KR970060387A - Method for manufacturing semiconductor device - Google Patents
Method for manufacturing semiconductor device Download PDFInfo
- Publication number
- KR970060387A KR970060387A KR1019960001679A KR19960001679A KR970060387A KR 970060387 A KR970060387 A KR 970060387A KR 1019960001679 A KR1019960001679 A KR 1019960001679A KR 19960001679 A KR19960001679 A KR 19960001679A KR 970060387 A KR970060387 A KR 970060387A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- film
- insulating film
- gate
- manufacturing
- Prior art date
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Abstract
본 발명은 반도체 장치의 제조 방법에 관한 것으로서, 좀더 구체적으로 게이트를 등방성 식각하므로써, 고집적 반도체 장치에서의 미세한 게이트를 형성하는 반도체 장치의 제조 방법에 관한 것이다. 반도체 장치의 게이트를 이방성 식각한 후, 등방상 식각하므로써, 반도체 장치의 게이트를 미세하게 형성할 수 있게 되어 향후의 고집적 반도체 장치를 형성하기가 용이할 뿐만 아니라, 반도체 장치의 집적도를 더욱더 향상시킬 수 있게 된다.The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of manufacturing a semiconductor device which forms a fine gate in a highly integrated semiconductor device by isotropically etching a gate. It is possible to finely form the gate of the semiconductor device by anisotropically etching the gate of the semiconductor device and then isotropically etched to easily form a highly integrated semiconductor device in the future and to further improve the degree of integration of the semiconductor device .
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제2a도 내지 제2d도는 본 발명의 실시예에 따라 반도체 장치를 제조하는 공정들을 보여주는 단면도.Figures 2a through 2d are cross-sectional views illustrating processes for fabricating a semiconductor device in accordance with an embodiment of the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960001679A KR970060387A (en) | 1996-01-26 | 1996-01-26 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960001679A KR970060387A (en) | 1996-01-26 | 1996-01-26 | Method for manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970060387A true KR970060387A (en) | 1997-08-12 |
Family
ID=66218871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960001679A KR970060387A (en) | 1996-01-26 | 1996-01-26 | Method for manufacturing semiconductor device |
Country Status (1)
Country | Link |
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KR (1) | KR970060387A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990055768A (en) * | 1997-12-27 | 1999-07-15 | 김영환 | Manufacturing method of semiconductor device |
KR20040014112A (en) * | 2002-08-09 | 2004-02-14 | 가부시키가이샤 히타치세이사쿠쇼 | Method of manufacturing a semiconductor integrated circuit device |
-
1996
- 1996-01-26 KR KR1019960001679A patent/KR970060387A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990055768A (en) * | 1997-12-27 | 1999-07-15 | 김영환 | Manufacturing method of semiconductor device |
KR20040014112A (en) * | 2002-08-09 | 2004-02-14 | 가부시키가이샤 히타치세이사쿠쇼 | Method of manufacturing a semiconductor integrated circuit device |
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WITN | Withdrawal due to no request for examination |