių tyrimų institutas FIZINIŲ IR TECHNOLOGIJOS MOKSLŲ CENTRAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uab "Optida", Valstybinis mokslinių tyrimų institutas FIZINIŲ IR TECHNOLOGIJOS MOKSLŲ CENTRAS filed Critical Uab "Optida"
Priority to LT2013108A priority Critical patent/LT2013108A/lt
Priority to PCT/IB2013/059275 priority patent/WO2015052556A1/en
Publication of LT2013108A publication Critical patent/LT2013108A/lt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Šis išradimas aprašo paprastą ir greitą optinių padėklų paviršių lazerinės pažaidos slenksčio padidinimo, panaikinant poliruotą sluoksnį ir išvalant poliravimo suspensiją iš mikrotrūkių, būdą. Minėtasis būdas susideda iš šių žingsnių: poliruoto optinio stiklo bandinio (5) paruošimo nuvalant jį ultragarsinėje vonelėje, kurioje pageidautina kaip valomoji medžiaga yra naudojamas kalio hidroksidas; nuvalyto bandinio (5) patalpinimo bei mirkymo ėsdinančiame fluoro vandenilio ir azoto rūgščių mišinyje (6); hermetiško neėsdinamų bandinio paviršių apsaugojimo nuo ėsdinančios aplinkos; bandinio mirkymo ėsdinančiame tirpale atitinkamą laiko intervalą; bandinio išėmimo ir skalavimo naudojant tinkamą valymo skystį. Ėsdinimo procedūros metu yra kontroliuojama ėsdinančios aplinkos temperatūra ir drėgmė. Bandinys ėsdinimo procedūros metu yra patalpinamas ėsdinančioje aplinkoje tokiu būdu, kad ėsdinamasis paviršius būtų kuo tiksliau išlaikomas horizontalioje padėtyje.
LT2013108A 2013-10-07 2013-10-07 Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus LT2013108A (lt)

Priority Applications (2)

Application Number Priority Date Filing Date Title
LT2013108A LT2013108A (lt) 2013-10-07 2013-10-07 Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus
PCT/IB2013/059275 WO2015052556A1 (en) 2013-10-07 2013-10-10 Method for increasing laser induced damage threshold by etching of optical substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2013108A LT2013108A (lt) 2013-10-07 2013-10-07 Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus

Publications (1)

Publication Number Publication Date
LT2013108A true LT2013108A (lt) 2015-04-27

Family

ID=49880859

Family Applications (1)

Application Number Title Priority Date Filing Date
LT2013108A LT2013108A (lt) 2013-10-07 2013-10-07 Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus

Country Status (2)

Country Link
LT (1) LT2013108A (lt)
WO (1) WO2015052556A1 (lt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105481259B (zh) * 2015-12-08 2019-04-12 中国工程物理研究院激光聚变研究中心 提升熔石英光学元件损伤阈值的后处理方法
FR3056578B1 (fr) 2016-09-23 2018-12-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede pour ameliorer la tenue au flux laser d'un composant optique.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099389A (en) 1998-10-05 2000-08-08 The United States Of America As Represented By The United States Department Of Energy Fabrication of an optical component
US6402851B1 (en) * 2000-05-19 2002-06-11 International Business Machines Corporation Lanthanide oxide dissolution from glass surface
US8313662B2 (en) * 2009-10-01 2012-11-20 Lawrence Livermore National Security, Llc Methods for globally treating silica optics to reduce optical damage
JP5251861B2 (ja) * 2009-12-28 2013-07-31 信越化学工業株式会社 合成石英ガラス基板の製造方法

Also Published As

Publication number Publication date
WO2015052556A1 (en) 2015-04-16

Similar Documents

Publication Publication Date Title
AU2011323891B2 (en) Enhanced strengthening of glass
US10189743B2 (en) Enhanced strengthening of glass
WO2011041188A3 (en) Methods for globally treating silica optics to reduce optical damage
WO2010132371A3 (en) Multi-stage substrate cleaning method and apparatus
ATE524824T1 (de) Verfahren zur wiederherstellung der ätzrate und der ätzeinheitlichkeit bei siliziumelektrodenanordnungen
JP2011105598A5 (ja) 携帯端末装置のカバーガラス用のガラス基材およびその製造方法
TW200636836A (en) Silicon electrode assembly surface decontamination by acidic solution
DE112015000568A5 (de) Verfahren zur Erzeugung von Texturen oder von Polituren auf der Oberfläche von monokristallinen Siliciumwafern
EP2580303A4 (en) AQUEOUS ALKALI DETERGENT AND CLEANING COMPOSITION AND METHOD FOR TREATING THE SURFACE OF SILICON SUBSTRATES
CN103449731A (zh) 一种提升熔石英光学元件损伤阈值的方法
DE602006021063D1 (de) Verfahren zur verbesserung der glashaftung
WO2013181117A3 (en) Removal of stressor layer from a spalled layer and method of making a bifacial solar cell using the same
CN103357623A (zh) 一种实验室玻璃器皿清洗方法
WO2012165861A3 (en) Substrate processing system and substrate processing method using the same
ATE469199T1 (de) Verfahren zur charakterisierung von defekten auf silizium-oberflächen, ätzlösung für silizium- oberflächen und verfahren zur behandlung von silizium-oberflächen mit der ätzlösung
LT2013108A (lt) Būdas padidinti lazeriu indukuotos pažaidos slenkstį ėsdinant optinius padėklus
TW201612131A (en) Manufacturing method of glass substrate and manufacturing apparatus of glass substrate
TW201612967A (en) Polishing method and polishing apparatus
WO2012021025A3 (ko) 결정성 실리콘 웨이퍼의 텍스쳐 에칭액 조성물 및 텍스쳐 에칭 방법 (2)
SG181424A1 (en) Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber
MY173574A (en) Method for manufacturing glass substrate and method for manufacturing magnetic disk
WO2014158320A8 (en) Wet cleaning of chamber component
MY147281A (en) An apparatus for washing a workpiece
MX2017009002A (es) Metodo para obtener o mantener la transmitancia optica en liquido desaireado.
RU2009124736A (ru) Способ обработки подложек в жидкостном травителе

Legal Events

Date Code Title Description
BB1A Patent application published

Effective date: 20150427

FD9A Withdrawn applications

Effective date: 20160218