KR980005349U - 반도체 현상장비의 버블제거장치 - Google Patents

반도체 현상장비의 버블제거장치

Info

Publication number
KR980005349U
KR980005349U KR2019960014975U KR19960014975U KR980005349U KR 980005349 U KR980005349 U KR 980005349U KR 2019960014975 U KR2019960014975 U KR 2019960014975U KR 19960014975 U KR19960014975 U KR 19960014975U KR 980005349 U KR980005349 U KR 980005349U
Authority
KR
South Korea
Prior art keywords
removal device
bubble removal
developing equipment
semiconductor developing
semiconductor
Prior art date
Application number
KR2019960014975U
Other languages
English (en)
Other versions
KR200141180Y1 (ko
Inventor
손명헌
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960014975U priority Critical patent/KR200141180Y1/ko
Publication of KR980005349U publication Critical patent/KR980005349U/ko
Application granted granted Critical
Publication of KR200141180Y1 publication Critical patent/KR200141180Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019960014975U 1996-06-05 1996-06-05 반도체 현상장비의 버블제거장치 KR200141180Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960014975U KR200141180Y1 (ko) 1996-06-05 1996-06-05 반도체 현상장비의 버블제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960014975U KR200141180Y1 (ko) 1996-06-05 1996-06-05 반도체 현상장비의 버블제거장치

Publications (2)

Publication Number Publication Date
KR980005349U true KR980005349U (ko) 1998-03-30
KR200141180Y1 KR200141180Y1 (ko) 1999-04-15

Family

ID=19458008

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960014975U KR200141180Y1 (ko) 1996-06-05 1996-06-05 반도체 현상장비의 버블제거장치

Country Status (1)

Country Link
KR (1) KR200141180Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000050363A (ko) * 1999-01-07 2000-08-05 윤종용 현상액 공급 시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000050363A (ko) * 1999-01-07 2000-08-05 윤종용 현상액 공급 시스템

Also Published As

Publication number Publication date
KR200141180Y1 (ko) 1999-04-15

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20051118

Year of fee payment: 8

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