KR970077364A - Semiconductor device manufacturing method - Google Patents
Semiconductor device manufacturing method Download PDFInfo
- Publication number
- KR970077364A KR970077364A KR1019960017609A KR19960017609A KR970077364A KR 970077364 A KR970077364 A KR 970077364A KR 1019960017609 A KR1019960017609 A KR 1019960017609A KR 19960017609 A KR19960017609 A KR 19960017609A KR 970077364 A KR970077364 A KR 970077364A
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- KR
- South Korea
- Prior art keywords
- semiconductor device
- device manufacturing
- gate electrode
- forming
- spacer
- Prior art date
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- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
본 발명은 게이트 전극의 측벽에 형성된 스페이서막을 이용하지 않고 LDD 구조의 소오스 및 드레인 영역을 형성하므로써, 스페이서층의 공정 과정을 생략할 수 있고, 스페이서 형성 과정에서 발생되는 파티클을 감소시킬 수 있으며, 핫 캐리어 영향을 감소시킬 수 있는 반도체 소자 제조 방법이 개시된다.In the present invention, the source and drain regions of the LDD structure are formed without using the spacer film formed on the sidewall of the gate electrode, the process of the spacer layer can be omitted, particles generated during the spacer formation process can be reduced, A semiconductor device manufacturing method capable of reducing a carrier effect is disclosed.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2a도 내지 제2d도는 본 발명에 따른 반도체 소자 제조 방법을 설명하기 위한 단면도.FIGS. 2a to 2d are cross-sectional views for explaining a method of manufacturing a semiconductor device according to the present invention;
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017609A KR970077364A (en) | 1996-05-23 | 1996-05-23 | Semiconductor device manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017609A KR970077364A (en) | 1996-05-23 | 1996-05-23 | Semiconductor device manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970077364A true KR970077364A (en) | 1997-12-12 |
Family
ID=66219819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960017609A KR970077364A (en) | 1996-05-23 | 1996-05-23 | Semiconductor device manufacturing method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970077364A (en) |
-
1996
- 1996-05-23 KR KR1019960017609A patent/KR970077364A/en not_active Application Discontinuation
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