KR970077096A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor device Download PDFInfo
- Publication number
- KR970077096A KR970077096A KR1019960014208A KR19960014208A KR970077096A KR 970077096 A KR970077096 A KR 970077096A KR 1019960014208 A KR1019960014208 A KR 1019960014208A KR 19960014208 A KR19960014208 A KR 19960014208A KR 970077096 A KR970077096 A KR 970077096A
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist layer
- semiconductor device
- metal layer
- manufacturing
- manufacturing semiconductor
- Prior art date
Links
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 반도체 소자의 제조방법을 제공하는 것으로, 금속층 패터닝시 감광막을 반사방지막으로 사용하여 낮은 반사도에 의한 노치효과를 최소할 수 있음은 물론 패터닝 하고자 하는 금속층상에 감광막의 형성 및 제거가 용이하여 재작업을 할 수 있는 효과가 있다.The present invention provides a method of manufacturing a semiconductor device, which uses a photoresist film as an antireflection film when patterning a metal layer, minimizes the notch effect due to low reflectivity, facilitates formation and removal of a photoresist film on a metal layer to be patterned There is an effect that rework can be done.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2A 내지 제2D도는 본 발명에 따른 반도체 소자의 제조방법을 설명하기 위한 소자의 단면도.2A to 2D are sectional views of a device for explaining a method of manufacturing a semiconductor device according to the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960014208A KR970077096A (en) | 1996-05-02 | 1996-05-02 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960014208A KR970077096A (en) | 1996-05-02 | 1996-05-02 | Method of manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970077096A true KR970077096A (en) | 1997-12-12 |
Family
ID=66217130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960014208A KR970077096A (en) | 1996-05-02 | 1996-05-02 | Method of manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970077096A (en) |
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1996
- 1996-05-02 KR KR1019960014208A patent/KR970077096A/en not_active Application Discontinuation
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