KR970056053U - Horizontal Low Pressure Chemical Vapor Deposition System - Google Patents

Horizontal Low Pressure Chemical Vapor Deposition System

Info

Publication number
KR970056053U
KR970056053U KR2019960005695U KR19960005695U KR970056053U KR 970056053 U KR970056053 U KR 970056053U KR 2019960005695 U KR2019960005695 U KR 2019960005695U KR 19960005695 U KR19960005695 U KR 19960005695U KR 970056053 U KR970056053 U KR 970056053U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition system
Prior art date
Application number
KR2019960005695U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960005695U priority Critical patent/KR970056053U/en
Publication of KR970056053U publication Critical patent/KR970056053U/en

Links

KR2019960005695U 1996-03-23 1996-03-23 Horizontal Low Pressure Chemical Vapor Deposition System KR970056053U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005695U KR970056053U (en) 1996-03-23 1996-03-23 Horizontal Low Pressure Chemical Vapor Deposition System

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005695U KR970056053U (en) 1996-03-23 1996-03-23 Horizontal Low Pressure Chemical Vapor Deposition System

Publications (1)

Publication Number Publication Date
KR970056053U true KR970056053U (en) 1997-10-13

Family

ID=60932240

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005695U KR970056053U (en) 1996-03-23 1996-03-23 Horizontal Low Pressure Chemical Vapor Deposition System

Country Status (1)

Country Link
KR (1) KR970056053U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100982982B1 (en) * 2008-01-29 2010-09-20 삼성엘이디 주식회사 Chemical vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100982982B1 (en) * 2008-01-29 2010-09-20 삼성엘이디 주식회사 Chemical vapor deposition apparatus

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application