KR950021369U - Low Pressure Chemical Vapor Deposition Equipment - Google Patents

Low Pressure Chemical Vapor Deposition Equipment

Info

Publication number
KR950021369U
KR950021369U KR2019930030462U KR930030462U KR950021369U KR 950021369 U KR950021369 U KR 950021369U KR 2019930030462 U KR2019930030462 U KR 2019930030462U KR 930030462 U KR930030462 U KR 930030462U KR 950021369 U KR950021369 U KR 950021369U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition equipment
Prior art date
Application number
KR2019930030462U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930030462U priority Critical patent/KR950021369U/en
Publication of KR950021369U publication Critical patent/KR950021369U/en

Links

KR2019930030462U 1993-12-29 1993-12-29 Low Pressure Chemical Vapor Deposition Equipment KR950021369U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930030462U KR950021369U (en) 1993-12-29 1993-12-29 Low Pressure Chemical Vapor Deposition Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930030462U KR950021369U (en) 1993-12-29 1993-12-29 Low Pressure Chemical Vapor Deposition Equipment

Publications (1)

Publication Number Publication Date
KR950021369U true KR950021369U (en) 1995-07-28

Family

ID=60919445

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930030462U KR950021369U (en) 1993-12-29 1993-12-29 Low Pressure Chemical Vapor Deposition Equipment

Country Status (1)

Country Link
KR (1) KR950021369U (en)

Similar Documents

Publication Publication Date Title
GB2282825B (en) Chemical vapor deposition apparatus
KR950021368U (en) Low Pressure Chemical Vapor Deposition Equipment
KR950021369U (en) Low Pressure Chemical Vapor Deposition Equipment
KR940023545U (en) Low Pressure Chemical Vapor Deposition Equipment
KR960002692U (en) Low pressure chemical vapor deposition equipment
KR950023944U (en) Low pressure chemical vapor deposition equipment
KR960006306U (en) Low Pressure Chemical Vapor Deposition Equipment
KR950007326U (en) Chemical Vapor Deposition Equipment
KR970015294U (en) Chemical Vapor Deposition Equipment
KR960027170U (en) Chemical vapor deposition equipment
KR940008658U (en) TWO-HOT-ZONE low pressure chemical vapor deposition system
KR940027591U (en) Low pressure chemical vapor deposition system byproduct removal device
KR950028660U (en) Low pressure chemical vapor deposition device
KR960025282U (en) Low pressure chemical vapor deposition device
KR960003077U (en) Wafer boat for low pressure chemical vapor deposition equipment
KR970046621U (en) Chemical vapor deposition equipment
KR970007707U (en) Chemical vapor deposition equipment
KR950002225U (en) Low pressure chemical vapor deposition machine
KR960035591U (en) Sheet-fed plasma low pressure chemical vapor deposition equipment
KR960027782U (en) Low pressure chemical vapor deposition device
KR920007032U (en) Plasma chemical vapor deposition equipment
KR940019721U (en) Vertical Low Pressure Chemical Vapor Deposition Reactor
KR970064168U (en) Semiconductor Low Pressure Chemical Vapor Deposition Equipment
KR950025872U (en) Vertical plasma low pressure chemical vapor deposition system
KR970050345U (en) Wafer-mounted boat for chemical vapor deposition equipment

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination