KR970056053U - Horizontal Low Pressure Chemical Vapor Deposition System - Google Patents
Horizontal Low Pressure Chemical Vapor Deposition SystemInfo
- Publication number
- KR970056053U KR970056053U KR2019960005695U KR19960005695U KR970056053U KR 970056053 U KR970056053 U KR 970056053U KR 2019960005695 U KR2019960005695 U KR 2019960005695U KR 19960005695 U KR19960005695 U KR 19960005695U KR 970056053 U KR970056053 U KR 970056053U
- Authority
- KR
- South Korea
- Prior art keywords
- vapor deposition
- low pressure
- chemical vapor
- pressure chemical
- deposition system
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960005695U KR970056053U (en) | 1996-03-23 | 1996-03-23 | Horizontal Low Pressure Chemical Vapor Deposition System |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960005695U KR970056053U (en) | 1996-03-23 | 1996-03-23 | Horizontal Low Pressure Chemical Vapor Deposition System |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970056053U true KR970056053U (en) | 1997-10-13 |
Family
ID=60932240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960005695U KR970056053U (en) | 1996-03-23 | 1996-03-23 | Horizontal Low Pressure Chemical Vapor Deposition System |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970056053U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100982982B1 (en) * | 2008-01-29 | 2010-09-20 | 삼성엘이디 주식회사 | Chemical vapor deposition apparatus |
-
1996
- 1996-03-23 KR KR2019960005695U patent/KR970056053U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100982982B1 (en) * | 2008-01-29 | 2010-09-20 | 삼성엘이디 주식회사 | Chemical vapor deposition apparatus |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |