KR970064168U - Semiconductor Low Pressure Chemical Vapor Deposition Equipment - Google Patents

Semiconductor Low Pressure Chemical Vapor Deposition Equipment

Info

Publication number
KR970064168U
KR970064168U KR2019960012913U KR19960012913U KR970064168U KR 970064168 U KR970064168 U KR 970064168U KR 2019960012913 U KR2019960012913 U KR 2019960012913U KR 19960012913 U KR19960012913 U KR 19960012913U KR 970064168 U KR970064168 U KR 970064168U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition equipment
Prior art date
Application number
KR2019960012913U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960012913U priority Critical patent/KR970064168U/en
Publication of KR970064168U publication Critical patent/KR970064168U/en

Links

KR2019960012913U 1996-05-22 1996-05-22 Semiconductor Low Pressure Chemical Vapor Deposition Equipment KR970064168U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960012913U KR970064168U (en) 1996-05-22 1996-05-22 Semiconductor Low Pressure Chemical Vapor Deposition Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960012913U KR970064168U (en) 1996-05-22 1996-05-22 Semiconductor Low Pressure Chemical Vapor Deposition Equipment

Publications (1)

Publication Number Publication Date
KR970064168U true KR970064168U (en) 1997-12-11

Family

ID=60930498

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960012913U KR970064168U (en) 1996-05-22 1996-05-22 Semiconductor Low Pressure Chemical Vapor Deposition Equipment

Country Status (1)

Country Link
KR (1) KR970064168U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application