KR940019721U - Vertical Low Pressure Chemical Vapor Deposition Reactor - Google Patents

Vertical Low Pressure Chemical Vapor Deposition Reactor

Info

Publication number
KR940019721U
KR940019721U KR2019930001067U KR930001067U KR940019721U KR 940019721 U KR940019721 U KR 940019721U KR 2019930001067 U KR2019930001067 U KR 2019930001067U KR 930001067 U KR930001067 U KR 930001067U KR 940019721 U KR940019721 U KR 940019721U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition reactor
Prior art date
Application number
KR2019930001067U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930001067U priority Critical patent/KR940019721U/en
Publication of KR940019721U publication Critical patent/KR940019721U/en

Links

KR2019930001067U 1993-01-29 1993-01-29 Vertical Low Pressure Chemical Vapor Deposition Reactor KR940019721U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930001067U KR940019721U (en) 1993-01-29 1993-01-29 Vertical Low Pressure Chemical Vapor Deposition Reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930001067U KR940019721U (en) 1993-01-29 1993-01-29 Vertical Low Pressure Chemical Vapor Deposition Reactor

Publications (1)

Publication Number Publication Date
KR940019721U true KR940019721U (en) 1994-08-22

Family

ID=60671321

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930001067U KR940019721U (en) 1993-01-29 1993-01-29 Vertical Low Pressure Chemical Vapor Deposition Reactor

Country Status (1)

Country Link
KR (1) KR940019721U (en)

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Legal Events

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